1/14/2011	12:00:48 AM	H2 valve closed
1/14/2011	12:00:48 AM	BCl3 valve closed
1/14/2011	12:00:48 AM	PH3 valve closed
1/14/2011	12:00:48 AM	SiCl4 pre valve closed
1/14/2011	12:00:48 AM	SiCl4 post valve closed
1/14/2011	12:00:48 AM	Bubbler valve closed
1/14/2011	12:00:48 AM	Helium valve opened
1/14/2011	12:00:48 AM	Main Vac valve opened
1/14/2011	12:00:48 AM	Bypass valve opened
1/14/2011	12:00:48 AM	Helium MFC set to  100.000000
1/14/2011	12:00:48 AM	H2 MFC set to  0.000000
1/14/2011	12:00:48 AM	BCl3 MFC set to  0.000000
1/14/2011	12:00:48 AM	PHl3 MFC set to  0.000000
1/14/2011	12:00:48 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:00:48 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:00:49 AM	Tube furnace set to 0
1/14/2011	12:01:49 AM	Helium valve closed
1/14/2011	12:01:49 AM	H2 valve closed
1/14/2011	12:01:49 AM	BCl3 valve closed
1/14/2011	12:01:49 AM	PH3 valve closed
1/14/2011	12:01:49 AM	SiCl4 pre valve closed
1/14/2011	12:01:49 AM	SiCl4 post valve closed
1/14/2011	12:01:49 AM	Bubbler valve closed
1/14/2011	12:01:49 AM	Main Vac valve opened
1/14/2011	12:01:49 AM	Bypass valve opened
1/14/2011	12:01:49 AM	Helium MFC set to  0.000000
1/14/2011	12:01:49 AM	H2 MFC set to  0.000000
1/14/2011	12:01:49 AM	BCl3 MFC set to  0.000000
1/14/2011	12:01:49 AM	PHl3 MFC set to  0.000000
1/14/2011	12:01:49 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:01:49 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:01:49 AM	Tube furnace set to 0
1/14/2011	12:02:49 AM	H2 valve closed
1/14/2011	12:02:49 AM	BCl3 valve closed
1/14/2011	12:02:49 AM	PH3 valve closed
1/14/2011	12:02:49 AM	SiCl4 pre valve closed
1/14/2011	12:02:49 AM	SiCl4 post valve closed
1/14/2011	12:02:49 AM	Bubbler valve closed
1/14/2011	12:02:49 AM	Helium valve opened
1/14/2011	12:02:49 AM	Main Vac valve opened
1/14/2011	12:02:49 AM	Bypass valve opened
1/14/2011	12:02:49 AM	Helium MFC set to  100.000000
1/14/2011	12:02:49 AM	H2 MFC set to  0.000000
1/14/2011	12:02:49 AM	BCl3 MFC set to  0.000000
1/14/2011	12:02:49 AM	PHl3 MFC set to  0.000000
1/14/2011	12:02:49 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:02:49 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:02:49 AM	Tube furnace set to 0
1/14/2011	12:03:49 AM	Helium valve closed
1/14/2011	12:03:49 AM	H2 valve closed
1/14/2011	12:03:49 AM	BCl3 valve closed
1/14/2011	12:03:49 AM	PH3 valve closed
1/14/2011	12:03:49 AM	SiCl4 pre valve closed
1/14/2011	12:03:49 AM	SiCl4 post valve closed
1/14/2011	12:03:49 AM	Bubbler valve closed
1/14/2011	12:03:49 AM	Main Vac valve opened
1/14/2011	12:03:49 AM	Bypass valve opened
1/14/2011	12:03:49 AM	Helium MFC set to  0.000000
1/14/2011	12:03:49 AM	H2 MFC set to  0.000000
1/14/2011	12:03:49 AM	BCl3 MFC set to  0.000000
1/14/2011	12:03:49 AM	PHl3 MFC set to  0.000000
1/14/2011	12:03:49 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:03:49 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:03:49 AM	Tube furnace set to 0
1/14/2011	12:04:49 AM	H2 valve closed
1/14/2011	12:04:49 AM	BCl3 valve closed
1/14/2011	12:04:49 AM	PH3 valve closed
1/14/2011	12:04:49 AM	SiCl4 pre valve closed
1/14/2011	12:04:49 AM	SiCl4 post valve closed
1/14/2011	12:04:49 AM	Bubbler valve closed
1/14/2011	12:04:49 AM	Helium valve opened
1/14/2011	12:04:49 AM	Main Vac valve opened
1/14/2011	12:04:49 AM	Bypass valve opened
1/14/2011	12:04:49 AM	Helium MFC set to  100.000000
1/14/2011	12:04:49 AM	H2 MFC set to  0.000000
1/14/2011	12:04:49 AM	BCl3 MFC set to  0.000000
1/14/2011	12:04:49 AM	PHl3 MFC set to  0.000000
1/14/2011	12:04:49 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:04:49 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:04:49 AM	Tube furnace set to 0
1/14/2011	12:05:49 AM	Helium valve closed
1/14/2011	12:05:49 AM	H2 valve closed
1/14/2011	12:05:49 AM	BCl3 valve closed
1/14/2011	12:05:49 AM	PH3 valve closed
1/14/2011	12:05:49 AM	SiCl4 pre valve closed
1/14/2011	12:05:49 AM	SiCl4 post valve closed
1/14/2011	12:05:49 AM	Bubbler valve closed
1/14/2011	12:05:49 AM	Main Vac valve opened
1/14/2011	12:05:49 AM	Bypass valve opened
1/14/2011	12:05:49 AM	Helium MFC set to  0.000000
1/14/2011	12:05:49 AM	H2 MFC set to  0.000000
1/14/2011	12:05:49 AM	BCl3 MFC set to  0.000000
1/14/2011	12:05:49 AM	PHl3 MFC set to  0.000000
1/14/2011	12:05:49 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:05:49 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:05:50 AM	Tube furnace set to 0
1/14/2011	12:06:50 AM	H2 valve closed
1/14/2011	12:06:50 AM	BCl3 valve closed
1/14/2011	12:06:50 AM	PH3 valve closed
1/14/2011	12:06:50 AM	SiCl4 pre valve closed
1/14/2011	12:06:50 AM	SiCl4 post valve closed
1/14/2011	12:06:50 AM	Bubbler valve closed
1/14/2011	12:06:50 AM	Helium valve opened
1/14/2011	12:06:50 AM	Main Vac valve opened
1/14/2011	12:06:50 AM	Bypass valve opened
1/14/2011	12:06:50 AM	Helium MFC set to  100.000000
1/14/2011	12:06:50 AM	H2 MFC set to  0.000000
1/14/2011	12:06:50 AM	BCl3 MFC set to  0.000000
1/14/2011	12:06:50 AM	PHl3 MFC set to  0.000000
1/14/2011	12:06:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:06:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:06:50 AM	Tube furnace set to 0
1/14/2011	12:07:50 AM	Helium valve closed
1/14/2011	12:07:50 AM	H2 valve closed
1/14/2011	12:07:50 AM	BCl3 valve closed
1/14/2011	12:07:50 AM	PH3 valve closed
1/14/2011	12:07:50 AM	SiCl4 pre valve closed
1/14/2011	12:07:50 AM	SiCl4 post valve closed
1/14/2011	12:07:50 AM	Bubbler valve closed
1/14/2011	12:07:50 AM	Main Vac valve opened
1/14/2011	12:07:50 AM	Bypass valve opened
1/14/2011	12:07:50 AM	Helium MFC set to  0.000000
1/14/2011	12:07:50 AM	H2 MFC set to  0.000000
1/14/2011	12:07:50 AM	BCl3 MFC set to  0.000000
1/14/2011	12:07:50 AM	PHl3 MFC set to  0.000000
1/14/2011	12:07:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:07:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:07:50 AM	Tube furnace set to 0
1/14/2011	12:08:50 AM	H2 valve closed
1/14/2011	12:08:50 AM	BCl3 valve closed
1/14/2011	12:08:50 AM	PH3 valve closed
1/14/2011	12:08:50 AM	SiCl4 pre valve closed
1/14/2011	12:08:50 AM	SiCl4 post valve closed
1/14/2011	12:08:50 AM	Bubbler valve closed
1/14/2011	12:08:50 AM	Helium valve opened
1/14/2011	12:08:50 AM	Main Vac valve opened
1/14/2011	12:08:50 AM	Bypass valve opened
1/14/2011	12:08:50 AM	Helium MFC set to  100.000000
1/14/2011	12:08:50 AM	H2 MFC set to  0.000000
1/14/2011	12:08:50 AM	BCl3 MFC set to  0.000000
1/14/2011	12:08:50 AM	PHl3 MFC set to  0.000000
1/14/2011	12:08:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:08:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:08:50 AM	Tube furnace set to 0
1/14/2011	12:09:50 AM	Helium valve closed
1/14/2011	12:09:50 AM	H2 valve closed
1/14/2011	12:09:50 AM	BCl3 valve closed
1/14/2011	12:09:50 AM	PH3 valve closed
1/14/2011	12:09:50 AM	SiCl4 pre valve closed
1/14/2011	12:09:50 AM	SiCl4 post valve closed
1/14/2011	12:09:50 AM	Bubbler valve closed
1/14/2011	12:09:50 AM	Main Vac valve opened
1/14/2011	12:09:50 AM	Bypass valve opened
1/14/2011	12:09:50 AM	Helium MFC set to  0.000000
1/14/2011	12:09:50 AM	H2 MFC set to  0.000000
1/14/2011	12:09:50 AM	BCl3 MFC set to  0.000000
1/14/2011	12:09:50 AM	PHl3 MFC set to  0.000000
1/14/2011	12:09:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:09:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:09:50 AM	Tube furnace set to 0
1/14/2011	12:10:50 AM	H2 valve closed
1/14/2011	12:10:50 AM	BCl3 valve closed
1/14/2011	12:10:50 AM	PH3 valve closed
1/14/2011	12:10:50 AM	SiCl4 pre valve closed
1/14/2011	12:10:50 AM	SiCl4 post valve closed
1/14/2011	12:10:50 AM	Bubbler valve closed
1/14/2011	12:10:50 AM	Helium valve opened
1/14/2011	12:10:50 AM	Main Vac valve opened
1/14/2011	12:10:50 AM	Bypass valve opened
1/14/2011	12:10:50 AM	Helium MFC set to  100.000000
1/14/2011	12:10:50 AM	H2 MFC set to  0.000000
1/14/2011	12:10:50 AM	BCl3 MFC set to  0.000000
1/14/2011	12:10:50 AM	PHl3 MFC set to  0.000000
1/14/2011	12:10:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:10:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:10:51 AM	Tube furnace set to 0
1/14/2011	12:11:51 AM	Helium valve closed
1/14/2011	12:11:51 AM	H2 valve closed
1/14/2011	12:11:51 AM	BCl3 valve closed
1/14/2011	12:11:51 AM	PH3 valve closed
1/14/2011	12:11:51 AM	SiCl4 pre valve closed
1/14/2011	12:11:51 AM	SiCl4 post valve closed
1/14/2011	12:11:51 AM	Bubbler valve closed
1/14/2011	12:11:51 AM	Main Vac valve opened
1/14/2011	12:11:51 AM	Bypass valve opened
1/14/2011	12:11:51 AM	Helium MFC set to  0.000000
1/14/2011	12:11:51 AM	H2 MFC set to  0.000000
1/14/2011	12:11:51 AM	BCl3 MFC set to  0.000000
1/14/2011	12:11:51 AM	PHl3 MFC set to  0.000000
1/14/2011	12:11:51 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:11:51 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:11:51 AM	Tube furnace set to 0
1/14/2011	12:12:51 AM	H2 valve closed
1/14/2011	12:12:51 AM	BCl3 valve closed
1/14/2011	12:12:51 AM	PH3 valve closed
1/14/2011	12:12:51 AM	SiCl4 pre valve closed
1/14/2011	12:12:51 AM	SiCl4 post valve closed
1/14/2011	12:12:51 AM	Bubbler valve closed
1/14/2011	12:12:51 AM	Helium valve opened
1/14/2011	12:12:51 AM	Main Vac valve opened
1/14/2011	12:12:51 AM	Bypass valve opened
1/14/2011	12:12:51 AM	Helium MFC set to  100.000000
1/14/2011	12:12:51 AM	H2 MFC set to  0.000000
1/14/2011	12:12:51 AM	BCl3 MFC set to  0.000000
1/14/2011	12:12:51 AM	PHl3 MFC set to  0.000000
1/14/2011	12:12:51 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:12:51 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:12:51 AM	Tube furnace set to 0
1/14/2011	12:13:51 AM	Helium valve closed
1/14/2011	12:13:51 AM	H2 valve closed
1/14/2011	12:13:51 AM	BCl3 valve closed
1/14/2011	12:13:51 AM	PH3 valve closed
1/14/2011	12:13:51 AM	SiCl4 pre valve closed
1/14/2011	12:13:51 AM	SiCl4 post valve closed
1/14/2011	12:13:51 AM	Bubbler valve closed
1/14/2011	12:13:51 AM	Main Vac valve opened
1/14/2011	12:13:51 AM	Bypass valve opened
1/14/2011	12:13:51 AM	Helium MFC set to  0.000000
1/14/2011	12:13:51 AM	H2 MFC set to  0.000000
1/14/2011	12:13:51 AM	BCl3 MFC set to  0.000000
1/14/2011	12:13:51 AM	PHl3 MFC set to  0.000000
1/14/2011	12:13:51 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:13:51 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:13:51 AM	Tube furnace set to 0
1/14/2011	12:14:51 AM	H2 valve closed
1/14/2011	12:14:51 AM	BCl3 valve closed
1/14/2011	12:14:51 AM	PH3 valve closed
1/14/2011	12:14:51 AM	SiCl4 pre valve closed
1/14/2011	12:14:51 AM	SiCl4 post valve closed
1/14/2011	12:14:51 AM	Bubbler valve closed
1/14/2011	12:14:51 AM	Helium valve opened
1/14/2011	12:14:51 AM	Main Vac valve opened
1/14/2011	12:14:51 AM	Bypass valve opened
1/14/2011	12:14:51 AM	Helium MFC set to  100.000000
1/14/2011	12:14:51 AM	H2 MFC set to  0.000000
1/14/2011	12:14:51 AM	BCl3 MFC set to  0.000000
1/14/2011	12:14:51 AM	PHl3 MFC set to  0.000000
1/14/2011	12:14:51 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:14:51 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:14:51 AM	Tube furnace set to 0
1/14/2011	12:15:51 AM	Helium valve closed
1/14/2011	12:15:51 AM	H2 valve closed
1/14/2011	12:15:51 AM	BCl3 valve closed
1/14/2011	12:15:51 AM	PH3 valve closed
1/14/2011	12:15:51 AM	SiCl4 pre valve closed
1/14/2011	12:15:51 AM	SiCl4 post valve closed
1/14/2011	12:15:51 AM	Bubbler valve closed
1/14/2011	12:15:51 AM	Main Vac valve opened
1/14/2011	12:15:51 AM	Bypass valve opened
1/14/2011	12:15:51 AM	Helium MFC set to  0.000000
1/14/2011	12:15:51 AM	H2 MFC set to  0.000000
1/14/2011	12:15:51 AM	BCl3 MFC set to  0.000000
1/14/2011	12:15:52 AM	PHl3 MFC set to  0.000000
1/14/2011	12:15:52 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:15:52 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:15:52 AM	Tube furnace set to 0
1/14/2011	12:16:52 AM	H2 valve closed
1/14/2011	12:16:52 AM	BCl3 valve closed
1/14/2011	12:16:52 AM	PH3 valve closed
1/14/2011	12:16:52 AM	SiCl4 pre valve closed
1/14/2011	12:16:52 AM	SiCl4 post valve closed
1/14/2011	12:16:52 AM	Bubbler valve closed
1/14/2011	12:16:52 AM	Helium valve opened
1/14/2011	12:16:52 AM	Main Vac valve opened
1/14/2011	12:16:52 AM	Bypass valve opened
1/14/2011	12:16:52 AM	Helium MFC set to  100.000000
1/14/2011	12:16:52 AM	H2 MFC set to  0.000000
1/14/2011	12:16:52 AM	BCl3 MFC set to  0.000000
1/14/2011	12:16:52 AM	PHl3 MFC set to  0.000000
1/14/2011	12:16:52 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:16:52 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:16:52 AM	Tube furnace set to 0
1/14/2011	12:17:52 AM	Helium valve closed
1/14/2011	12:17:52 AM	H2 valve closed
1/14/2011	12:17:52 AM	BCl3 valve closed
1/14/2011	12:17:52 AM	PH3 valve closed
1/14/2011	12:17:52 AM	SiCl4 pre valve closed
1/14/2011	12:17:52 AM	SiCl4 post valve closed
1/14/2011	12:17:52 AM	Bubbler valve closed
1/14/2011	12:17:52 AM	Main Vac valve opened
1/14/2011	12:17:52 AM	Bypass valve opened
1/14/2011	12:17:52 AM	Helium MFC set to  0.000000
1/14/2011	12:17:52 AM	H2 MFC set to  0.000000
1/14/2011	12:17:52 AM	BCl3 MFC set to  0.000000
1/14/2011	12:17:52 AM	PHl3 MFC set to  0.000000
1/14/2011	12:17:52 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:17:52 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:17:52 AM	Tube furnace set to 0
1/14/2011	12:18:52 AM	H2 valve closed
1/14/2011	12:18:52 AM	BCl3 valve closed
1/14/2011	12:18:52 AM	PH3 valve closed
1/14/2011	12:18:52 AM	SiCl4 pre valve closed
1/14/2011	12:18:52 AM	SiCl4 post valve closed
1/14/2011	12:18:52 AM	Bubbler valve closed
1/14/2011	12:18:52 AM	Helium valve opened
1/14/2011	12:18:52 AM	Main Vac valve opened
1/14/2011	12:18:52 AM	Bypass valve opened
1/14/2011	12:18:52 AM	Helium MFC set to  100.000000
1/14/2011	12:18:52 AM	H2 MFC set to  0.000000
1/14/2011	12:18:52 AM	BCl3 MFC set to  0.000000
1/14/2011	12:18:52 AM	PHl3 MFC set to  0.000000
1/14/2011	12:18:52 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:18:52 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:18:52 AM	Tube furnace set to 0
1/14/2011	12:19:52 AM	Helium valve closed
1/14/2011	12:19:52 AM	H2 valve closed
1/14/2011	12:19:52 AM	BCl3 valve closed
1/14/2011	12:19:52 AM	PH3 valve closed
1/14/2011	12:19:52 AM	SiCl4 pre valve closed
1/14/2011	12:19:52 AM	SiCl4 post valve closed
1/14/2011	12:19:52 AM	Bubbler valve closed
1/14/2011	12:19:52 AM	Main Vac valve opened
1/14/2011	12:19:52 AM	Bypass valve opened
1/14/2011	12:19:52 AM	Helium MFC set to  0.000000
1/14/2011	12:19:52 AM	H2 MFC set to  0.000000
1/14/2011	12:19:52 AM	BCl3 MFC set to  0.000000
1/14/2011	12:19:52 AM	PHl3 MFC set to  0.000000
1/14/2011	12:19:52 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:19:52 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:19:52 AM	Tube furnace set to 0
1/14/2011	12:19:53 AM	Run finished at 12:19 AM
1/14/2011	12:19:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	12:22:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/14/2011	12:22:45 AM	Recipe started at 12:22 AM
1/14/2011	12:22:45 AM	Helium valve closed
1/14/2011	12:22:45 AM	H2 valve closed
1/14/2011	12:22:45 AM	BCl3 valve closed
1/14/2011	12:22:45 AM	PH3 valve closed
1/14/2011	12:22:45 AM	SiCl4 pre valve closed
1/14/2011	12:22:45 AM	SiCl4 post valve closed
1/14/2011	12:22:45 AM	Main Vac valve closed
1/14/2011	12:22:45 AM	Bypass valve closed
1/14/2011	12:22:45 AM	Bubbler valve closed
1/14/2011	12:22:45 AM	Helium MFC set to  0.000000
1/14/2011	12:22:45 AM	H2 MFC set to  0.000000
1/14/2011	12:22:45 AM	BCl3 MFC set to  0.000000
1/14/2011	12:22:45 AM	PHl3 MFC set to  0.000000
1/14/2011	12:22:45 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:22:45 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:22:46 AM	Tube furnace set to 0
1/14/2011	12:22:46 AM	Run finished at 12:22 AM
1/14/2011	12:22:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/14/2011	12:22:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	12:22:59 AM	Recipe started at 12:22 AM
1/14/2011	12:22:59 AM	Helium valve closed
1/14/2011	12:22:59 AM	H2 valve closed
1/14/2011	12:22:59 AM	BCl3 valve closed
1/14/2011	12:22:59 AM	PH3 valve closed
1/14/2011	12:22:59 AM	SiCl4 pre valve closed
1/14/2011	12:22:59 AM	SiCl4 post valve closed
1/14/2011	12:22:59 AM	Main Vac valve closed
1/14/2011	12:22:59 AM	Bubbler valve closed
1/14/2011	12:22:59 AM	Bypass valve opened
1/14/2011	12:22:59 AM	Helium MFC set to  0.000000
1/14/2011	12:22:59 AM	H2 MFC set to  0.000000
1/14/2011	12:22:59 AM	BCl3 MFC set to  0.000000
1/14/2011	12:22:59 AM	PHl3 MFC set to  0.000000
1/14/2011	12:22:59 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:22:59 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:22:59 AM	Tube furnace set to 0
1/14/2011	12:23:00 AM	Helium valve closed
1/14/2011	12:23:00 AM	H2 valve closed
1/14/2011	12:23:00 AM	BCl3 valve closed
1/14/2011	12:23:00 AM	PH3 valve closed
1/14/2011	12:23:00 AM	SiCl4 pre valve closed
1/14/2011	12:23:00 AM	SiCl4 post valve closed
1/14/2011	12:23:00 AM	Bubbler valve closed
1/14/2011	12:23:00 AM	Main Vac valve opened
1/14/2011	12:23:00 AM	Bypass valve opened
1/14/2011	12:23:00 AM	Helium MFC set to  0.000000
1/14/2011	12:23:00 AM	H2 MFC set to  0.000000
1/14/2011	12:23:00 AM	BCl3 MFC set to  0.000000
1/14/2011	12:23:00 AM	PHl3 MFC set to  0.000000
1/14/2011	12:23:00 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:23:00 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:23:00 AM	Tube furnace set to 0
1/14/2011	12:23:00 AM	Run finished at 12:23 AM
1/14/2011	12:23:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	12:23:42 AM	Recipe started at 12:23 AM
1/14/2011	12:23:42 AM	Helium valve closed
1/14/2011	12:23:42 AM	BCl3 valve closed
1/14/2011	12:23:42 AM	PH3 valve closed
1/14/2011	12:23:42 AM	SiCl4 pre valve closed
1/14/2011	12:23:42 AM	SiCl4 post valve closed
1/14/2011	12:23:42 AM	Main Vac valve closed
1/14/2011	12:23:42 AM	Bypass valve closed
1/14/2011	12:23:42 AM	Bubbler valve closed
1/14/2011	12:23:42 AM	H2 valve opened
1/14/2011	12:23:42 AM	Helium MFC set to  0.000000
1/14/2011	12:23:42 AM	H2 MFC set to  500.000000
1/14/2011	12:23:42 AM	BCl3 MFC set to  0.000000
1/14/2011	12:23:42 AM	PHl3 MFC set to  0.000000
1/14/2011	12:23:42 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:23:42 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:23:42 AM	Tube furnace set to 0
1/14/2011	12:25:02 AM	Helium valve closed
1/14/2011	12:25:02 AM	BCl3 valve closed
1/14/2011	12:25:02 AM	PH3 valve closed
1/14/2011	12:25:02 AM	SiCl4 pre valve closed
1/14/2011	12:25:02 AM	SiCl4 post valve closed
1/14/2011	12:25:02 AM	Main Vac valve closed
1/14/2011	12:25:02 AM	Bypass valve closed
1/14/2011	12:25:02 AM	H2 valve opened
1/14/2011	12:25:02 AM	Bubbler valve opened
1/14/2011	12:25:02 AM	Helium MFC set to  0.000000
1/14/2011	12:25:02 AM	H2 MFC set to  500.000000
1/14/2011	12:25:02 AM	BCl3 MFC set to  0.000000
1/14/2011	12:25:02 AM	PHl3 MFC set to  0.000000
1/14/2011	12:25:02 AM	SiCl4 MFC set to  0.000000
1/14/2011	12:25:02 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:25:02 AM	Tube furnace set to 1000
1/14/2011	12:45:03 AM	Helium valve closed
1/14/2011	12:45:03 AM	PH3 valve closed
1/14/2011	12:45:03 AM	Main Vac valve closed
1/14/2011	12:45:03 AM	Bypass valve closed
1/14/2011	12:45:03 AM	H2 valve opened
1/14/2011	12:45:03 AM	BCl3 valve opened
1/14/2011	12:45:03 AM	SiCl4 pre valve opened
1/14/2011	12:45:03 AM	SiCl4 post valve opened
1/14/2011	12:45:03 AM	Bubbler valve opened
1/14/2011	12:45:03 AM	Helium MFC set to  0.000000
1/14/2011	12:45:03 AM	H2 MFC set to  500.000000
1/14/2011	12:45:03 AM	BCl3 MFC set to  1.800000
1/14/2011	12:45:03 AM	PHl3 MFC set to  0.000000
1/14/2011	12:45:03 AM	SiCl4 MFC set to  50.000000
1/14/2011	12:45:03 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:45:03 AM	Tube furnace set to 1000
1/14/2011	1:15:03 AM	H2 valve closed
1/14/2011	1:15:03 AM	BCl3 valve closed
1/14/2011	1:15:03 AM	PH3 valve closed
1/14/2011	1:15:03 AM	SiCl4 pre valve closed
1/14/2011	1:15:03 AM	SiCl4 post valve closed
1/14/2011	1:15:03 AM	Main Vac valve closed
1/14/2011	1:15:03 AM	Bypass valve closed
1/14/2011	1:15:03 AM	Helium valve opened
1/14/2011	1:15:03 AM	Bubbler valve opened
1/14/2011	1:15:03 AM	Helium MFC set to  500.000000
1/14/2011	1:15:03 AM	H2 MFC set to  0.000000
1/14/2011	1:15:03 AM	BCl3 MFC set to  0.000000
1/14/2011	1:15:03 AM	PHl3 MFC set to  0.000000
1/14/2011	1:15:03 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:15:03 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:15:03 AM	Tube furnace set to 0
1/14/2011	1:35:03 AM	Helium valve closed
1/14/2011	1:35:03 AM	H2 valve closed
1/14/2011	1:35:03 AM	BCl3 valve closed
1/14/2011	1:35:03 AM	PH3 valve closed
1/14/2011	1:35:03 AM	SiCl4 pre valve closed
1/14/2011	1:35:03 AM	SiCl4 post valve closed
1/14/2011	1:35:03 AM	Main Vac valve closed
1/14/2011	1:35:03 AM	Bypass valve closed
1/14/2011	1:35:03 AM	Bubbler valve closed
1/14/2011	1:35:03 AM	Helium MFC set to  0.000000
1/14/2011	1:35:03 AM	H2 MFC set to  0.000000
1/14/2011	1:35:03 AM	BCl3 MFC set to  0.000000
1/14/2011	1:35:03 AM	PHl3 MFC set to  0.000000
1/14/2011	1:35:03 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:35:03 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:35:03 AM	Tube furnace set to 0
1/14/2011	1:35:03 AM	Run finished at 1:35 AM
1/14/2011	1:47:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	1:47:18 AM	Recipe started at 1:47 AM
1/14/2011	1:47:18 AM	H2 valve closed
1/14/2011	1:47:18 AM	BCl3 valve closed
1/14/2011	1:47:18 AM	PH3 valve closed
1/14/2011	1:47:18 AM	SiCl4 pre valve closed
1/14/2011	1:47:18 AM	SiCl4 post valve closed
1/14/2011	1:47:18 AM	Main Vac valve closed
1/14/2011	1:47:18 AM	Bypass valve closed
1/14/2011	1:47:18 AM	Bubbler valve closed
1/14/2011	1:47:18 AM	Helium valve opened
1/14/2011	1:47:18 AM	Helium MFC set to  500.000000
1/14/2011	1:47:18 AM	H2 MFC set to  0.000000
1/14/2011	1:47:18 AM	BCl3 MFC set to  0.000000
1/14/2011	1:47:18 AM	PHl3 MFC set to  0.000000
1/14/2011	1:47:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:47:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:47:18 AM	Tube furnace set to 0
1/14/2011	1:47:24 AM	Helium valve closed
1/14/2011	1:47:24 AM	H2 valve closed
1/14/2011	1:47:24 AM	BCl3 valve closed
1/14/2011	1:47:24 AM	PH3 valve closed
1/14/2011	1:47:24 AM	SiCl4 pre valve closed
1/14/2011	1:47:24 AM	SiCl4 post valve closed
1/14/2011	1:47:24 AM	Main Vac valve closed
1/14/2011	1:47:24 AM	Bypass valve closed
1/14/2011	1:47:24 AM	Bubbler valve closed
1/14/2011	1:47:24 AM	Helium MFC set to  0.000000
1/14/2011	1:47:24 AM	H2 MFC set to  0.000000
1/14/2011	1:47:24 AM	BCl3 MFC set to  0.000000
1/14/2011	1:47:24 AM	PHl3 MFC set to  0.000000
1/14/2011	1:47:24 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:47:24 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:47:24 AM	Tube furnace set to 0
1/14/2011	1:47:24 AM	Run finished at 1:47 AM
1/14/2011	1:47:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	1:55:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	1:55:27 AM	Recipe started at 1:55 AM
1/14/2011	1:55:27 AM	Helium valve closed
1/14/2011	1:55:27 AM	H2 valve closed
1/14/2011	1:55:27 AM	BCl3 valve closed
1/14/2011	1:55:27 AM	PH3 valve closed
1/14/2011	1:55:27 AM	SiCl4 pre valve closed
1/14/2011	1:55:27 AM	SiCl4 post valve closed
1/14/2011	1:55:27 AM	Main Vac valve closed
1/14/2011	1:55:27 AM	Bubbler valve closed
1/14/2011	1:55:27 AM	Bypass valve opened
1/14/2011	1:55:27 AM	Helium MFC set to  0.000000
1/14/2011	1:55:27 AM	H2 MFC set to  0.000000
1/14/2011	1:55:27 AM	BCl3 MFC set to  0.000000
1/14/2011	1:55:27 AM	PHl3 MFC set to  0.000000
1/14/2011	1:55:27 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:55:27 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:55:27 AM	Tube furnace set to 0
1/14/2011	1:56:00 AM	Helium valve closed
1/14/2011	1:56:00 AM	H2 valve closed
1/14/2011	1:56:00 AM	BCl3 valve closed
1/14/2011	1:56:00 AM	PH3 valve closed
1/14/2011	1:56:00 AM	SiCl4 pre valve closed
1/14/2011	1:56:00 AM	SiCl4 post valve closed
1/14/2011	1:56:00 AM	Bubbler valve closed
1/14/2011	1:56:00 AM	Main Vac valve opened
1/14/2011	1:56:00 AM	Bypass valve opened
1/14/2011	1:56:00 AM	Helium MFC set to  0.000000
1/14/2011	1:56:00 AM	H2 MFC set to  0.000000
1/14/2011	1:56:00 AM	BCl3 MFC set to  0.000000
1/14/2011	1:56:00 AM	PHl3 MFC set to  0.000000
1/14/2011	1:56:00 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:56:00 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:56:00 AM	Tube furnace set to 0
1/14/2011	1:56:00 AM	Run finished at 1:56 AM
1/14/2011	1:56:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	1:57:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	1:57:15 AM	Recipe started at 1:57 AM
1/14/2011	1:57:15 AM	Helium valve closed
1/14/2011	1:57:15 AM	H2 valve closed
1/14/2011	1:57:15 AM	BCl3 valve closed
1/14/2011	1:57:15 AM	PH3 valve closed
1/14/2011	1:57:15 AM	SiCl4 pre valve closed
1/14/2011	1:57:15 AM	SiCl4 post valve closed
1/14/2011	1:57:15 AM	Main Vac valve closed
1/14/2011	1:57:15 AM	Bubbler valve closed
1/14/2011	1:57:15 AM	Bypass valve opened
1/14/2011	1:57:15 AM	Helium MFC set to  0.000000
1/14/2011	1:57:15 AM	H2 MFC set to  0.000000
1/14/2011	1:57:15 AM	BCl3 MFC set to  0.000000
1/14/2011	1:57:15 AM	PHl3 MFC set to  0.000000
1/14/2011	1:57:15 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:57:15 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:57:15 AM	Tube furnace set to 0
1/14/2011	1:57:15 AM	Helium valve closed
1/14/2011	1:57:15 AM	H2 valve closed
1/14/2011	1:57:15 AM	BCl3 valve closed
1/14/2011	1:57:15 AM	PH3 valve closed
1/14/2011	1:57:15 AM	SiCl4 pre valve closed
1/14/2011	1:57:15 AM	SiCl4 post valve closed
1/14/2011	1:57:15 AM	Bubbler valve closed
1/14/2011	1:57:15 AM	Main Vac valve opened
1/14/2011	1:57:15 AM	Bypass valve opened
1/14/2011	1:57:15 AM	Helium MFC set to  0.000000
1/14/2011	1:57:15 AM	H2 MFC set to  0.000000
1/14/2011	1:57:15 AM	BCl3 MFC set to  0.000000
1/14/2011	1:57:15 AM	PHl3 MFC set to  0.000000
1/14/2011	1:57:15 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:57:15 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:57:15 AM	Tube furnace set to 0
1/14/2011	1:58:15 AM	H2 valve closed
1/14/2011	1:58:15 AM	BCl3 valve closed
1/14/2011	1:58:15 AM	PH3 valve closed
1/14/2011	1:58:15 AM	SiCl4 pre valve closed
1/14/2011	1:58:15 AM	SiCl4 post valve closed
1/14/2011	1:58:15 AM	Bubbler valve closed
1/14/2011	1:58:15 AM	Helium valve opened
1/14/2011	1:58:15 AM	Main Vac valve opened
1/14/2011	1:58:15 AM	Bypass valve opened
1/14/2011	1:58:15 AM	Helium MFC set to  100.000000
1/14/2011	1:58:15 AM	H2 MFC set to  0.000000
1/14/2011	1:58:15 AM	BCl3 MFC set to  0.000000
1/14/2011	1:58:15 AM	PHl3 MFC set to  0.000000
1/14/2011	1:58:15 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:58:15 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:58:15 AM	Tube furnace set to 0
1/14/2011	1:59:16 AM	Helium valve closed
1/14/2011	1:59:16 AM	H2 valve closed
1/14/2011	1:59:16 AM	BCl3 valve closed
1/14/2011	1:59:16 AM	PH3 valve closed
1/14/2011	1:59:16 AM	SiCl4 pre valve closed
1/14/2011	1:59:16 AM	SiCl4 post valve closed
1/14/2011	1:59:16 AM	Bubbler valve closed
1/14/2011	1:59:16 AM	Main Vac valve opened
1/14/2011	1:59:16 AM	Bypass valve opened
1/14/2011	1:59:16 AM	Helium MFC set to  0.000000
1/14/2011	1:59:16 AM	H2 MFC set to  0.000000
1/14/2011	1:59:16 AM	BCl3 MFC set to  0.000000
1/14/2011	1:59:16 AM	PHl3 MFC set to  0.000000
1/14/2011	1:59:16 AM	SiCl4 MFC set to  0.000000
1/14/2011	1:59:16 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:59:16 AM	Tube furnace set to 0
1/14/2011	2:00:16 AM	H2 valve closed
1/14/2011	2:00:16 AM	BCl3 valve closed
1/14/2011	2:00:16 AM	PH3 valve closed
1/14/2011	2:00:16 AM	SiCl4 pre valve closed
1/14/2011	2:00:16 AM	SiCl4 post valve closed
1/14/2011	2:00:16 AM	Bubbler valve closed
1/14/2011	2:00:16 AM	Helium valve opened
1/14/2011	2:00:16 AM	Main Vac valve opened
1/14/2011	2:00:16 AM	Bypass valve opened
1/14/2011	2:00:16 AM	Helium MFC set to  100.000000
1/14/2011	2:00:16 AM	H2 MFC set to  0.000000
1/14/2011	2:00:16 AM	BCl3 MFC set to  0.000000
1/14/2011	2:00:16 AM	PHl3 MFC set to  0.000000
1/14/2011	2:00:16 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:00:16 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:00:16 AM	Tube furnace set to 0
1/14/2011	2:01:16 AM	Helium valve closed
1/14/2011	2:01:16 AM	H2 valve closed
1/14/2011	2:01:16 AM	BCl3 valve closed
1/14/2011	2:01:16 AM	PH3 valve closed
1/14/2011	2:01:16 AM	SiCl4 pre valve closed
1/14/2011	2:01:16 AM	SiCl4 post valve closed
1/14/2011	2:01:16 AM	Bubbler valve closed
1/14/2011	2:01:16 AM	Main Vac valve opened
1/14/2011	2:01:16 AM	Bypass valve opened
1/14/2011	2:01:16 AM	Helium MFC set to  0.000000
1/14/2011	2:01:16 AM	H2 MFC set to  0.000000
1/14/2011	2:01:16 AM	BCl3 MFC set to  0.000000
1/14/2011	2:01:16 AM	PHl3 MFC set to  0.000000
1/14/2011	2:01:16 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:01:16 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:01:16 AM	Tube furnace set to 0
1/14/2011	2:02:16 AM	H2 valve closed
1/14/2011	2:02:16 AM	BCl3 valve closed
1/14/2011	2:02:16 AM	PH3 valve closed
1/14/2011	2:02:16 AM	SiCl4 pre valve closed
1/14/2011	2:02:16 AM	SiCl4 post valve closed
1/14/2011	2:02:16 AM	Bubbler valve closed
1/14/2011	2:02:16 AM	Helium valve opened
1/14/2011	2:02:16 AM	Main Vac valve opened
1/14/2011	2:02:16 AM	Bypass valve opened
1/14/2011	2:02:16 AM	Helium MFC set to  100.000000
1/14/2011	2:02:16 AM	H2 MFC set to  0.000000
1/14/2011	2:02:16 AM	BCl3 MFC set to  0.000000
1/14/2011	2:02:16 AM	PHl3 MFC set to  0.000000
1/14/2011	2:02:16 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:02:16 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:02:16 AM	Tube furnace set to 0
1/14/2011	2:03:16 AM	Helium valve closed
1/14/2011	2:03:16 AM	H2 valve closed
1/14/2011	2:03:16 AM	BCl3 valve closed
1/14/2011	2:03:16 AM	PH3 valve closed
1/14/2011	2:03:16 AM	SiCl4 pre valve closed
1/14/2011	2:03:16 AM	SiCl4 post valve closed
1/14/2011	2:03:16 AM	Bubbler valve closed
1/14/2011	2:03:16 AM	Main Vac valve opened
1/14/2011	2:03:16 AM	Bypass valve opened
1/14/2011	2:03:16 AM	Helium MFC set to  0.000000
1/14/2011	2:03:16 AM	H2 MFC set to  0.000000
1/14/2011	2:03:16 AM	BCl3 MFC set to  0.000000
1/14/2011	2:03:16 AM	PHl3 MFC set to  0.000000
1/14/2011	2:03:16 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:03:16 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:03:16 AM	Tube furnace set to 0
1/14/2011	2:04:17 AM	H2 valve closed
1/14/2011	2:04:17 AM	BCl3 valve closed
1/14/2011	2:04:17 AM	PH3 valve closed
1/14/2011	2:04:17 AM	SiCl4 pre valve closed
1/14/2011	2:04:17 AM	SiCl4 post valve closed
1/14/2011	2:04:17 AM	Bubbler valve closed
1/14/2011	2:04:17 AM	Helium valve opened
1/14/2011	2:04:17 AM	Main Vac valve opened
1/14/2011	2:04:17 AM	Bypass valve opened
1/14/2011	2:04:17 AM	Helium MFC set to  100.000000
1/14/2011	2:04:17 AM	H2 MFC set to  0.000000
1/14/2011	2:04:17 AM	BCl3 MFC set to  0.000000
1/14/2011	2:04:17 AM	PHl3 MFC set to  0.000000
1/14/2011	2:04:17 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:04:17 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:04:17 AM	Tube furnace set to 0
1/14/2011	2:05:17 AM	Helium valve closed
1/14/2011	2:05:17 AM	H2 valve closed
1/14/2011	2:05:17 AM	BCl3 valve closed
1/14/2011	2:05:17 AM	PH3 valve closed
1/14/2011	2:05:17 AM	SiCl4 pre valve closed
1/14/2011	2:05:17 AM	SiCl4 post valve closed
1/14/2011	2:05:17 AM	Bubbler valve closed
1/14/2011	2:05:17 AM	Main Vac valve opened
1/14/2011	2:05:17 AM	Bypass valve opened
1/14/2011	2:05:17 AM	Helium MFC set to  0.000000
1/14/2011	2:05:17 AM	H2 MFC set to  0.000000
1/14/2011	2:05:17 AM	BCl3 MFC set to  0.000000
1/14/2011	2:05:17 AM	PHl3 MFC set to  0.000000
1/14/2011	2:05:17 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:05:17 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:05:17 AM	Tube furnace set to 0
1/14/2011	2:06:17 AM	H2 valve closed
1/14/2011	2:06:17 AM	BCl3 valve closed
1/14/2011	2:06:17 AM	PH3 valve closed
1/14/2011	2:06:17 AM	SiCl4 pre valve closed
1/14/2011	2:06:17 AM	SiCl4 post valve closed
1/14/2011	2:06:17 AM	Bubbler valve closed
1/14/2011	2:06:17 AM	Helium valve opened
1/14/2011	2:06:17 AM	Main Vac valve opened
1/14/2011	2:06:17 AM	Bypass valve opened
1/14/2011	2:06:17 AM	Helium MFC set to  100.000000
1/14/2011	2:06:17 AM	H2 MFC set to  0.000000
1/14/2011	2:06:17 AM	BCl3 MFC set to  0.000000
1/14/2011	2:06:17 AM	PHl3 MFC set to  0.000000
1/14/2011	2:06:17 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:06:17 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:06:17 AM	Tube furnace set to 0
1/14/2011	2:07:17 AM	Helium valve closed
1/14/2011	2:07:17 AM	H2 valve closed
1/14/2011	2:07:17 AM	BCl3 valve closed
1/14/2011	2:07:17 AM	PH3 valve closed
1/14/2011	2:07:17 AM	SiCl4 pre valve closed
1/14/2011	2:07:17 AM	SiCl4 post valve closed
1/14/2011	2:07:17 AM	Bubbler valve closed
1/14/2011	2:07:17 AM	Main Vac valve opened
1/14/2011	2:07:17 AM	Bypass valve opened
1/14/2011	2:07:17 AM	Helium MFC set to  0.000000
1/14/2011	2:07:17 AM	H2 MFC set to  0.000000
1/14/2011	2:07:17 AM	BCl3 MFC set to  0.000000
1/14/2011	2:07:17 AM	PHl3 MFC set to  0.000000
1/14/2011	2:07:17 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:07:17 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:07:17 AM	Tube furnace set to 0
1/14/2011	2:08:17 AM	H2 valve closed
1/14/2011	2:08:17 AM	BCl3 valve closed
1/14/2011	2:08:17 AM	PH3 valve closed
1/14/2011	2:08:17 AM	SiCl4 pre valve closed
1/14/2011	2:08:17 AM	SiCl4 post valve closed
1/14/2011	2:08:17 AM	Bubbler valve closed
1/14/2011	2:08:17 AM	Helium valve opened
1/14/2011	2:08:17 AM	Main Vac valve opened
1/14/2011	2:08:17 AM	Bypass valve opened
1/14/2011	2:08:17 AM	Helium MFC set to  100.000000
1/14/2011	2:08:17 AM	H2 MFC set to  0.000000
1/14/2011	2:08:17 AM	BCl3 MFC set to  0.000000
1/14/2011	2:08:17 AM	PHl3 MFC set to  0.000000
1/14/2011	2:08:17 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:08:17 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:08:18 AM	Tube furnace set to 0
1/14/2011	2:09:18 AM	Helium valve closed
1/14/2011	2:09:18 AM	H2 valve closed
1/14/2011	2:09:18 AM	BCl3 valve closed
1/14/2011	2:09:18 AM	PH3 valve closed
1/14/2011	2:09:18 AM	SiCl4 pre valve closed
1/14/2011	2:09:18 AM	SiCl4 post valve closed
1/14/2011	2:09:18 AM	Bubbler valve closed
1/14/2011	2:09:18 AM	Main Vac valve opened
1/14/2011	2:09:18 AM	Bypass valve opened
1/14/2011	2:09:18 AM	Helium MFC set to  0.000000
1/14/2011	2:09:18 AM	H2 MFC set to  0.000000
1/14/2011	2:09:18 AM	BCl3 MFC set to  0.000000
1/14/2011	2:09:18 AM	PHl3 MFC set to  0.000000
1/14/2011	2:09:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:09:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:09:18 AM	Tube furnace set to 0
1/14/2011	2:10:18 AM	H2 valve closed
1/14/2011	2:10:18 AM	BCl3 valve closed
1/14/2011	2:10:18 AM	PH3 valve closed
1/14/2011	2:10:18 AM	SiCl4 pre valve closed
1/14/2011	2:10:18 AM	SiCl4 post valve closed
1/14/2011	2:10:18 AM	Bubbler valve closed
1/14/2011	2:10:18 AM	Helium valve opened
1/14/2011	2:10:18 AM	Main Vac valve opened
1/14/2011	2:10:18 AM	Bypass valve opened
1/14/2011	2:10:18 AM	Helium MFC set to  100.000000
1/14/2011	2:10:18 AM	H2 MFC set to  0.000000
1/14/2011	2:10:18 AM	BCl3 MFC set to  0.000000
1/14/2011	2:10:18 AM	PHl3 MFC set to  0.000000
1/14/2011	2:10:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:10:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:10:18 AM	Tube furnace set to 0
1/14/2011	2:11:18 AM	Helium valve closed
1/14/2011	2:11:18 AM	H2 valve closed
1/14/2011	2:11:18 AM	BCl3 valve closed
1/14/2011	2:11:18 AM	PH3 valve closed
1/14/2011	2:11:18 AM	SiCl4 pre valve closed
1/14/2011	2:11:18 AM	SiCl4 post valve closed
1/14/2011	2:11:18 AM	Bubbler valve closed
1/14/2011	2:11:18 AM	Main Vac valve opened
1/14/2011	2:11:18 AM	Bypass valve opened
1/14/2011	2:11:18 AM	Helium MFC set to  0.000000
1/14/2011	2:11:18 AM	H2 MFC set to  0.000000
1/14/2011	2:11:18 AM	BCl3 MFC set to  0.000000
1/14/2011	2:11:18 AM	PHl3 MFC set to  0.000000
1/14/2011	2:11:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:11:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:11:18 AM	Tube furnace set to 0
1/14/2011	2:12:18 AM	H2 valve closed
1/14/2011	2:12:18 AM	BCl3 valve closed
1/14/2011	2:12:18 AM	PH3 valve closed
1/14/2011	2:12:18 AM	SiCl4 pre valve closed
1/14/2011	2:12:18 AM	SiCl4 post valve closed
1/14/2011	2:12:18 AM	Bubbler valve closed
1/14/2011	2:12:18 AM	Helium valve opened
1/14/2011	2:12:18 AM	Main Vac valve opened
1/14/2011	2:12:18 AM	Bypass valve opened
1/14/2011	2:12:18 AM	Helium MFC set to  100.000000
1/14/2011	2:12:18 AM	H2 MFC set to  0.000000
1/14/2011	2:12:18 AM	BCl3 MFC set to  0.000000
1/14/2011	2:12:18 AM	PHl3 MFC set to  0.000000
1/14/2011	2:12:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:12:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:12:18 AM	Tube furnace set to 0
1/14/2011	2:13:18 AM	Helium valve closed
1/14/2011	2:13:18 AM	H2 valve closed
1/14/2011	2:13:18 AM	BCl3 valve closed
1/14/2011	2:13:18 AM	PH3 valve closed
1/14/2011	2:13:18 AM	SiCl4 pre valve closed
1/14/2011	2:13:18 AM	SiCl4 post valve closed
1/14/2011	2:13:18 AM	Bubbler valve closed
1/14/2011	2:13:18 AM	Main Vac valve opened
1/14/2011	2:13:18 AM	Bypass valve opened
1/14/2011	2:13:18 AM	Helium MFC set to  0.000000
1/14/2011	2:13:18 AM	H2 MFC set to  0.000000
1/14/2011	2:13:18 AM	BCl3 MFC set to  0.000000
1/14/2011	2:13:18 AM	PHl3 MFC set to  0.000000
1/14/2011	2:13:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:13:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:13:19 AM	Tube furnace set to 0
1/14/2011	2:14:18 AM	H2 valve closed
1/14/2011	2:14:18 AM	BCl3 valve closed
1/14/2011	2:14:18 AM	PH3 valve closed
1/14/2011	2:14:18 AM	SiCl4 pre valve closed
1/14/2011	2:14:18 AM	SiCl4 post valve closed
1/14/2011	2:14:18 AM	Bubbler valve closed
1/14/2011	2:14:18 AM	Helium valve opened
1/14/2011	2:14:18 AM	Main Vac valve opened
1/14/2011	2:14:18 AM	Bypass valve opened
1/14/2011	2:14:18 AM	Helium MFC set to  100.000000
1/14/2011	2:14:18 AM	H2 MFC set to  0.000000
1/14/2011	2:14:18 AM	BCl3 MFC set to  0.000000
1/14/2011	2:14:18 AM	PHl3 MFC set to  0.000000
1/14/2011	2:14:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:14:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:14:19 AM	Tube furnace set to 0
1/14/2011	2:15:19 AM	Helium valve closed
1/14/2011	2:15:19 AM	H2 valve closed
1/14/2011	2:15:19 AM	BCl3 valve closed
1/14/2011	2:15:19 AM	PH3 valve closed
1/14/2011	2:15:19 AM	SiCl4 pre valve closed
1/14/2011	2:15:19 AM	SiCl4 post valve closed
1/14/2011	2:15:19 AM	Bubbler valve closed
1/14/2011	2:15:19 AM	Main Vac valve opened
1/14/2011	2:15:19 AM	Bypass valve opened
1/14/2011	2:15:19 AM	Helium MFC set to  0.000000
1/14/2011	2:15:19 AM	H2 MFC set to  0.000000
1/14/2011	2:15:19 AM	BCl3 MFC set to  0.000000
1/14/2011	2:15:19 AM	PHl3 MFC set to  0.000000
1/14/2011	2:15:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:15:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:15:19 AM	Tube furnace set to 0
1/14/2011	2:16:19 AM	H2 valve closed
1/14/2011	2:16:19 AM	BCl3 valve closed
1/14/2011	2:16:19 AM	PH3 valve closed
1/14/2011	2:16:19 AM	SiCl4 pre valve closed
1/14/2011	2:16:19 AM	SiCl4 post valve closed
1/14/2011	2:16:19 AM	Bubbler valve closed
1/14/2011	2:16:19 AM	Helium valve opened
1/14/2011	2:16:19 AM	Main Vac valve opened
1/14/2011	2:16:19 AM	Bypass valve opened
1/14/2011	2:16:19 AM	Helium MFC set to  100.000000
1/14/2011	2:16:19 AM	H2 MFC set to  0.000000
1/14/2011	2:16:19 AM	BCl3 MFC set to  0.000000
1/14/2011	2:16:19 AM	PHl3 MFC set to  0.000000
1/14/2011	2:16:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:16:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:16:19 AM	Tube furnace set to 0
1/14/2011	2:17:19 AM	Helium valve closed
1/14/2011	2:17:19 AM	H2 valve closed
1/14/2011	2:17:19 AM	BCl3 valve closed
1/14/2011	2:17:19 AM	PH3 valve closed
1/14/2011	2:17:19 AM	SiCl4 pre valve closed
1/14/2011	2:17:19 AM	SiCl4 post valve closed
1/14/2011	2:17:19 AM	Bubbler valve closed
1/14/2011	2:17:19 AM	Main Vac valve opened
1/14/2011	2:17:19 AM	Bypass valve opened
1/14/2011	2:17:19 AM	Helium MFC set to  0.000000
1/14/2011	2:17:19 AM	H2 MFC set to  0.000000
1/14/2011	2:17:19 AM	BCl3 MFC set to  0.000000
1/14/2011	2:17:19 AM	PHl3 MFC set to  0.000000
1/14/2011	2:17:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:17:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:17:19 AM	Tube furnace set to 0
1/14/2011	2:17:20 AM	Run finished at 2:17 AM
1/14/2011	2:17:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	2:18:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/14/2011	2:18:54 AM	Recipe started at 2:18 AM
1/14/2011	2:18:54 AM	Helium valve closed
1/14/2011	2:18:54 AM	H2 valve closed
1/14/2011	2:18:54 AM	BCl3 valve closed
1/14/2011	2:18:54 AM	PH3 valve closed
1/14/2011	2:18:54 AM	SiCl4 pre valve closed
1/14/2011	2:18:54 AM	SiCl4 post valve closed
1/14/2011	2:18:54 AM	Main Vac valve closed
1/14/2011	2:18:54 AM	Bypass valve closed
1/14/2011	2:18:54 AM	Bubbler valve closed
1/14/2011	2:18:54 AM	Helium MFC set to  0.000000
1/14/2011	2:18:54 AM	H2 MFC set to  0.000000
1/14/2011	2:18:54 AM	BCl3 MFC set to  0.000000
1/14/2011	2:18:54 AM	PHl3 MFC set to  0.000000
1/14/2011	2:18:54 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:18:54 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:18:54 AM	Tube furnace set to 0
1/14/2011	2:18:54 AM	Run finished at 2:18 AM
1/14/2011	2:18:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/14/2011	2:19:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	2:19:05 AM	Recipe started at 2:19 AM
1/14/2011	2:19:05 AM	Helium valve closed
1/14/2011	2:19:05 AM	H2 valve closed
1/14/2011	2:19:05 AM	BCl3 valve closed
1/14/2011	2:19:05 AM	PH3 valve closed
1/14/2011	2:19:05 AM	SiCl4 pre valve closed
1/14/2011	2:19:05 AM	SiCl4 post valve closed
1/14/2011	2:19:05 AM	Main Vac valve closed
1/14/2011	2:19:05 AM	Bubbler valve closed
1/14/2011	2:19:05 AM	Bypass valve opened
1/14/2011	2:19:05 AM	Helium MFC set to  0.000000
1/14/2011	2:19:05 AM	H2 MFC set to  0.000000
1/14/2011	2:19:05 AM	BCl3 MFC set to  0.000000
1/14/2011	2:19:05 AM	PHl3 MFC set to  0.000000
1/14/2011	2:19:05 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:19:05 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:19:06 AM	Tube furnace set to 0
1/14/2011	2:19:06 AM	Helium valve closed
1/14/2011	2:19:06 AM	H2 valve closed
1/14/2011	2:19:06 AM	BCl3 valve closed
1/14/2011	2:19:06 AM	PH3 valve closed
1/14/2011	2:19:06 AM	SiCl4 pre valve closed
1/14/2011	2:19:06 AM	SiCl4 post valve closed
1/14/2011	2:19:06 AM	Bubbler valve closed
1/14/2011	2:19:06 AM	Main Vac valve opened
1/14/2011	2:19:06 AM	Bypass valve opened
1/14/2011	2:19:06 AM	Helium MFC set to  0.000000
1/14/2011	2:19:06 AM	H2 MFC set to  0.000000
1/14/2011	2:19:06 AM	BCl3 MFC set to  0.000000
1/14/2011	2:19:06 AM	PHl3 MFC set to  0.000000
1/14/2011	2:19:06 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:19:06 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:19:06 AM	Tube furnace set to 0
1/14/2011	2:19:06 AM	Run finished at 2:19 AM
1/14/2011	2:19:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	2:20:30 AM	Recipe started at 2:20 AM
1/14/2011	2:20:30 AM	Helium valve closed
1/14/2011	2:20:30 AM	BCl3 valve closed
1/14/2011	2:20:30 AM	PH3 valve closed
1/14/2011	2:20:30 AM	SiCl4 pre valve closed
1/14/2011	2:20:30 AM	SiCl4 post valve closed
1/14/2011	2:20:30 AM	Main Vac valve closed
1/14/2011	2:20:30 AM	Bypass valve closed
1/14/2011	2:20:30 AM	Bubbler valve closed
1/14/2011	2:20:30 AM	H2 valve opened
1/14/2011	2:20:30 AM	Helium MFC set to  0.000000
1/14/2011	2:20:30 AM	H2 MFC set to  500.000000
1/14/2011	2:20:30 AM	BCl3 MFC set to  0.000000
1/14/2011	2:20:30 AM	PHl3 MFC set to  0.000000
1/14/2011	2:20:30 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:20:30 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:20:31 AM	Tube furnace set to 0
1/14/2011	2:21:50 AM	Helium valve closed
1/14/2011	2:21:50 AM	BCl3 valve closed
1/14/2011	2:21:50 AM	PH3 valve closed
1/14/2011	2:21:50 AM	SiCl4 pre valve closed
1/14/2011	2:21:50 AM	SiCl4 post valve closed
1/14/2011	2:21:50 AM	Main Vac valve closed
1/14/2011	2:21:50 AM	Bypass valve closed
1/14/2011	2:21:50 AM	H2 valve opened
1/14/2011	2:21:50 AM	Bubbler valve opened
1/14/2011	2:21:50 AM	Helium MFC set to  0.000000
1/14/2011	2:21:50 AM	H2 MFC set to  500.000000
1/14/2011	2:21:50 AM	BCl3 MFC set to  0.000000
1/14/2011	2:21:50 AM	PHl3 MFC set to  0.000000
1/14/2011	2:21:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	2:21:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:21:50 AM	Tube furnace set to 1000
1/14/2011	2:41:50 AM	Helium valve closed
1/14/2011	2:41:50 AM	PH3 valve closed
1/14/2011	2:41:50 AM	Main Vac valve closed
1/14/2011	2:41:50 AM	Bypass valve closed
1/14/2011	2:41:50 AM	H2 valve opened
1/14/2011	2:41:50 AM	BCl3 valve opened
1/14/2011	2:41:50 AM	SiCl4 pre valve opened
1/14/2011	2:41:50 AM	SiCl4 post valve opened
1/14/2011	2:41:50 AM	Bubbler valve opened
1/14/2011	2:41:50 AM	Helium MFC set to  0.000000
1/14/2011	2:41:50 AM	H2 MFC set to  500.000000
1/14/2011	2:41:50 AM	BCl3 MFC set to  1.800000
1/14/2011	2:41:50 AM	PHl3 MFC set to  0.000000
1/14/2011	2:41:50 AM	SiCl4 MFC set to  50.000000
1/14/2011	2:41:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:41:50 AM	Tube furnace set to 1000
1/14/2011	3:11:50 AM	H2 valve closed
1/14/2011	3:11:50 AM	BCl3 valve closed
1/14/2011	3:11:50 AM	PH3 valve closed
1/14/2011	3:11:50 AM	SiCl4 pre valve closed
1/14/2011	3:11:50 AM	SiCl4 post valve closed
1/14/2011	3:11:50 AM	Main Vac valve closed
1/14/2011	3:11:50 AM	Bypass valve closed
1/14/2011	3:11:50 AM	Helium valve opened
1/14/2011	3:11:50 AM	Bubbler valve opened
1/14/2011	3:11:50 AM	Helium MFC set to  500.000000
1/14/2011	3:11:50 AM	H2 MFC set to  0.000000
1/14/2011	3:11:50 AM	BCl3 MFC set to  0.000000
1/14/2011	3:11:50 AM	PHl3 MFC set to  0.000000
1/14/2011	3:11:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:11:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:11:50 AM	Tube furnace set to 0
1/14/2011	3:31:50 AM	Helium valve closed
1/14/2011	3:31:50 AM	H2 valve closed
1/14/2011	3:31:50 AM	BCl3 valve closed
1/14/2011	3:31:50 AM	PH3 valve closed
1/14/2011	3:31:50 AM	SiCl4 pre valve closed
1/14/2011	3:31:50 AM	SiCl4 post valve closed
1/14/2011	3:31:50 AM	Main Vac valve closed
1/14/2011	3:31:50 AM	Bypass valve closed
1/14/2011	3:31:50 AM	Bubbler valve closed
1/14/2011	3:31:50 AM	Helium MFC set to  0.000000
1/14/2011	3:31:50 AM	H2 MFC set to  0.000000
1/14/2011	3:31:50 AM	BCl3 MFC set to  0.000000
1/14/2011	3:31:50 AM	PHl3 MFC set to  0.000000
1/14/2011	3:31:50 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:31:50 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:31:51 AM	Tube furnace set to 0
1/14/2011	3:31:51 AM	Run finished at 3:31 AM
1/14/2011	3:43:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	3:43:29 AM	Recipe started at 3:43 AM
1/14/2011	3:43:29 AM	H2 valve closed
1/14/2011	3:43:29 AM	BCl3 valve closed
1/14/2011	3:43:29 AM	PH3 valve closed
1/14/2011	3:43:29 AM	SiCl4 pre valve closed
1/14/2011	3:43:29 AM	SiCl4 post valve closed
1/14/2011	3:43:29 AM	Main Vac valve closed
1/14/2011	3:43:29 AM	Bypass valve closed
1/14/2011	3:43:29 AM	Bubbler valve closed
1/14/2011	3:43:29 AM	Helium valve opened
1/14/2011	3:43:29 AM	Helium MFC set to  500.000000
1/14/2011	3:43:29 AM	H2 MFC set to  0.000000
1/14/2011	3:43:29 AM	BCl3 MFC set to  0.000000
1/14/2011	3:43:29 AM	PHl3 MFC set to  0.000000
1/14/2011	3:43:29 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:43:29 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:43:29 AM	Tube furnace set to 0
1/14/2011	3:43:34 AM	Helium valve closed
1/14/2011	3:43:34 AM	H2 valve closed
1/14/2011	3:43:34 AM	BCl3 valve closed
1/14/2011	3:43:34 AM	PH3 valve closed
1/14/2011	3:43:34 AM	SiCl4 pre valve closed
1/14/2011	3:43:34 AM	SiCl4 post valve closed
1/14/2011	3:43:34 AM	Main Vac valve closed
1/14/2011	3:43:34 AM	Bypass valve closed
1/14/2011	3:43:34 AM	Bubbler valve closed
1/14/2011	3:43:34 AM	Helium MFC set to  0.000000
1/14/2011	3:43:34 AM	H2 MFC set to  0.000000
1/14/2011	3:43:34 AM	BCl3 MFC set to  0.000000
1/14/2011	3:43:34 AM	PHl3 MFC set to  0.000000
1/14/2011	3:43:34 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:43:34 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:43:34 AM	Tube furnace set to 0
1/14/2011	3:43:35 AM	Run finished at 3:43 AM
1/14/2011	3:43:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	3:49:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	3:49:13 AM	Recipe started at 3:49 AM
1/14/2011	3:49:13 AM	Helium valve closed
1/14/2011	3:49:13 AM	H2 valve closed
1/14/2011	3:49:13 AM	BCl3 valve closed
1/14/2011	3:49:13 AM	PH3 valve closed
1/14/2011	3:49:13 AM	SiCl4 pre valve closed
1/14/2011	3:49:13 AM	SiCl4 post valve closed
1/14/2011	3:49:13 AM	Main Vac valve closed
1/14/2011	3:49:13 AM	Bubbler valve closed
1/14/2011	3:49:13 AM	Bypass valve opened
1/14/2011	3:49:13 AM	Helium MFC set to  0.000000
1/14/2011	3:49:13 AM	H2 MFC set to  0.000000
1/14/2011	3:49:13 AM	BCl3 MFC set to  0.000000
1/14/2011	3:49:13 AM	PHl3 MFC set to  0.000000
1/14/2011	3:49:13 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:49:13 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:49:13 AM	Tube furnace set to 0
1/14/2011	3:49:46 AM	Helium valve closed
1/14/2011	3:49:46 AM	H2 valve closed
1/14/2011	3:49:46 AM	BCl3 valve closed
1/14/2011	3:49:46 AM	PH3 valve closed
1/14/2011	3:49:46 AM	SiCl4 pre valve closed
1/14/2011	3:49:46 AM	SiCl4 post valve closed
1/14/2011	3:49:46 AM	Bubbler valve closed
1/14/2011	3:49:46 AM	Main Vac valve opened
1/14/2011	3:49:46 AM	Bypass valve opened
1/14/2011	3:49:46 AM	Helium MFC set to  0.000000
1/14/2011	3:49:46 AM	H2 MFC set to  0.000000
1/14/2011	3:49:46 AM	BCl3 MFC set to  0.000000
1/14/2011	3:49:46 AM	PHl3 MFC set to  0.000000
1/14/2011	3:49:46 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:49:46 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:49:46 AM	Tube furnace set to 0
1/14/2011	3:49:46 AM	Run finished at 3:49 AM
1/14/2011	3:49:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	3:50:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	3:50:35 AM	Recipe started at 3:50 AM
1/14/2011	3:50:35 AM	Helium valve closed
1/14/2011	3:50:35 AM	H2 valve closed
1/14/2011	3:50:35 AM	BCl3 valve closed
1/14/2011	3:50:35 AM	PH3 valve closed
1/14/2011	3:50:35 AM	SiCl4 pre valve closed
1/14/2011	3:50:35 AM	SiCl4 post valve closed
1/14/2011	3:50:35 AM	Main Vac valve closed
1/14/2011	3:50:35 AM	Bubbler valve closed
1/14/2011	3:50:35 AM	Bypass valve opened
1/14/2011	3:50:35 AM	Helium MFC set to  0.000000
1/14/2011	3:50:35 AM	H2 MFC set to  0.000000
1/14/2011	3:50:35 AM	BCl3 MFC set to  0.000000
1/14/2011	3:50:35 AM	PHl3 MFC set to  0.000000
1/14/2011	3:50:35 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:50:35 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:50:35 AM	Tube furnace set to 0
1/14/2011	3:50:35 AM	Helium valve closed
1/14/2011	3:50:35 AM	H2 valve closed
1/14/2011	3:50:35 AM	BCl3 valve closed
1/14/2011	3:50:35 AM	PH3 valve closed
1/14/2011	3:50:35 AM	SiCl4 pre valve closed
1/14/2011	3:50:35 AM	SiCl4 post valve closed
1/14/2011	3:50:35 AM	Bubbler valve closed
1/14/2011	3:50:35 AM	Main Vac valve opened
1/14/2011	3:50:35 AM	Bypass valve opened
1/14/2011	3:50:35 AM	Helium MFC set to  0.000000
1/14/2011	3:50:35 AM	H2 MFC set to  0.000000
1/14/2011	3:50:35 AM	BCl3 MFC set to  0.000000
1/14/2011	3:50:35 AM	PHl3 MFC set to  0.000000
1/14/2011	3:50:35 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:50:35 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:50:35 AM	Tube furnace set to 0
1/14/2011	3:51:35 AM	H2 valve closed
1/14/2011	3:51:35 AM	BCl3 valve closed
1/14/2011	3:51:35 AM	PH3 valve closed
1/14/2011	3:51:35 AM	SiCl4 pre valve closed
1/14/2011	3:51:35 AM	SiCl4 post valve closed
1/14/2011	3:51:35 AM	Bubbler valve closed
1/14/2011	3:51:35 AM	Helium valve opened
1/14/2011	3:51:35 AM	Main Vac valve opened
1/14/2011	3:51:35 AM	Bypass valve opened
1/14/2011	3:51:35 AM	Helium MFC set to  100.000000
1/14/2011	3:51:35 AM	H2 MFC set to  0.000000
1/14/2011	3:51:35 AM	BCl3 MFC set to  0.000000
1/14/2011	3:51:35 AM	PHl3 MFC set to  0.000000
1/14/2011	3:51:35 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:51:35 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:51:36 AM	Tube furnace set to 0
1/14/2011	3:52:36 AM	Helium valve closed
1/14/2011	3:52:36 AM	H2 valve closed
1/14/2011	3:52:36 AM	BCl3 valve closed
1/14/2011	3:52:36 AM	PH3 valve closed
1/14/2011	3:52:36 AM	SiCl4 pre valve closed
1/14/2011	3:52:36 AM	SiCl4 post valve closed
1/14/2011	3:52:36 AM	Bubbler valve closed
1/14/2011	3:52:36 AM	Main Vac valve opened
1/14/2011	3:52:36 AM	Bypass valve opened
1/14/2011	3:52:36 AM	Helium MFC set to  0.000000
1/14/2011	3:52:36 AM	H2 MFC set to  0.000000
1/14/2011	3:52:36 AM	BCl3 MFC set to  0.000000
1/14/2011	3:52:36 AM	PHl3 MFC set to  0.000000
1/14/2011	3:52:36 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:52:36 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:52:36 AM	Tube furnace set to 0
1/14/2011	3:53:36 AM	H2 valve closed
1/14/2011	3:53:36 AM	BCl3 valve closed
1/14/2011	3:53:36 AM	PH3 valve closed
1/14/2011	3:53:36 AM	SiCl4 pre valve closed
1/14/2011	3:53:36 AM	SiCl4 post valve closed
1/14/2011	3:53:36 AM	Bubbler valve closed
1/14/2011	3:53:36 AM	Helium valve opened
1/14/2011	3:53:36 AM	Main Vac valve opened
1/14/2011	3:53:36 AM	Bypass valve opened
1/14/2011	3:53:36 AM	Helium MFC set to  100.000000
1/14/2011	3:53:36 AM	H2 MFC set to  0.000000
1/14/2011	3:53:36 AM	BCl3 MFC set to  0.000000
1/14/2011	3:53:36 AM	PHl3 MFC set to  0.000000
1/14/2011	3:53:36 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:53:36 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:53:36 AM	Tube furnace set to 0
1/14/2011	3:54:36 AM	Helium valve closed
1/14/2011	3:54:36 AM	H2 valve closed
1/14/2011	3:54:36 AM	BCl3 valve closed
1/14/2011	3:54:36 AM	PH3 valve closed
1/14/2011	3:54:36 AM	SiCl4 pre valve closed
1/14/2011	3:54:36 AM	SiCl4 post valve closed
1/14/2011	3:54:36 AM	Bubbler valve closed
1/14/2011	3:54:36 AM	Main Vac valve opened
1/14/2011	3:54:36 AM	Bypass valve opened
1/14/2011	3:54:36 AM	Helium MFC set to  0.000000
1/14/2011	3:54:36 AM	H2 MFC set to  0.000000
1/14/2011	3:54:36 AM	BCl3 MFC set to  0.000000
1/14/2011	3:54:36 AM	PHl3 MFC set to  0.000000
1/14/2011	3:54:36 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:54:36 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:54:36 AM	Tube furnace set to 0
1/14/2011	3:55:36 AM	H2 valve closed
1/14/2011	3:55:36 AM	BCl3 valve closed
1/14/2011	3:55:36 AM	PH3 valve closed
1/14/2011	3:55:36 AM	SiCl4 pre valve closed
1/14/2011	3:55:36 AM	SiCl4 post valve closed
1/14/2011	3:55:36 AM	Bubbler valve closed
1/14/2011	3:55:36 AM	Helium valve opened
1/14/2011	3:55:36 AM	Main Vac valve opened
1/14/2011	3:55:36 AM	Bypass valve opened
1/14/2011	3:55:36 AM	Helium MFC set to  100.000000
1/14/2011	3:55:36 AM	H2 MFC set to  0.000000
1/14/2011	3:55:36 AM	BCl3 MFC set to  0.000000
1/14/2011	3:55:36 AM	PHl3 MFC set to  0.000000
1/14/2011	3:55:36 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:55:36 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:55:36 AM	Tube furnace set to 0
1/14/2011	3:56:36 AM	Helium valve closed
1/14/2011	3:56:36 AM	H2 valve closed
1/14/2011	3:56:36 AM	BCl3 valve closed
1/14/2011	3:56:36 AM	PH3 valve closed
1/14/2011	3:56:36 AM	SiCl4 pre valve closed
1/14/2011	3:56:36 AM	SiCl4 post valve closed
1/14/2011	3:56:36 AM	Bubbler valve closed
1/14/2011	3:56:36 AM	Main Vac valve opened
1/14/2011	3:56:36 AM	Bypass valve opened
1/14/2011	3:56:36 AM	Helium MFC set to  0.000000
1/14/2011	3:56:36 AM	H2 MFC set to  0.000000
1/14/2011	3:56:36 AM	BCl3 MFC set to  0.000000
1/14/2011	3:56:36 AM	PHl3 MFC set to  0.000000
1/14/2011	3:56:36 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:56:36 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:56:37 AM	Tube furnace set to 0
1/14/2011	3:57:37 AM	H2 valve closed
1/14/2011	3:57:37 AM	BCl3 valve closed
1/14/2011	3:57:37 AM	PH3 valve closed
1/14/2011	3:57:37 AM	SiCl4 pre valve closed
1/14/2011	3:57:37 AM	SiCl4 post valve closed
1/14/2011	3:57:37 AM	Bubbler valve closed
1/14/2011	3:57:37 AM	Helium valve opened
1/14/2011	3:57:37 AM	Main Vac valve opened
1/14/2011	3:57:37 AM	Bypass valve opened
1/14/2011	3:57:37 AM	Helium MFC set to  100.000000
1/14/2011	3:57:37 AM	H2 MFC set to  0.000000
1/14/2011	3:57:37 AM	BCl3 MFC set to  0.000000
1/14/2011	3:57:37 AM	PHl3 MFC set to  0.000000
1/14/2011	3:57:37 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:57:37 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:57:37 AM	Tube furnace set to 0
1/14/2011	3:58:37 AM	Helium valve closed
1/14/2011	3:58:37 AM	H2 valve closed
1/14/2011	3:58:37 AM	BCl3 valve closed
1/14/2011	3:58:37 AM	PH3 valve closed
1/14/2011	3:58:37 AM	SiCl4 pre valve closed
1/14/2011	3:58:37 AM	SiCl4 post valve closed
1/14/2011	3:58:37 AM	Bubbler valve closed
1/14/2011	3:58:37 AM	Main Vac valve opened
1/14/2011	3:58:37 AM	Bypass valve opened
1/14/2011	3:58:37 AM	Helium MFC set to  0.000000
1/14/2011	3:58:37 AM	H2 MFC set to  0.000000
1/14/2011	3:58:37 AM	BCl3 MFC set to  0.000000
1/14/2011	3:58:37 AM	PHl3 MFC set to  0.000000
1/14/2011	3:58:37 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:58:37 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:58:37 AM	Tube furnace set to 0
1/14/2011	3:59:37 AM	H2 valve closed
1/14/2011	3:59:37 AM	BCl3 valve closed
1/14/2011	3:59:37 AM	PH3 valve closed
1/14/2011	3:59:37 AM	SiCl4 pre valve closed
1/14/2011	3:59:37 AM	SiCl4 post valve closed
1/14/2011	3:59:37 AM	Bubbler valve closed
1/14/2011	3:59:37 AM	Helium valve opened
1/14/2011	3:59:37 AM	Main Vac valve opened
1/14/2011	3:59:37 AM	Bypass valve opened
1/14/2011	3:59:37 AM	Helium MFC set to  100.000000
1/14/2011	3:59:37 AM	H2 MFC set to  0.000000
1/14/2011	3:59:37 AM	BCl3 MFC set to  0.000000
1/14/2011	3:59:37 AM	PHl3 MFC set to  0.000000
1/14/2011	3:59:37 AM	SiCl4 MFC set to  0.000000
1/14/2011	3:59:37 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:59:37 AM	Tube furnace set to 0
1/14/2011	4:00:37 AM	Helium valve closed
1/14/2011	4:00:37 AM	H2 valve closed
1/14/2011	4:00:37 AM	BCl3 valve closed
1/14/2011	4:00:37 AM	PH3 valve closed
1/14/2011	4:00:37 AM	SiCl4 pre valve closed
1/14/2011	4:00:37 AM	SiCl4 post valve closed
1/14/2011	4:00:37 AM	Bubbler valve closed
1/14/2011	4:00:37 AM	Main Vac valve opened
1/14/2011	4:00:37 AM	Bypass valve opened
1/14/2011	4:00:37 AM	Helium MFC set to  0.000000
1/14/2011	4:00:37 AM	H2 MFC set to  0.000000
1/14/2011	4:00:37 AM	BCl3 MFC set to  0.000000
1/14/2011	4:00:37 AM	PHl3 MFC set to  0.000000
1/14/2011	4:00:37 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:00:37 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:00:37 AM	Tube furnace set to 0
1/14/2011	4:01:37 AM	H2 valve closed
1/14/2011	4:01:37 AM	BCl3 valve closed
1/14/2011	4:01:37 AM	PH3 valve closed
1/14/2011	4:01:37 AM	SiCl4 pre valve closed
1/14/2011	4:01:37 AM	SiCl4 post valve closed
1/14/2011	4:01:37 AM	Bubbler valve closed
1/14/2011	4:01:37 AM	Helium valve opened
1/14/2011	4:01:37 AM	Main Vac valve opened
1/14/2011	4:01:37 AM	Bypass valve opened
1/14/2011	4:01:37 AM	Helium MFC set to  100.000000
1/14/2011	4:01:37 AM	H2 MFC set to  0.000000
1/14/2011	4:01:37 AM	BCl3 MFC set to  0.000000
1/14/2011	4:01:37 AM	PHl3 MFC set to  0.000000
1/14/2011	4:01:37 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:01:37 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:01:38 AM	Tube furnace set to 0
1/14/2011	4:02:38 AM	Helium valve closed
1/14/2011	4:02:38 AM	H2 valve closed
1/14/2011	4:02:38 AM	BCl3 valve closed
1/14/2011	4:02:38 AM	PH3 valve closed
1/14/2011	4:02:38 AM	SiCl4 pre valve closed
1/14/2011	4:02:38 AM	SiCl4 post valve closed
1/14/2011	4:02:38 AM	Bubbler valve closed
1/14/2011	4:02:38 AM	Main Vac valve opened
1/14/2011	4:02:38 AM	Bypass valve opened
1/14/2011	4:02:38 AM	Helium MFC set to  0.000000
1/14/2011	4:02:38 AM	H2 MFC set to  0.000000
1/14/2011	4:02:38 AM	BCl3 MFC set to  0.000000
1/14/2011	4:02:38 AM	PHl3 MFC set to  0.000000
1/14/2011	4:02:38 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:02:38 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:02:38 AM	Tube furnace set to 0
1/14/2011	4:03:38 AM	H2 valve closed
1/14/2011	4:03:38 AM	BCl3 valve closed
1/14/2011	4:03:38 AM	PH3 valve closed
1/14/2011	4:03:38 AM	SiCl4 pre valve closed
1/14/2011	4:03:38 AM	SiCl4 post valve closed
1/14/2011	4:03:38 AM	Bubbler valve closed
1/14/2011	4:03:38 AM	Helium valve opened
1/14/2011	4:03:38 AM	Main Vac valve opened
1/14/2011	4:03:38 AM	Bypass valve opened
1/14/2011	4:03:38 AM	Helium MFC set to  100.000000
1/14/2011	4:03:38 AM	H2 MFC set to  0.000000
1/14/2011	4:03:38 AM	BCl3 MFC set to  0.000000
1/14/2011	4:03:38 AM	PHl3 MFC set to  0.000000
1/14/2011	4:03:38 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:03:38 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:03:38 AM	Tube furnace set to 0
1/14/2011	4:04:38 AM	Helium valve closed
1/14/2011	4:04:38 AM	H2 valve closed
1/14/2011	4:04:38 AM	BCl3 valve closed
1/14/2011	4:04:38 AM	PH3 valve closed
1/14/2011	4:04:38 AM	SiCl4 pre valve closed
1/14/2011	4:04:38 AM	SiCl4 post valve closed
1/14/2011	4:04:38 AM	Bubbler valve closed
1/14/2011	4:04:38 AM	Main Vac valve opened
1/14/2011	4:04:38 AM	Bypass valve opened
1/14/2011	4:04:38 AM	Helium MFC set to  0.000000
1/14/2011	4:04:38 AM	H2 MFC set to  0.000000
1/14/2011	4:04:38 AM	BCl3 MFC set to  0.000000
1/14/2011	4:04:38 AM	PHl3 MFC set to  0.000000
1/14/2011	4:04:38 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:04:38 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:04:38 AM	Tube furnace set to 0
1/14/2011	4:05:38 AM	H2 valve closed
1/14/2011	4:05:38 AM	BCl3 valve closed
1/14/2011	4:05:38 AM	PH3 valve closed
1/14/2011	4:05:38 AM	SiCl4 pre valve closed
1/14/2011	4:05:38 AM	SiCl4 post valve closed
1/14/2011	4:05:38 AM	Bubbler valve closed
1/14/2011	4:05:38 AM	Helium valve opened
1/14/2011	4:05:38 AM	Main Vac valve opened
1/14/2011	4:05:38 AM	Bypass valve opened
1/14/2011	4:05:38 AM	Helium MFC set to  100.000000
1/14/2011	4:05:38 AM	H2 MFC set to  0.000000
1/14/2011	4:05:38 AM	BCl3 MFC set to  0.000000
1/14/2011	4:05:38 AM	PHl3 MFC set to  0.000000
1/14/2011	4:05:38 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:05:38 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:05:38 AM	Tube furnace set to 0
1/14/2011	4:06:38 AM	Helium valve closed
1/14/2011	4:06:38 AM	H2 valve closed
1/14/2011	4:06:38 AM	BCl3 valve closed
1/14/2011	4:06:38 AM	PH3 valve closed
1/14/2011	4:06:38 AM	SiCl4 pre valve closed
1/14/2011	4:06:38 AM	SiCl4 post valve closed
1/14/2011	4:06:38 AM	Bubbler valve closed
1/14/2011	4:06:38 AM	Main Vac valve opened
1/14/2011	4:06:38 AM	Bypass valve opened
1/14/2011	4:06:38 AM	Helium MFC set to  0.000000
1/14/2011	4:06:38 AM	H2 MFC set to  0.000000
1/14/2011	4:06:38 AM	BCl3 MFC set to  0.000000
1/14/2011	4:06:38 AM	PHl3 MFC set to  0.000000
1/14/2011	4:06:38 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:06:38 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:06:39 AM	Tube furnace set to 0
1/14/2011	4:07:39 AM	H2 valve closed
1/14/2011	4:07:39 AM	BCl3 valve closed
1/14/2011	4:07:39 AM	PH3 valve closed
1/14/2011	4:07:39 AM	SiCl4 pre valve closed
1/14/2011	4:07:39 AM	SiCl4 post valve closed
1/14/2011	4:07:39 AM	Bubbler valve closed
1/14/2011	4:07:39 AM	Helium valve opened
1/14/2011	4:07:39 AM	Main Vac valve opened
1/14/2011	4:07:39 AM	Bypass valve opened
1/14/2011	4:07:39 AM	Helium MFC set to  100.000000
1/14/2011	4:07:39 AM	H2 MFC set to  0.000000
1/14/2011	4:07:39 AM	BCl3 MFC set to  0.000000
1/14/2011	4:07:39 AM	PHl3 MFC set to  0.000000
1/14/2011	4:07:39 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:07:39 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:07:39 AM	Tube furnace set to 0
1/14/2011	4:08:39 AM	Helium valve closed
1/14/2011	4:08:39 AM	H2 valve closed
1/14/2011	4:08:39 AM	BCl3 valve closed
1/14/2011	4:08:39 AM	PH3 valve closed
1/14/2011	4:08:39 AM	SiCl4 pre valve closed
1/14/2011	4:08:39 AM	SiCl4 post valve closed
1/14/2011	4:08:39 AM	Bubbler valve closed
1/14/2011	4:08:39 AM	Main Vac valve opened
1/14/2011	4:08:39 AM	Bypass valve opened
1/14/2011	4:08:39 AM	Helium MFC set to  0.000000
1/14/2011	4:08:39 AM	H2 MFC set to  0.000000
1/14/2011	4:08:39 AM	BCl3 MFC set to  0.000000
1/14/2011	4:08:39 AM	PHl3 MFC set to  0.000000
1/14/2011	4:08:39 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:08:39 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:08:39 AM	Tube furnace set to 0
1/14/2011	4:09:39 AM	H2 valve closed
1/14/2011	4:09:39 AM	BCl3 valve closed
1/14/2011	4:09:39 AM	PH3 valve closed
1/14/2011	4:09:39 AM	SiCl4 pre valve closed
1/14/2011	4:09:39 AM	SiCl4 post valve closed
1/14/2011	4:09:39 AM	Bubbler valve closed
1/14/2011	4:09:39 AM	Helium valve opened
1/14/2011	4:09:39 AM	Main Vac valve opened
1/14/2011	4:09:39 AM	Bypass valve opened
1/14/2011	4:09:39 AM	Helium MFC set to  100.000000
1/14/2011	4:09:39 AM	H2 MFC set to  0.000000
1/14/2011	4:09:39 AM	BCl3 MFC set to  0.000000
1/14/2011	4:09:39 AM	PHl3 MFC set to  0.000000
1/14/2011	4:09:39 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:09:39 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:09:39 AM	Tube furnace set to 0
1/14/2011	4:10:39 AM	Helium valve closed
1/14/2011	4:10:39 AM	H2 valve closed
1/14/2011	4:10:39 AM	BCl3 valve closed
1/14/2011	4:10:39 AM	PH3 valve closed
1/14/2011	4:10:39 AM	SiCl4 pre valve closed
1/14/2011	4:10:39 AM	SiCl4 post valve closed
1/14/2011	4:10:39 AM	Bubbler valve closed
1/14/2011	4:10:39 AM	Main Vac valve opened
1/14/2011	4:10:39 AM	Bypass valve opened
1/14/2011	4:10:39 AM	Helium MFC set to  0.000000
1/14/2011	4:10:39 AM	H2 MFC set to  0.000000
1/14/2011	4:10:39 AM	BCl3 MFC set to  0.000000
1/14/2011	4:10:39 AM	PHl3 MFC set to  0.000000
1/14/2011	4:10:39 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:10:39 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:10:39 AM	Tube furnace set to 0
1/14/2011	4:10:40 AM	Run finished at 4:10 AM
1/14/2011	4:10:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	4:18:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/14/2011	4:18:14 AM	Recipe started at 4:18 AM
1/14/2011	4:18:14 AM	Helium valve closed
1/14/2011	4:18:14 AM	H2 valve closed
1/14/2011	4:18:14 AM	BCl3 valve closed
1/14/2011	4:18:14 AM	PH3 valve closed
1/14/2011	4:18:14 AM	SiCl4 pre valve closed
1/14/2011	4:18:14 AM	SiCl4 post valve closed
1/14/2011	4:18:14 AM	Main Vac valve closed
1/14/2011	4:18:14 AM	Bypass valve closed
1/14/2011	4:18:14 AM	Bubbler valve closed
1/14/2011	4:18:14 AM	Helium MFC set to  0.000000
1/14/2011	4:18:14 AM	H2 MFC set to  0.000000
1/14/2011	4:18:14 AM	BCl3 MFC set to  0.000000
1/14/2011	4:18:14 AM	PHl3 MFC set to  0.000000
1/14/2011	4:18:14 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:18:14 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:18:14 AM	Tube furnace set to 0
1/14/2011	4:18:15 AM	Run finished at 4:18 AM
1/14/2011	4:18:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/14/2011	4:18:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	4:18:27 AM	Recipe started at 4:18 AM
1/14/2011	4:18:27 AM	Helium valve closed
1/14/2011	4:18:27 AM	H2 valve closed
1/14/2011	4:18:27 AM	BCl3 valve closed
1/14/2011	4:18:27 AM	PH3 valve closed
1/14/2011	4:18:27 AM	SiCl4 pre valve closed
1/14/2011	4:18:27 AM	SiCl4 post valve closed
1/14/2011	4:18:27 AM	Main Vac valve closed
1/14/2011	4:18:27 AM	Bubbler valve closed
1/14/2011	4:18:27 AM	Bypass valve opened
1/14/2011	4:18:27 AM	Helium MFC set to  0.000000
1/14/2011	4:18:27 AM	H2 MFC set to  0.000000
1/14/2011	4:18:27 AM	BCl3 MFC set to  0.000000
1/14/2011	4:18:27 AM	PHl3 MFC set to  0.000000
1/14/2011	4:18:27 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:18:27 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:18:27 AM	Tube furnace set to 0
1/14/2011	4:18:27 AM	Helium valve closed
1/14/2011	4:18:27 AM	H2 valve closed
1/14/2011	4:18:27 AM	BCl3 valve closed
1/14/2011	4:18:27 AM	PH3 valve closed
1/14/2011	4:18:27 AM	SiCl4 pre valve closed
1/14/2011	4:18:27 AM	SiCl4 post valve closed
1/14/2011	4:18:27 AM	Bubbler valve closed
1/14/2011	4:18:27 AM	Main Vac valve opened
1/14/2011	4:18:27 AM	Bypass valve opened
1/14/2011	4:18:27 AM	Helium MFC set to  0.000000
1/14/2011	4:18:27 AM	H2 MFC set to  0.000000
1/14/2011	4:18:27 AM	BCl3 MFC set to  0.000000
1/14/2011	4:18:27 AM	PHl3 MFC set to  0.000000
1/14/2011	4:18:27 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:18:27 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:18:27 AM	Tube furnace set to 0
1/14/2011	4:18:28 AM	Run finished at 4:18 AM
1/14/2011	4:18:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	4:20:40 AM	Recipe started at 4:20 AM
1/14/2011	4:20:40 AM	Helium valve closed
1/14/2011	4:20:40 AM	BCl3 valve closed
1/14/2011	4:20:40 AM	PH3 valve closed
1/14/2011	4:20:40 AM	SiCl4 pre valve closed
1/14/2011	4:20:40 AM	SiCl4 post valve closed
1/14/2011	4:20:40 AM	Main Vac valve closed
1/14/2011	4:20:40 AM	Bypass valve closed
1/14/2011	4:20:40 AM	Bubbler valve closed
1/14/2011	4:20:40 AM	H2 valve opened
1/14/2011	4:20:40 AM	Helium MFC set to  0.000000
1/14/2011	4:20:40 AM	H2 MFC set to  500.000000
1/14/2011	4:20:40 AM	BCl3 MFC set to  0.000000
1/14/2011	4:20:40 AM	PHl3 MFC set to  0.000000
1/14/2011	4:20:40 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:20:40 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:20:40 AM	Tube furnace set to 0
1/14/2011	4:21:59 AM	Helium valve closed
1/14/2011	4:21:59 AM	BCl3 valve closed
1/14/2011	4:21:59 AM	PH3 valve closed
1/14/2011	4:21:59 AM	SiCl4 pre valve closed
1/14/2011	4:21:59 AM	SiCl4 post valve closed
1/14/2011	4:21:59 AM	Main Vac valve closed
1/14/2011	4:21:59 AM	Bypass valve closed
1/14/2011	4:21:59 AM	H2 valve opened
1/14/2011	4:21:59 AM	Bubbler valve opened
1/14/2011	4:21:59 AM	Helium MFC set to  0.000000
1/14/2011	4:21:59 AM	H2 MFC set to  500.000000
1/14/2011	4:21:59 AM	BCl3 MFC set to  0.000000
1/14/2011	4:21:59 AM	PHl3 MFC set to  0.000000
1/14/2011	4:21:59 AM	SiCl4 MFC set to  0.000000
1/14/2011	4:21:59 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:21:59 AM	Tube furnace set to 1000
1/14/2011	4:41:59 AM	Helium valve closed
1/14/2011	4:41:59 AM	PH3 valve closed
1/14/2011	4:41:59 AM	Main Vac valve closed
1/14/2011	4:41:59 AM	Bypass valve closed
1/14/2011	4:41:59 AM	H2 valve opened
1/14/2011	4:41:59 AM	BCl3 valve opened
1/14/2011	4:41:59 AM	SiCl4 pre valve opened
1/14/2011	4:41:59 AM	SiCl4 post valve opened
1/14/2011	4:41:59 AM	Bubbler valve opened
1/14/2011	4:41:59 AM	Helium MFC set to  0.000000
1/14/2011	4:41:59 AM	H2 MFC set to  500.000000
1/14/2011	4:41:59 AM	BCl3 MFC set to  1.600000
1/14/2011	4:41:59 AM	PHl3 MFC set to  0.000000
1/14/2011	4:41:59 AM	SiCl4 MFC set to  50.000000
1/14/2011	4:41:59 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:42:00 AM	Tube furnace set to 1000
1/14/2011	5:07:00 AM	Helium valve closed
1/14/2011	5:07:00 AM	PH3 valve closed
1/14/2011	5:07:00 AM	Main Vac valve closed
1/14/2011	5:07:00 AM	Bypass valve closed
1/14/2011	5:07:00 AM	H2 valve opened
1/14/2011	5:07:00 AM	BCl3 valve opened
1/14/2011	5:07:00 AM	SiCl4 pre valve opened
1/14/2011	5:07:00 AM	SiCl4 post valve opened
1/14/2011	5:07:00 AM	Bubbler valve opened
1/14/2011	5:07:00 AM	Helium MFC set to  0.000000
1/14/2011	5:07:00 AM	H2 MFC set to  500.000000
1/14/2011	5:07:00 AM	BCl3 MFC set to  4.000000
1/14/2011	5:07:00 AM	PHl3 MFC set to  0.000000
1/14/2011	5:07:00 AM	SiCl4 MFC set to  50.000000
1/14/2011	5:07:00 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:07:00 AM	Tube furnace set to 1000
1/14/2011	5:08:00 AM	H2 valve closed
1/14/2011	5:08:00 AM	BCl3 valve closed
1/14/2011	5:08:00 AM	PH3 valve closed
1/14/2011	5:08:00 AM	SiCl4 pre valve closed
1/14/2011	5:08:00 AM	SiCl4 post valve closed
1/14/2011	5:08:00 AM	Main Vac valve closed
1/14/2011	5:08:00 AM	Bypass valve closed
1/14/2011	5:08:00 AM	Helium valve opened
1/14/2011	5:08:00 AM	Bubbler valve opened
1/14/2011	5:08:00 AM	Helium MFC set to  500.000000
1/14/2011	5:08:00 AM	H2 MFC set to  0.000000
1/14/2011	5:08:00 AM	BCl3 MFC set to  0.000000
1/14/2011	5:08:00 AM	PHl3 MFC set to  0.000000
1/14/2011	5:08:00 AM	SiCl4 MFC set to  0.000000
1/14/2011	5:08:00 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:08:00 AM	Tube furnace set to 0
1/14/2011	5:28:00 AM	Helium valve closed
1/14/2011	5:28:00 AM	H2 valve closed
1/14/2011	5:28:00 AM	BCl3 valve closed
1/14/2011	5:28:00 AM	PH3 valve closed
1/14/2011	5:28:00 AM	SiCl4 pre valve closed
1/14/2011	5:28:00 AM	SiCl4 post valve closed
1/14/2011	5:28:00 AM	Main Vac valve closed
1/14/2011	5:28:00 AM	Bypass valve closed
1/14/2011	5:28:00 AM	Bubbler valve closed
1/14/2011	5:28:00 AM	Helium MFC set to  0.000000
1/14/2011	5:28:00 AM	H2 MFC set to  0.000000
1/14/2011	5:28:00 AM	BCl3 MFC set to  0.000000
1/14/2011	5:28:00 AM	PHl3 MFC set to  0.000000
1/14/2011	5:28:00 AM	SiCl4 MFC set to  0.000000
1/14/2011	5:28:00 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:28:00 AM	Tube furnace set to 0
1/14/2011	5:28:01 AM	Run finished at 5:28 AM
1/14/2011	8:06:49 AM	Recipe started at 8:06 AM
1/14/2011	8:06:49 AM	Helium valve closed
1/14/2011	8:06:49 AM	BCl3 valve closed
1/14/2011	8:06:49 AM	PH3 valve closed
1/14/2011	8:06:49 AM	SiCl4 pre valve closed
1/14/2011	8:06:49 AM	SiCl4 post valve closed
1/14/2011	8:06:49 AM	Main Vac valve closed
1/14/2011	8:06:49 AM	Bypass valve closed
1/14/2011	8:06:49 AM	Bubbler valve closed
1/14/2011	8:06:49 AM	H2 valve opened
1/14/2011	8:06:49 AM	Helium MFC set to  0.000000
1/14/2011	8:06:49 AM	H2 MFC set to  500.000000
1/14/2011	8:06:49 AM	BCl3 MFC set to  0.000000
1/14/2011	8:06:49 AM	PHl3 MFC set to  0.000000
1/14/2011	8:06:49 AM	SiCl4 MFC set to  0.000000
1/14/2011	8:06:49 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	8:06:49 AM	Tube furnace set to 0
1/14/2011	8:06:58 AM	Run aborted at 8:06 AM
1/14/2011	8:06:58 AM	Helium valve closed
1/14/2011	8:06:58 AM	H2 valve closed
1/14/2011	8:06:58 AM	BCl3 valve closed
1/14/2011	8:06:58 AM	PH3 valve closed
1/14/2011	8:06:58 AM	SiCl4 pre valve closed
1/14/2011	8:06:58 AM	SiCl4 post valve closed
1/14/2011	8:06:58 AM	Bypass valve closed
1/14/2011	8:06:58 AM	Main Vac valve closed
1/14/2011	8:06:58 AM	Bubbler valve closed
1/14/2011	8:06:58 AM	Helium MFC set to  0.000000
1/14/2011	8:06:58 AM	H2 MFC set to  0.000000
1/14/2011	8:06:58 AM	BCl3 MFC set to  0.000000
1/14/2011	8:06:58 AM	PHl3 MFC set to  0.000000
1/14/2011	8:06:58 AM	SiCl4 MFC set to  0.000000
1/14/2011	8:06:58 AM	Tube furnace set to 0
1/14/2011	8:07:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	8:07:01 AM	Recipe started at 8:07 AM
1/14/2011	8:07:01 AM	H2 valve closed
1/14/2011	8:07:01 AM	BCl3 valve closed
1/14/2011	8:07:01 AM	PH3 valve closed
1/14/2011	8:07:01 AM	SiCl4 pre valve closed
1/14/2011	8:07:01 AM	SiCl4 post valve closed
1/14/2011	8:07:01 AM	Main Vac valve closed
1/14/2011	8:07:01 AM	Bypass valve closed
1/14/2011	8:07:01 AM	Bubbler valve closed
1/14/2011	8:07:01 AM	Helium valve opened
1/14/2011	8:07:01 AM	Helium MFC set to  500.000000
1/14/2011	8:07:01 AM	H2 MFC set to  0.000000
1/14/2011	8:07:01 AM	BCl3 MFC set to  0.000000
1/14/2011	8:07:01 AM	PHl3 MFC set to  0.000000
1/14/2011	8:07:01 AM	SiCl4 MFC set to  0.000000
1/14/2011	8:07:01 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	8:07:01 AM	Tube furnace set to 0
1/14/2011	8:07:02 AM	Helium valve closed
1/14/2011	8:07:02 AM	H2 valve closed
1/14/2011	8:07:02 AM	BCl3 valve closed
1/14/2011	8:07:02 AM	PH3 valve closed
1/14/2011	8:07:02 AM	SiCl4 pre valve closed
1/14/2011	8:07:02 AM	SiCl4 post valve closed
1/14/2011	8:07:02 AM	Main Vac valve closed
1/14/2011	8:07:02 AM	Bypass valve closed
1/14/2011	8:07:02 AM	Bubbler valve closed
1/14/2011	8:07:02 AM	Helium MFC set to  0.000000
1/14/2011	8:07:02 AM	H2 MFC set to  0.000000
1/14/2011	8:07:02 AM	BCl3 MFC set to  0.000000
1/14/2011	8:07:02 AM	PHl3 MFC set to  0.000000
1/14/2011	8:07:02 AM	SiCl4 MFC set to  0.000000
1/14/2011	8:07:02 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	8:07:02 AM	Tube furnace set to 0
1/14/2011	8:07:02 AM	Run finished at 8:07 AM
1/14/2011	8:07:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	8:09:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	8:09:42 AM	Recipe started at 8:09 AM
1/14/2011	8:09:42 AM	Helium valve closed
1/14/2011	8:09:42 AM	H2 valve closed
1/14/2011	8:09:42 AM	BCl3 valve closed
1/14/2011	8:09:42 AM	PH3 valve closed
1/14/2011	8:09:42 AM	SiCl4 pre valve closed
1/14/2011	8:09:42 AM	SiCl4 post valve closed
1/14/2011	8:09:42 AM	Main Vac valve closed
1/14/2011	8:09:42 AM	Bubbler valve closed
1/14/2011	8:09:42 AM	Bypass valve opened
1/14/2011	8:09:42 AM	Helium MFC set to  0.000000
1/14/2011	8:09:42 AM	H2 MFC set to  0.000000
1/14/2011	8:09:42 AM	BCl3 MFC set to  0.000000
1/14/2011	8:09:42 AM	PHl3 MFC set to  0.000000
1/14/2011	8:09:42 AM	SiCl4 MFC set to  0.000000
1/14/2011	8:09:42 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	8:09:42 AM	Tube furnace set to 0
1/14/2011	8:10:11 AM	Helium valve closed
1/14/2011	8:10:11 AM	H2 valve closed
1/14/2011	8:10:11 AM	BCl3 valve closed
1/14/2011	8:10:11 AM	PH3 valve closed
1/14/2011	8:10:11 AM	SiCl4 pre valve closed
1/14/2011	8:10:11 AM	SiCl4 post valve closed
1/14/2011	8:10:11 AM	Bubbler valve closed
1/14/2011	8:10:11 AM	Main Vac valve opened
1/14/2011	8:10:11 AM	Bypass valve opened
1/14/2011	8:10:11 AM	Helium MFC set to  0.000000
1/14/2011	8:10:12 AM	H2 MFC set to  0.000000
1/14/2011	8:10:12 AM	BCl3 MFC set to  0.000000
1/14/2011	8:10:12 AM	PHl3 MFC set to  0.000000
1/14/2011	8:10:12 AM	SiCl4 MFC set to  0.000000
1/14/2011	8:10:12 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	8:10:12 AM	Tube furnace set to 0
1/14/2011	8:10:12 AM	Run finished at 8:10 AM
1/14/2011	8:10:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	10:12:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	10:12:26 AM	Recipe started at 10:12 AM
1/14/2011	10:12:26 AM	H2 valve closed
1/14/2011	10:12:26 AM	BCl3 valve closed
1/14/2011	10:12:26 AM	PH3 valve closed
1/14/2011	10:12:26 AM	SiCl4 pre valve closed
1/14/2011	10:12:26 AM	SiCl4 post valve closed
1/14/2011	10:12:26 AM	Main Vac valve closed
1/14/2011	10:12:26 AM	Bypass valve closed
1/14/2011	10:12:26 AM	Bubbler valve closed
1/14/2011	10:12:26 AM	Helium valve opened
1/14/2011	10:12:26 AM	Helium MFC set to  500.000000
1/14/2011	10:12:26 AM	H2 MFC set to  0.000000
1/14/2011	10:12:26 AM	BCl3 MFC set to  0.000000
1/14/2011	10:12:26 AM	PHl3 MFC set to  0.000000
1/14/2011	10:12:26 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:12:26 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:12:27 AM	Tube furnace set to 0
1/14/2011	10:13:47 AM	Helium valve closed
1/14/2011	10:13:47 AM	H2 valve closed
1/14/2011	10:13:47 AM	BCl3 valve closed
1/14/2011	10:13:47 AM	PH3 valve closed
1/14/2011	10:13:47 AM	SiCl4 pre valve closed
1/14/2011	10:13:47 AM	SiCl4 post valve closed
1/14/2011	10:13:47 AM	Main Vac valve closed
1/14/2011	10:13:47 AM	Bypass valve closed
1/14/2011	10:13:47 AM	Bubbler valve closed
1/14/2011	10:13:47 AM	Helium MFC set to  0.000000
1/14/2011	10:13:47 AM	H2 MFC set to  0.000000
1/14/2011	10:13:47 AM	BCl3 MFC set to  0.000000
1/14/2011	10:13:47 AM	PHl3 MFC set to  0.000000
1/14/2011	10:13:47 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:13:47 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:13:47 AM	Tube furnace set to 0
1/14/2011	10:13:47 AM	Run finished at 10:13 AM
1/14/2011	10:13:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/14/2011	10:18:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	10:18:52 AM	Recipe started at 10:18 AM
1/14/2011	10:18:52 AM	Helium valve closed
1/14/2011	10:18:52 AM	H2 valve closed
1/14/2011	10:18:52 AM	BCl3 valve closed
1/14/2011	10:18:52 AM	PH3 valve closed
1/14/2011	10:18:52 AM	SiCl4 pre valve closed
1/14/2011	10:18:52 AM	SiCl4 post valve closed
1/14/2011	10:18:52 AM	Main Vac valve closed
1/14/2011	10:18:52 AM	Bubbler valve closed
1/14/2011	10:18:52 AM	Bypass valve opened
1/14/2011	10:18:52 AM	Helium MFC set to  0.000000
1/14/2011	10:18:52 AM	H2 MFC set to  0.000000
1/14/2011	10:18:52 AM	BCl3 MFC set to  0.000000
1/14/2011	10:18:52 AM	PHl3 MFC set to  0.000000
1/14/2011	10:18:52 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:18:52 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:18:52 AM	Tube furnace set to 0
1/14/2011	10:19:23 AM	Helium valve closed
1/14/2011	10:19:23 AM	H2 valve closed
1/14/2011	10:19:23 AM	BCl3 valve closed
1/14/2011	10:19:23 AM	PH3 valve closed
1/14/2011	10:19:23 AM	SiCl4 pre valve closed
1/14/2011	10:19:23 AM	SiCl4 post valve closed
1/14/2011	10:19:23 AM	Bubbler valve closed
1/14/2011	10:19:23 AM	Main Vac valve opened
1/14/2011	10:19:23 AM	Bypass valve opened
1/14/2011	10:19:23 AM	Helium MFC set to  0.000000
1/14/2011	10:19:23 AM	H2 MFC set to  0.000000
1/14/2011	10:19:23 AM	BCl3 MFC set to  0.000000
1/14/2011	10:19:23 AM	PHl3 MFC set to  0.000000
1/14/2011	10:19:23 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:19:23 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:19:23 AM	Tube furnace set to 0
1/14/2011	10:19:23 AM	Run finished at 10:19 AM
1/14/2011	10:19:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	10:20:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	10:20:18 AM	Recipe started at 10:20 AM
1/14/2011	10:20:18 AM	Helium valve closed
1/14/2011	10:20:18 AM	H2 valve closed
1/14/2011	10:20:18 AM	BCl3 valve closed
1/14/2011	10:20:18 AM	PH3 valve closed
1/14/2011	10:20:18 AM	SiCl4 pre valve closed
1/14/2011	10:20:18 AM	SiCl4 post valve closed
1/14/2011	10:20:18 AM	Main Vac valve closed
1/14/2011	10:20:18 AM	Bubbler valve closed
1/14/2011	10:20:18 AM	Bypass valve opened
1/14/2011	10:20:18 AM	Helium MFC set to  0.000000
1/14/2011	10:20:18 AM	H2 MFC set to  0.000000
1/14/2011	10:20:18 AM	BCl3 MFC set to  0.000000
1/14/2011	10:20:18 AM	PHl3 MFC set to  0.000000
1/14/2011	10:20:18 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:20:18 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:20:18 AM	Tube furnace set to 0
1/14/2011	10:20:19 AM	Helium valve closed
1/14/2011	10:20:19 AM	H2 valve closed
1/14/2011	10:20:19 AM	BCl3 valve closed
1/14/2011	10:20:19 AM	PH3 valve closed
1/14/2011	10:20:19 AM	SiCl4 pre valve closed
1/14/2011	10:20:19 AM	SiCl4 post valve closed
1/14/2011	10:20:19 AM	Bubbler valve closed
1/14/2011	10:20:19 AM	Main Vac valve opened
1/14/2011	10:20:19 AM	Bypass valve opened
1/14/2011	10:20:19 AM	Helium MFC set to  0.000000
1/14/2011	10:20:19 AM	H2 MFC set to  0.000000
1/14/2011	10:20:19 AM	BCl3 MFC set to  0.000000
1/14/2011	10:20:19 AM	PHl3 MFC set to  0.000000
1/14/2011	10:20:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:20:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:20:19 AM	Tube furnace set to 0
1/14/2011	10:21:19 AM	H2 valve closed
1/14/2011	10:21:19 AM	BCl3 valve closed
1/14/2011	10:21:19 AM	PH3 valve closed
1/14/2011	10:21:19 AM	SiCl4 pre valve closed
1/14/2011	10:21:19 AM	SiCl4 post valve closed
1/14/2011	10:21:19 AM	Bubbler valve closed
1/14/2011	10:21:19 AM	Helium valve opened
1/14/2011	10:21:19 AM	Main Vac valve opened
1/14/2011	10:21:19 AM	Bypass valve opened
1/14/2011	10:21:19 AM	Helium MFC set to  100.000000
1/14/2011	10:21:19 AM	H2 MFC set to  0.000000
1/14/2011	10:21:19 AM	BCl3 MFC set to  0.000000
1/14/2011	10:21:19 AM	PHl3 MFC set to  0.000000
1/14/2011	10:21:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:21:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:21:19 AM	Tube furnace set to 0
1/14/2011	10:22:19 AM	Helium valve closed
1/14/2011	10:22:19 AM	H2 valve closed
1/14/2011	10:22:19 AM	BCl3 valve closed
1/14/2011	10:22:19 AM	PH3 valve closed
1/14/2011	10:22:19 AM	SiCl4 pre valve closed
1/14/2011	10:22:19 AM	SiCl4 post valve closed
1/14/2011	10:22:19 AM	Bubbler valve closed
1/14/2011	10:22:19 AM	Main Vac valve opened
1/14/2011	10:22:19 AM	Bypass valve opened
1/14/2011	10:22:19 AM	Helium MFC set to  0.000000
1/14/2011	10:22:19 AM	H2 MFC set to  0.000000
1/14/2011	10:22:19 AM	BCl3 MFC set to  0.000000
1/14/2011	10:22:19 AM	PHl3 MFC set to  0.000000
1/14/2011	10:22:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:22:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:22:19 AM	Tube furnace set to 0
1/14/2011	10:23:19 AM	H2 valve closed
1/14/2011	10:23:19 AM	BCl3 valve closed
1/14/2011	10:23:19 AM	PH3 valve closed
1/14/2011	10:23:19 AM	SiCl4 pre valve closed
1/14/2011	10:23:19 AM	SiCl4 post valve closed
1/14/2011	10:23:19 AM	Bubbler valve closed
1/14/2011	10:23:19 AM	Helium valve opened
1/14/2011	10:23:19 AM	Main Vac valve opened
1/14/2011	10:23:19 AM	Bypass valve opened
1/14/2011	10:23:19 AM	Helium MFC set to  100.000000
1/14/2011	10:23:19 AM	H2 MFC set to  0.000000
1/14/2011	10:23:19 AM	BCl3 MFC set to  0.000000
1/14/2011	10:23:19 AM	PHl3 MFC set to  0.000000
1/14/2011	10:23:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:23:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:23:19 AM	Tube furnace set to 0
1/14/2011	10:24:19 AM	Helium valve closed
1/14/2011	10:24:19 AM	H2 valve closed
1/14/2011	10:24:19 AM	BCl3 valve closed
1/14/2011	10:24:19 AM	PH3 valve closed
1/14/2011	10:24:19 AM	SiCl4 pre valve closed
1/14/2011	10:24:19 AM	SiCl4 post valve closed
1/14/2011	10:24:19 AM	Bubbler valve closed
1/14/2011	10:24:19 AM	Main Vac valve opened
1/14/2011	10:24:19 AM	Bypass valve opened
1/14/2011	10:24:19 AM	Helium MFC set to  0.000000
1/14/2011	10:24:19 AM	H2 MFC set to  0.000000
1/14/2011	10:24:19 AM	BCl3 MFC set to  0.000000
1/14/2011	10:24:19 AM	PHl3 MFC set to  0.000000
1/14/2011	10:24:19 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:24:19 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:24:20 AM	Tube furnace set to 0
1/14/2011	10:25:20 AM	H2 valve closed
1/14/2011	10:25:20 AM	BCl3 valve closed
1/14/2011	10:25:20 AM	PH3 valve closed
1/14/2011	10:25:20 AM	SiCl4 pre valve closed
1/14/2011	10:25:20 AM	SiCl4 post valve closed
1/14/2011	10:25:20 AM	Bubbler valve closed
1/14/2011	10:25:20 AM	Helium valve opened
1/14/2011	10:25:20 AM	Main Vac valve opened
1/14/2011	10:25:20 AM	Bypass valve opened
1/14/2011	10:25:20 AM	Helium MFC set to  100.000000
1/14/2011	10:25:20 AM	H2 MFC set to  0.000000
1/14/2011	10:25:20 AM	BCl3 MFC set to  0.000000
1/14/2011	10:25:20 AM	PHl3 MFC set to  0.000000
1/14/2011	10:25:20 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:25:20 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:25:20 AM	Tube furnace set to 0
1/14/2011	10:26:20 AM	Helium valve closed
1/14/2011	10:26:20 AM	H2 valve closed
1/14/2011	10:26:20 AM	BCl3 valve closed
1/14/2011	10:26:20 AM	PH3 valve closed
1/14/2011	10:26:20 AM	SiCl4 pre valve closed
1/14/2011	10:26:20 AM	SiCl4 post valve closed
1/14/2011	10:26:20 AM	Bubbler valve closed
1/14/2011	10:26:20 AM	Main Vac valve opened
1/14/2011	10:26:20 AM	Bypass valve opened
1/14/2011	10:26:20 AM	Helium MFC set to  0.000000
1/14/2011	10:26:20 AM	H2 MFC set to  0.000000
1/14/2011	10:26:20 AM	BCl3 MFC set to  0.000000
1/14/2011	10:26:20 AM	PHl3 MFC set to  0.000000
1/14/2011	10:26:20 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:26:20 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:26:20 AM	Tube furnace set to 0
1/14/2011	10:27:20 AM	H2 valve closed
1/14/2011	10:27:20 AM	BCl3 valve closed
1/14/2011	10:27:20 AM	PH3 valve closed
1/14/2011	10:27:20 AM	SiCl4 pre valve closed
1/14/2011	10:27:20 AM	SiCl4 post valve closed
1/14/2011	10:27:20 AM	Bubbler valve closed
1/14/2011	10:27:20 AM	Helium valve opened
1/14/2011	10:27:20 AM	Main Vac valve opened
1/14/2011	10:27:20 AM	Bypass valve opened
1/14/2011	10:27:20 AM	Helium MFC set to  100.000000
1/14/2011	10:27:20 AM	H2 MFC set to  0.000000
1/14/2011	10:27:20 AM	BCl3 MFC set to  0.000000
1/14/2011	10:27:20 AM	PHl3 MFC set to  0.000000
1/14/2011	10:27:20 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:27:20 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:27:20 AM	Tube furnace set to 0
1/14/2011	10:28:20 AM	Helium valve closed
1/14/2011	10:28:20 AM	H2 valve closed
1/14/2011	10:28:20 AM	BCl3 valve closed
1/14/2011	10:28:20 AM	PH3 valve closed
1/14/2011	10:28:20 AM	SiCl4 pre valve closed
1/14/2011	10:28:20 AM	SiCl4 post valve closed
1/14/2011	10:28:20 AM	Bubbler valve closed
1/14/2011	10:28:20 AM	Main Vac valve opened
1/14/2011	10:28:20 AM	Bypass valve opened
1/14/2011	10:28:20 AM	Helium MFC set to  0.000000
1/14/2011	10:28:20 AM	H2 MFC set to  0.000000
1/14/2011	10:28:20 AM	BCl3 MFC set to  0.000000
1/14/2011	10:28:20 AM	PHl3 MFC set to  0.000000
1/14/2011	10:28:20 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:28:20 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:28:20 AM	Tube furnace set to 0
1/14/2011	10:29:20 AM	H2 valve closed
1/14/2011	10:29:20 AM	BCl3 valve closed
1/14/2011	10:29:20 AM	PH3 valve closed
1/14/2011	10:29:20 AM	SiCl4 pre valve closed
1/14/2011	10:29:20 AM	SiCl4 post valve closed
1/14/2011	10:29:20 AM	Bubbler valve closed
1/14/2011	10:29:20 AM	Helium valve opened
1/14/2011	10:29:20 AM	Main Vac valve opened
1/14/2011	10:29:20 AM	Bypass valve opened
1/14/2011	10:29:20 AM	Helium MFC set to  100.000000
1/14/2011	10:29:20 AM	H2 MFC set to  0.000000
1/14/2011	10:29:20 AM	BCl3 MFC set to  0.000000
1/14/2011	10:29:20 AM	PHl3 MFC set to  0.000000
1/14/2011	10:29:20 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:29:20 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:29:21 AM	Tube furnace set to 0
1/14/2011	10:30:21 AM	Helium valve closed
1/14/2011	10:30:21 AM	H2 valve closed
1/14/2011	10:30:21 AM	BCl3 valve closed
1/14/2011	10:30:21 AM	PH3 valve closed
1/14/2011	10:30:21 AM	SiCl4 pre valve closed
1/14/2011	10:30:21 AM	SiCl4 post valve closed
1/14/2011	10:30:21 AM	Bubbler valve closed
1/14/2011	10:30:21 AM	Main Vac valve opened
1/14/2011	10:30:21 AM	Bypass valve opened
1/14/2011	10:30:21 AM	Helium MFC set to  0.000000
1/14/2011	10:30:21 AM	H2 MFC set to  0.000000
1/14/2011	10:30:21 AM	BCl3 MFC set to  0.000000
1/14/2011	10:30:21 AM	PHl3 MFC set to  0.000000
1/14/2011	10:30:21 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:30:21 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:30:21 AM	Tube furnace set to 0
1/14/2011	10:31:21 AM	H2 valve closed
1/14/2011	10:31:21 AM	BCl3 valve closed
1/14/2011	10:31:21 AM	PH3 valve closed
1/14/2011	10:31:21 AM	SiCl4 pre valve closed
1/14/2011	10:31:21 AM	SiCl4 post valve closed
1/14/2011	10:31:21 AM	Bubbler valve closed
1/14/2011	10:31:21 AM	Helium valve opened
1/14/2011	10:31:21 AM	Main Vac valve opened
1/14/2011	10:31:21 AM	Bypass valve opened
1/14/2011	10:31:21 AM	Helium MFC set to  100.000000
1/14/2011	10:31:21 AM	H2 MFC set to  0.000000
1/14/2011	10:31:21 AM	BCl3 MFC set to  0.000000
1/14/2011	10:31:21 AM	PHl3 MFC set to  0.000000
1/14/2011	10:31:21 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:31:21 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:31:21 AM	Tube furnace set to 0
1/14/2011	10:32:21 AM	Helium valve closed
1/14/2011	10:32:21 AM	H2 valve closed
1/14/2011	10:32:21 AM	BCl3 valve closed
1/14/2011	10:32:21 AM	PH3 valve closed
1/14/2011	10:32:21 AM	SiCl4 pre valve closed
1/14/2011	10:32:21 AM	SiCl4 post valve closed
1/14/2011	10:32:21 AM	Bubbler valve closed
1/14/2011	10:32:21 AM	Main Vac valve opened
1/14/2011	10:32:21 AM	Bypass valve opened
1/14/2011	10:32:21 AM	Helium MFC set to  0.000000
1/14/2011	10:32:21 AM	H2 MFC set to  0.000000
1/14/2011	10:32:21 AM	BCl3 MFC set to  0.000000
1/14/2011	10:32:21 AM	PHl3 MFC set to  0.000000
1/14/2011	10:32:21 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:32:21 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:32:21 AM	Tube furnace set to 0
1/14/2011	10:33:21 AM	H2 valve closed
1/14/2011	10:33:21 AM	BCl3 valve closed
1/14/2011	10:33:21 AM	PH3 valve closed
1/14/2011	10:33:21 AM	SiCl4 pre valve closed
1/14/2011	10:33:21 AM	SiCl4 post valve closed
1/14/2011	10:33:21 AM	Bubbler valve closed
1/14/2011	10:33:21 AM	Helium valve opened
1/14/2011	10:33:21 AM	Main Vac valve opened
1/14/2011	10:33:21 AM	Bypass valve opened
1/14/2011	10:33:21 AM	Helium MFC set to  100.000000
1/14/2011	10:33:21 AM	H2 MFC set to  0.000000
1/14/2011	10:33:21 AM	BCl3 MFC set to  0.000000
1/14/2011	10:33:21 AM	PHl3 MFC set to  0.000000
1/14/2011	10:33:21 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:33:21 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:33:21 AM	Tube furnace set to 0
1/14/2011	10:34:21 AM	Helium valve closed
1/14/2011	10:34:21 AM	H2 valve closed
1/14/2011	10:34:21 AM	BCl3 valve closed
1/14/2011	10:34:21 AM	PH3 valve closed
1/14/2011	10:34:21 AM	SiCl4 pre valve closed
1/14/2011	10:34:21 AM	SiCl4 post valve closed
1/14/2011	10:34:21 AM	Bubbler valve closed
1/14/2011	10:34:21 AM	Main Vac valve opened
1/14/2011	10:34:21 AM	Bypass valve opened
1/14/2011	10:34:21 AM	Helium MFC set to  0.000000
1/14/2011	10:34:21 AM	H2 MFC set to  0.000000
1/14/2011	10:34:21 AM	BCl3 MFC set to  0.000000
1/14/2011	10:34:21 AM	PHl3 MFC set to  0.000000
1/14/2011	10:34:21 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:34:21 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:34:22 AM	Tube furnace set to 0
1/14/2011	10:35:22 AM	H2 valve closed
1/14/2011	10:35:22 AM	BCl3 valve closed
1/14/2011	10:35:22 AM	PH3 valve closed
1/14/2011	10:35:22 AM	SiCl4 pre valve closed
1/14/2011	10:35:22 AM	SiCl4 post valve closed
1/14/2011	10:35:22 AM	Bubbler valve closed
1/14/2011	10:35:22 AM	Helium valve opened
1/14/2011	10:35:22 AM	Main Vac valve opened
1/14/2011	10:35:22 AM	Bypass valve opened
1/14/2011	10:35:22 AM	Helium MFC set to  100.000000
1/14/2011	10:35:22 AM	H2 MFC set to  0.000000
1/14/2011	10:35:22 AM	BCl3 MFC set to  0.000000
1/14/2011	10:35:22 AM	PHl3 MFC set to  0.000000
1/14/2011	10:35:22 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:35:22 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:35:22 AM	Tube furnace set to 0
1/14/2011	10:36:22 AM	Helium valve closed
1/14/2011	10:36:22 AM	H2 valve closed
1/14/2011	10:36:22 AM	BCl3 valve closed
1/14/2011	10:36:22 AM	PH3 valve closed
1/14/2011	10:36:22 AM	SiCl4 pre valve closed
1/14/2011	10:36:22 AM	SiCl4 post valve closed
1/14/2011	10:36:22 AM	Bubbler valve closed
1/14/2011	10:36:22 AM	Main Vac valve opened
1/14/2011	10:36:22 AM	Bypass valve opened
1/14/2011	10:36:22 AM	Helium MFC set to  0.000000
1/14/2011	10:36:22 AM	H2 MFC set to  0.000000
1/14/2011	10:36:22 AM	BCl3 MFC set to  0.000000
1/14/2011	10:36:22 AM	PHl3 MFC set to  0.000000
1/14/2011	10:36:22 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:36:22 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:36:22 AM	Tube furnace set to 0
1/14/2011	10:37:22 AM	H2 valve closed
1/14/2011	10:37:22 AM	BCl3 valve closed
1/14/2011	10:37:22 AM	PH3 valve closed
1/14/2011	10:37:22 AM	SiCl4 pre valve closed
1/14/2011	10:37:22 AM	SiCl4 post valve closed
1/14/2011	10:37:22 AM	Bubbler valve closed
1/14/2011	10:37:22 AM	Helium valve opened
1/14/2011	10:37:22 AM	Main Vac valve opened
1/14/2011	10:37:22 AM	Bypass valve opened
1/14/2011	10:37:22 AM	Helium MFC set to  100.000000
1/14/2011	10:37:22 AM	H2 MFC set to  0.000000
1/14/2011	10:37:22 AM	BCl3 MFC set to  0.000000
1/14/2011	10:37:22 AM	PHl3 MFC set to  0.000000
1/14/2011	10:37:22 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:37:22 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:37:22 AM	Tube furnace set to 0
1/14/2011	10:38:22 AM	Helium valve closed
1/14/2011	10:38:22 AM	H2 valve closed
1/14/2011	10:38:22 AM	BCl3 valve closed
1/14/2011	10:38:22 AM	PH3 valve closed
1/14/2011	10:38:22 AM	SiCl4 pre valve closed
1/14/2011	10:38:22 AM	SiCl4 post valve closed
1/14/2011	10:38:22 AM	Bubbler valve closed
1/14/2011	10:38:22 AM	Main Vac valve opened
1/14/2011	10:38:22 AM	Bypass valve opened
1/14/2011	10:38:22 AM	Helium MFC set to  0.000000
1/14/2011	10:38:22 AM	H2 MFC set to  0.000000
1/14/2011	10:38:22 AM	BCl3 MFC set to  0.000000
1/14/2011	10:38:22 AM	PHl3 MFC set to  0.000000
1/14/2011	10:38:22 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:38:22 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:38:22 AM	Tube furnace set to 0
1/14/2011	10:39:22 AM	H2 valve closed
1/14/2011	10:39:22 AM	BCl3 valve closed
1/14/2011	10:39:22 AM	PH3 valve closed
1/14/2011	10:39:22 AM	SiCl4 pre valve closed
1/14/2011	10:39:22 AM	SiCl4 post valve closed
1/14/2011	10:39:22 AM	Bubbler valve closed
1/14/2011	10:39:22 AM	Helium valve opened
1/14/2011	10:39:22 AM	Main Vac valve opened
1/14/2011	10:39:22 AM	Bypass valve opened
1/14/2011	10:39:22 AM	Helium MFC set to  100.000000
1/14/2011	10:39:22 AM	H2 MFC set to  0.000000
1/14/2011	10:39:22 AM	BCl3 MFC set to  0.000000
1/14/2011	10:39:22 AM	PHl3 MFC set to  0.000000
1/14/2011	10:39:22 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:39:22 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:39:23 AM	Tube furnace set to 0
1/14/2011	10:40:23 AM	Helium valve closed
1/14/2011	10:40:23 AM	H2 valve closed
1/14/2011	10:40:23 AM	BCl3 valve closed
1/14/2011	10:40:23 AM	PH3 valve closed
1/14/2011	10:40:23 AM	SiCl4 pre valve closed
1/14/2011	10:40:23 AM	SiCl4 post valve closed
1/14/2011	10:40:23 AM	Bubbler valve closed
1/14/2011	10:40:23 AM	Main Vac valve opened
1/14/2011	10:40:23 AM	Bypass valve opened
1/14/2011	10:40:23 AM	Helium MFC set to  0.000000
1/14/2011	10:40:23 AM	H2 MFC set to  0.000000
1/14/2011	10:40:23 AM	BCl3 MFC set to  0.000000
1/14/2011	10:40:23 AM	PHl3 MFC set to  0.000000
1/14/2011	10:40:23 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:40:23 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:40:23 AM	Tube furnace set to 0
1/14/2011	10:40:24 AM	Run finished at 10:40 AM
1/14/2011	10:40:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	10:41:48 AM	Recipe started at 10:41 AM
1/14/2011	10:41:48 AM	Helium valve closed
1/14/2011	10:41:48 AM	BCl3 valve closed
1/14/2011	10:41:48 AM	PH3 valve closed
1/14/2011	10:41:48 AM	SiCl4 pre valve closed
1/14/2011	10:41:48 AM	SiCl4 post valve closed
1/14/2011	10:41:48 AM	Main Vac valve closed
1/14/2011	10:41:48 AM	Bypass valve closed
1/14/2011	10:41:48 AM	Bubbler valve closed
1/14/2011	10:41:48 AM	H2 valve opened
1/14/2011	10:41:48 AM	Helium MFC set to  0.000000
1/14/2011	10:41:48 AM	H2 MFC set to  500.000000
1/14/2011	10:41:48 AM	BCl3 MFC set to  0.000000
1/14/2011	10:41:48 AM	PHl3 MFC set to  0.000000
1/14/2011	10:41:48 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:41:48 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:41:48 AM	Tube furnace set to 0
1/14/2011	10:43:10 AM	Helium valve closed
1/14/2011	10:43:10 AM	BCl3 valve closed
1/14/2011	10:43:10 AM	PH3 valve closed
1/14/2011	10:43:10 AM	SiCl4 pre valve closed
1/14/2011	10:43:10 AM	SiCl4 post valve closed
1/14/2011	10:43:10 AM	Main Vac valve closed
1/14/2011	10:43:10 AM	Bypass valve closed
1/14/2011	10:43:10 AM	H2 valve opened
1/14/2011	10:43:10 AM	Bubbler valve opened
1/14/2011	10:43:10 AM	Helium MFC set to  0.000000
1/14/2011	10:43:10 AM	H2 MFC set to  500.000000
1/14/2011	10:43:10 AM	BCl3 MFC set to  0.000000
1/14/2011	10:43:10 AM	PHl3 MFC set to  0.000000
1/14/2011	10:43:10 AM	SiCl4 MFC set to  0.000000
1/14/2011	10:43:10 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	10:43:10 AM	Tube furnace set to 1000
1/14/2011	11:03:10 AM	Helium valve closed
1/14/2011	11:03:10 AM	PH3 valve closed
1/14/2011	11:03:10 AM	Main Vac valve closed
1/14/2011	11:03:10 AM	Bypass valve closed
1/14/2011	11:03:10 AM	H2 valve opened
1/14/2011	11:03:10 AM	BCl3 valve opened
1/14/2011	11:03:10 AM	SiCl4 pre valve opened
1/14/2011	11:03:10 AM	SiCl4 post valve opened
1/14/2011	11:03:10 AM	Bubbler valve opened
1/14/2011	11:03:10 AM	Helium MFC set to  0.000000
1/14/2011	11:03:10 AM	H2 MFC set to  500.000000
1/14/2011	11:03:10 AM	BCl3 MFC set to  2.000000
1/14/2011	11:03:10 AM	PHl3 MFC set to  0.000000
1/14/2011	11:03:10 AM	SiCl4 MFC set to  50.000000
1/14/2011	11:03:10 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:03:10 AM	Tube furnace set to 1000
1/14/2011	11:23:11 AM	H2 valve closed
1/14/2011	11:23:11 AM	BCl3 valve closed
1/14/2011	11:23:11 AM	PH3 valve closed
1/14/2011	11:23:11 AM	SiCl4 pre valve closed
1/14/2011	11:23:11 AM	SiCl4 post valve closed
1/14/2011	11:23:11 AM	Main Vac valve closed
1/14/2011	11:23:11 AM	Bypass valve closed
1/14/2011	11:23:11 AM	Helium valve opened
1/14/2011	11:23:11 AM	Bubbler valve opened
1/14/2011	11:23:11 AM	Helium MFC set to  500.000000
1/14/2011	11:23:11 AM	H2 MFC set to  0.000000
1/14/2011	11:23:11 AM	BCl3 MFC set to  0.000000
1/14/2011	11:23:11 AM	PHl3 MFC set to  0.000000
1/14/2011	11:23:11 AM	SiCl4 MFC set to  0.000000
1/14/2011	11:23:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:23:11 AM	Tube furnace set to 950
1/14/2011	11:28:11 AM	H2 valve closed
1/14/2011	11:28:11 AM	BCl3 valve closed
1/14/2011	11:28:11 AM	PH3 valve closed
1/14/2011	11:28:11 AM	SiCl4 pre valve closed
1/14/2011	11:28:11 AM	SiCl4 post valve closed
1/14/2011	11:28:11 AM	Main Vac valve closed
1/14/2011	11:28:11 AM	Bypass valve closed
1/14/2011	11:28:11 AM	Helium valve opened
1/14/2011	11:28:11 AM	Bubbler valve opened
1/14/2011	11:28:11 AM	Helium MFC set to  500.000000
1/14/2011	11:28:11 AM	H2 MFC set to  0.000000
1/14/2011	11:28:11 AM	BCl3 MFC set to  0.000000
1/14/2011	11:28:11 AM	PHl3 MFC set to  0.000000
1/14/2011	11:28:11 AM	SiCl4 MFC set to  0.000000
1/14/2011	11:28:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:28:11 AM	Tube furnace set to 900
1/14/2011	11:33:11 AM	H2 valve closed
1/14/2011	11:33:11 AM	BCl3 valve closed
1/14/2011	11:33:11 AM	PH3 valve closed
1/14/2011	11:33:11 AM	SiCl4 pre valve closed
1/14/2011	11:33:11 AM	SiCl4 post valve closed
1/14/2011	11:33:11 AM	Main Vac valve closed
1/14/2011	11:33:11 AM	Bypass valve closed
1/14/2011	11:33:11 AM	Helium valve opened
1/14/2011	11:33:11 AM	Bubbler valve opened
1/14/2011	11:33:11 AM	Helium MFC set to  500.000000
1/14/2011	11:33:11 AM	H2 MFC set to  0.000000
1/14/2011	11:33:11 AM	BCl3 MFC set to  0.000000
1/14/2011	11:33:11 AM	PHl3 MFC set to  0.000000
1/14/2011	11:33:11 AM	SiCl4 MFC set to  0.000000
1/14/2011	11:33:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:33:11 AM	Tube furnace set to 850
1/14/2011	11:38:11 AM	H2 valve closed
1/14/2011	11:38:11 AM	BCl3 valve closed
1/14/2011	11:38:11 AM	PH3 valve closed
1/14/2011	11:38:11 AM	SiCl4 pre valve closed
1/14/2011	11:38:11 AM	SiCl4 post valve closed
1/14/2011	11:38:11 AM	Main Vac valve closed
1/14/2011	11:38:11 AM	Bypass valve closed
1/14/2011	11:38:11 AM	Helium valve opened
1/14/2011	11:38:11 AM	Bubbler valve opened
1/14/2011	11:38:11 AM	Helium MFC set to  500.000000
1/14/2011	11:38:11 AM	H2 MFC set to  0.000000
1/14/2011	11:38:11 AM	BCl3 MFC set to  0.000000
1/14/2011	11:38:11 AM	PHl3 MFC set to  0.000000
1/14/2011	11:38:11 AM	SiCl4 MFC set to  0.000000
1/14/2011	11:38:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:38:11 AM	Tube furnace set to 800
1/14/2011	11:43:11 AM	H2 valve closed
1/14/2011	11:43:11 AM	BCl3 valve closed
1/14/2011	11:43:11 AM	PH3 valve closed
1/14/2011	11:43:11 AM	SiCl4 pre valve closed
1/14/2011	11:43:11 AM	SiCl4 post valve closed
1/14/2011	11:43:11 AM	Main Vac valve closed
1/14/2011	11:43:11 AM	Bypass valve closed
1/14/2011	11:43:11 AM	Helium valve opened
1/14/2011	11:43:11 AM	Bubbler valve opened
1/14/2011	11:43:11 AM	Helium MFC set to  500.000000
1/14/2011	11:43:11 AM	H2 MFC set to  0.000000
1/14/2011	11:43:11 AM	BCl3 MFC set to  0.000000
1/14/2011	11:43:11 AM	PHl3 MFC set to  0.000000
1/14/2011	11:43:11 AM	SiCl4 MFC set to  0.000000
1/14/2011	11:43:11 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:43:12 AM	Tube furnace set to 750
1/14/2011	11:48:12 AM	H2 valve closed
1/14/2011	11:48:12 AM	BCl3 valve closed
1/14/2011	11:48:12 AM	PH3 valve closed
1/14/2011	11:48:12 AM	SiCl4 pre valve closed
1/14/2011	11:48:12 AM	SiCl4 post valve closed
1/14/2011	11:48:12 AM	Main Vac valve closed
1/14/2011	11:48:12 AM	Bypass valve closed
1/14/2011	11:48:12 AM	Helium valve opened
1/14/2011	11:48:12 AM	Bubbler valve opened
1/14/2011	11:48:12 AM	Helium MFC set to  500.000000
1/14/2011	11:48:12 AM	H2 MFC set to  0.000000
1/14/2011	11:48:12 AM	BCl3 MFC set to  0.000000
1/14/2011	11:48:12 AM	PHl3 MFC set to  0.000000
1/14/2011	11:48:12 AM	SiCl4 MFC set to  0.000000
1/14/2011	11:48:12 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:48:12 AM	Tube furnace set to 700
1/14/2011	11:53:12 AM	H2 valve closed
1/14/2011	11:53:12 AM	BCl3 valve closed
1/14/2011	11:53:12 AM	PH3 valve closed
1/14/2011	11:53:12 AM	SiCl4 pre valve closed
1/14/2011	11:53:12 AM	SiCl4 post valve closed
1/14/2011	11:53:12 AM	Main Vac valve closed
1/14/2011	11:53:12 AM	Bypass valve closed
1/14/2011	11:53:12 AM	Helium valve opened
1/14/2011	11:53:12 AM	Bubbler valve opened
1/14/2011	11:53:12 AM	Helium MFC set to  500.000000
1/14/2011	11:53:12 AM	H2 MFC set to  0.000000
1/14/2011	11:53:12 AM	BCl3 MFC set to  0.000000
1/14/2011	11:53:12 AM	PHl3 MFC set to  0.000000
1/14/2011	11:53:12 AM	SiCl4 MFC set to  0.000000
1/14/2011	11:53:12 AM	Bypass solenoid MFC set to  0.000000
1/14/2011	11:53:12 AM	Tube furnace set to 0
1/14/2011	12:01:21 PM	Helium valve closed
1/14/2011	12:01:21 PM	H2 valve closed
1/14/2011	12:01:21 PM	BCl3 valve closed
1/14/2011	12:01:21 PM	PH3 valve closed
1/14/2011	12:01:21 PM	SiCl4 pre valve closed
1/14/2011	12:01:21 PM	SiCl4 post valve closed
1/14/2011	12:01:21 PM	Main Vac valve closed
1/14/2011	12:01:21 PM	Bypass valve closed
1/14/2011	12:01:21 PM	Bubbler valve closed
1/14/2011	12:01:21 PM	Helium MFC set to  0.000000
1/14/2011	12:01:21 PM	H2 MFC set to  0.000000
1/14/2011	12:01:21 PM	BCl3 MFC set to  0.000000
1/14/2011	12:01:21 PM	PHl3 MFC set to  0.000000
1/14/2011	12:01:21 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:01:21 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:01:21 PM	Tube furnace set to 0
1/14/2011	12:01:22 PM	Run finished at 12:01 PM
1/14/2011	12:04:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	12:04:34 PM	Recipe started at 12:04 PM
1/14/2011	12:04:34 PM	Helium valve closed
1/14/2011	12:04:34 PM	H2 valve closed
1/14/2011	12:04:34 PM	BCl3 valve closed
1/14/2011	12:04:34 PM	PH3 valve closed
1/14/2011	12:04:34 PM	SiCl4 pre valve closed
1/14/2011	12:04:34 PM	SiCl4 post valve closed
1/14/2011	12:04:34 PM	Main Vac valve closed
1/14/2011	12:04:34 PM	Bubbler valve closed
1/14/2011	12:04:34 PM	Bypass valve opened
1/14/2011	12:04:34 PM	Helium MFC set to  0.000000
1/14/2011	12:04:34 PM	H2 MFC set to  0.000000
1/14/2011	12:04:34 PM	BCl3 MFC set to  0.000000
1/14/2011	12:04:34 PM	PHl3 MFC set to  0.000000
1/14/2011	12:04:34 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:04:34 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:04:34 PM	Tube furnace set to 0
1/14/2011	12:05:04 PM	Helium valve closed
1/14/2011	12:05:04 PM	H2 valve closed
1/14/2011	12:05:04 PM	BCl3 valve closed
1/14/2011	12:05:04 PM	PH3 valve closed
1/14/2011	12:05:04 PM	SiCl4 pre valve closed
1/14/2011	12:05:04 PM	SiCl4 post valve closed
1/14/2011	12:05:04 PM	Bubbler valve closed
1/14/2011	12:05:04 PM	Main Vac valve opened
1/14/2011	12:05:04 PM	Bypass valve opened
1/14/2011	12:05:04 PM	Helium MFC set to  0.000000
1/14/2011	12:05:04 PM	H2 MFC set to  0.000000
1/14/2011	12:05:04 PM	BCl3 MFC set to  0.000000
1/14/2011	12:05:04 PM	PHl3 MFC set to  0.000000
1/14/2011	12:05:04 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:05:04 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:05:05 PM	Tube furnace set to 0
1/14/2011	12:05:05 PM	Run finished at 12:05 PM
1/14/2011	12:05:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	12:07:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	12:07:19 PM	Recipe started at 12:07 PM
1/14/2011	12:07:19 PM	Helium valve closed
1/14/2011	12:07:19 PM	H2 valve closed
1/14/2011	12:07:19 PM	BCl3 valve closed
1/14/2011	12:07:19 PM	PH3 valve closed
1/14/2011	12:07:19 PM	SiCl4 pre valve closed
1/14/2011	12:07:19 PM	SiCl4 post valve closed
1/14/2011	12:07:19 PM	Main Vac valve closed
1/14/2011	12:07:19 PM	Bubbler valve closed
1/14/2011	12:07:19 PM	Bypass valve opened
1/14/2011	12:07:19 PM	Helium MFC set to  0.000000
1/14/2011	12:07:19 PM	H2 MFC set to  0.000000
1/14/2011	12:07:19 PM	BCl3 MFC set to  0.000000
1/14/2011	12:07:19 PM	PHl3 MFC set to  0.000000
1/14/2011	12:07:19 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:07:19 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:07:19 PM	Tube furnace set to 0
1/14/2011	12:07:19 PM	Helium valve closed
1/14/2011	12:07:19 PM	H2 valve closed
1/14/2011	12:07:19 PM	BCl3 valve closed
1/14/2011	12:07:19 PM	PH3 valve closed
1/14/2011	12:07:19 PM	SiCl4 pre valve closed
1/14/2011	12:07:19 PM	SiCl4 post valve closed
1/14/2011	12:07:19 PM	Bubbler valve closed
1/14/2011	12:07:19 PM	Main Vac valve opened
1/14/2011	12:07:19 PM	Bypass valve opened
1/14/2011	12:07:19 PM	Helium MFC set to  0.000000
1/14/2011	12:07:19 PM	H2 MFC set to  0.000000
1/14/2011	12:07:19 PM	BCl3 MFC set to  0.000000
1/14/2011	12:07:19 PM	PHl3 MFC set to  0.000000
1/14/2011	12:07:19 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:07:19 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:07:19 PM	Tube furnace set to 0
1/14/2011	12:07:28 PM	H2 valve closed
1/14/2011	12:07:28 PM	BCl3 valve closed
1/14/2011	12:07:28 PM	PH3 valve closed
1/14/2011	12:07:28 PM	SiCl4 pre valve closed
1/14/2011	12:07:28 PM	SiCl4 post valve closed
1/14/2011	12:07:28 PM	Bubbler valve closed
1/14/2011	12:07:28 PM	Helium valve opened
1/14/2011	12:07:28 PM	Main Vac valve opened
1/14/2011	12:07:28 PM	Bypass valve opened
1/14/2011	12:07:28 PM	Helium MFC set to  100.000000
1/14/2011	12:07:28 PM	H2 MFC set to  0.000000
1/14/2011	12:07:28 PM	BCl3 MFC set to  0.000000
1/14/2011	12:07:28 PM	PHl3 MFC set to  0.000000
1/14/2011	12:07:28 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:07:28 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:07:28 PM	Tube furnace set to 0
1/14/2011	12:08:28 PM	Helium valve closed
1/14/2011	12:08:28 PM	H2 valve closed
1/14/2011	12:08:28 PM	BCl3 valve closed
1/14/2011	12:08:28 PM	PH3 valve closed
1/14/2011	12:08:28 PM	SiCl4 pre valve closed
1/14/2011	12:08:28 PM	SiCl4 post valve closed
1/14/2011	12:08:28 PM	Bubbler valve closed
1/14/2011	12:08:28 PM	Main Vac valve opened
1/14/2011	12:08:28 PM	Bypass valve opened
1/14/2011	12:08:28 PM	Helium MFC set to  0.000000
1/14/2011	12:08:28 PM	H2 MFC set to  0.000000
1/14/2011	12:08:28 PM	BCl3 MFC set to  0.000000
1/14/2011	12:08:28 PM	PHl3 MFC set to  0.000000
1/14/2011	12:08:28 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:08:28 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:08:28 PM	Tube furnace set to 0
1/14/2011	12:09:02 PM	Run aborted at 12:09 PM
1/14/2011	12:09:02 PM	Helium valve closed
1/14/2011	12:09:02 PM	H2 valve closed
1/14/2011	12:09:02 PM	BCl3 valve closed
1/14/2011	12:09:02 PM	PH3 valve closed
1/14/2011	12:09:02 PM	SiCl4 pre valve closed
1/14/2011	12:09:02 PM	SiCl4 post valve closed
1/14/2011	12:09:02 PM	Bypass valve closed
1/14/2011	12:09:02 PM	Main Vac valve closed
1/14/2011	12:09:02 PM	Bubbler valve closed
1/14/2011	12:09:02 PM	Helium MFC set to  0.000000
1/14/2011	12:09:02 PM	H2 MFC set to  0.000000
1/14/2011	12:09:02 PM	BCl3 MFC set to  0.000000
1/14/2011	12:09:02 PM	PHl3 MFC set to  0.000000
1/14/2011	12:09:02 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:09:03 PM	Tube furnace set to 0
1/14/2011	12:09:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	12:09:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	12:09:17 PM	Recipe started at 12:09 PM
1/14/2011	12:09:17 PM	Helium valve closed
1/14/2011	12:09:17 PM	H2 valve closed
1/14/2011	12:09:17 PM	BCl3 valve closed
1/14/2011	12:09:17 PM	PH3 valve closed
1/14/2011	12:09:17 PM	SiCl4 pre valve closed
1/14/2011	12:09:17 PM	SiCl4 post valve closed
1/14/2011	12:09:17 PM	Main Vac valve closed
1/14/2011	12:09:17 PM	Bubbler valve closed
1/14/2011	12:09:17 PM	Bypass valve opened
1/14/2011	12:09:17 PM	Helium MFC set to  0.000000
1/14/2011	12:09:17 PM	H2 MFC set to  0.000000
1/14/2011	12:09:17 PM	BCl3 MFC set to  0.000000
1/14/2011	12:09:17 PM	PHl3 MFC set to  0.000000
1/14/2011	12:09:17 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:09:17 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:09:17 PM	Tube furnace set to 0
1/14/2011	12:09:18 PM	Helium valve closed
1/14/2011	12:09:18 PM	H2 valve closed
1/14/2011	12:09:18 PM	BCl3 valve closed
1/14/2011	12:09:18 PM	PH3 valve closed
1/14/2011	12:09:18 PM	SiCl4 pre valve closed
1/14/2011	12:09:18 PM	SiCl4 post valve closed
1/14/2011	12:09:18 PM	Bubbler valve closed
1/14/2011	12:09:18 PM	Main Vac valve opened
1/14/2011	12:09:18 PM	Bypass valve opened
1/14/2011	12:09:18 PM	Helium MFC set to  0.000000
1/14/2011	12:09:18 PM	H2 MFC set to  0.000000
1/14/2011	12:09:18 PM	BCl3 MFC set to  0.000000
1/14/2011	12:09:18 PM	PHl3 MFC set to  0.000000
1/14/2011	12:09:18 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:09:18 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:09:18 PM	Tube furnace set to 0
1/14/2011	12:09:31 PM	H2 valve closed
1/14/2011	12:09:31 PM	BCl3 valve closed
1/14/2011	12:09:31 PM	PH3 valve closed
1/14/2011	12:09:31 PM	SiCl4 pre valve closed
1/14/2011	12:09:31 PM	SiCl4 post valve closed
1/14/2011	12:09:31 PM	Bubbler valve closed
1/14/2011	12:09:31 PM	Helium valve opened
1/14/2011	12:09:31 PM	Main Vac valve opened
1/14/2011	12:09:31 PM	Bypass valve opened
1/14/2011	12:09:31 PM	Helium MFC set to  100.000000
1/14/2011	12:09:31 PM	H2 MFC set to  0.000000
1/14/2011	12:09:31 PM	BCl3 MFC set to  0.000000
1/14/2011	12:09:31 PM	PHl3 MFC set to  0.000000
1/14/2011	12:09:31 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:09:31 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:09:31 PM	Tube furnace set to 0
1/14/2011	12:10:31 PM	Helium valve closed
1/14/2011	12:10:31 PM	H2 valve closed
1/14/2011	12:10:31 PM	BCl3 valve closed
1/14/2011	12:10:31 PM	PH3 valve closed
1/14/2011	12:10:31 PM	SiCl4 pre valve closed
1/14/2011	12:10:31 PM	SiCl4 post valve closed
1/14/2011	12:10:31 PM	Bubbler valve closed
1/14/2011	12:10:31 PM	Main Vac valve opened
1/14/2011	12:10:31 PM	Bypass valve opened
1/14/2011	12:10:31 PM	Helium MFC set to  0.000000
1/14/2011	12:10:31 PM	H2 MFC set to  0.000000
1/14/2011	12:10:31 PM	BCl3 MFC set to  0.000000
1/14/2011	12:10:31 PM	PHl3 MFC set to  0.000000
1/14/2011	12:10:31 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:10:31 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:10:31 PM	Tube furnace set to 0
1/14/2011	12:11:31 PM	H2 valve closed
1/14/2011	12:11:31 PM	BCl3 valve closed
1/14/2011	12:11:31 PM	PH3 valve closed
1/14/2011	12:11:31 PM	SiCl4 pre valve closed
1/14/2011	12:11:31 PM	SiCl4 post valve closed
1/14/2011	12:11:31 PM	Bubbler valve closed
1/14/2011	12:11:31 PM	Helium valve opened
1/14/2011	12:11:31 PM	Main Vac valve opened
1/14/2011	12:11:31 PM	Bypass valve opened
1/14/2011	12:11:31 PM	Helium MFC set to  100.000000
1/14/2011	12:11:31 PM	H2 MFC set to  0.000000
1/14/2011	12:11:31 PM	BCl3 MFC set to  0.000000
1/14/2011	12:11:31 PM	PHl3 MFC set to  0.000000
1/14/2011	12:11:31 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:11:31 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:11:31 PM	Tube furnace set to 0
1/14/2011	12:12:31 PM	Helium valve closed
1/14/2011	12:12:31 PM	H2 valve closed
1/14/2011	12:12:31 PM	BCl3 valve closed
1/14/2011	12:12:31 PM	PH3 valve closed
1/14/2011	12:12:31 PM	SiCl4 pre valve closed
1/14/2011	12:12:31 PM	SiCl4 post valve closed
1/14/2011	12:12:31 PM	Bubbler valve closed
1/14/2011	12:12:31 PM	Main Vac valve opened
1/14/2011	12:12:31 PM	Bypass valve opened
1/14/2011	12:12:31 PM	Helium MFC set to  0.000000
1/14/2011	12:12:31 PM	H2 MFC set to  0.000000
1/14/2011	12:12:31 PM	BCl3 MFC set to  0.000000
1/14/2011	12:12:31 PM	PHl3 MFC set to  0.000000
1/14/2011	12:12:31 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:12:31 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:12:31 PM	Tube furnace set to 0
1/14/2011	12:13:31 PM	H2 valve closed
1/14/2011	12:13:31 PM	BCl3 valve closed
1/14/2011	12:13:31 PM	PH3 valve closed
1/14/2011	12:13:31 PM	SiCl4 pre valve closed
1/14/2011	12:13:31 PM	SiCl4 post valve closed
1/14/2011	12:13:31 PM	Bubbler valve closed
1/14/2011	12:13:31 PM	Helium valve opened
1/14/2011	12:13:31 PM	Main Vac valve opened
1/14/2011	12:13:31 PM	Bypass valve opened
1/14/2011	12:13:31 PM	Helium MFC set to  100.000000
1/14/2011	12:13:31 PM	H2 MFC set to  0.000000
1/14/2011	12:13:31 PM	BCl3 MFC set to  0.000000
1/14/2011	12:13:31 PM	PHl3 MFC set to  0.000000
1/14/2011	12:13:31 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:13:31 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:13:32 PM	Tube furnace set to 0
1/14/2011	12:14:32 PM	Helium valve closed
1/14/2011	12:14:32 PM	H2 valve closed
1/14/2011	12:14:32 PM	BCl3 valve closed
1/14/2011	12:14:32 PM	PH3 valve closed
1/14/2011	12:14:32 PM	SiCl4 pre valve closed
1/14/2011	12:14:32 PM	SiCl4 post valve closed
1/14/2011	12:14:32 PM	Bubbler valve closed
1/14/2011	12:14:32 PM	Main Vac valve opened
1/14/2011	12:14:32 PM	Bypass valve opened
1/14/2011	12:14:32 PM	Helium MFC set to  0.000000
1/14/2011	12:14:32 PM	H2 MFC set to  0.000000
1/14/2011	12:14:32 PM	BCl3 MFC set to  0.000000
1/14/2011	12:14:32 PM	PHl3 MFC set to  0.000000
1/14/2011	12:14:32 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:14:32 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:14:32 PM	Tube furnace set to 0
1/14/2011	12:15:32 PM	H2 valve closed
1/14/2011	12:15:32 PM	BCl3 valve closed
1/14/2011	12:15:32 PM	PH3 valve closed
1/14/2011	12:15:32 PM	SiCl4 pre valve closed
1/14/2011	12:15:32 PM	SiCl4 post valve closed
1/14/2011	12:15:32 PM	Bubbler valve closed
1/14/2011	12:15:32 PM	Helium valve opened
1/14/2011	12:15:32 PM	Main Vac valve opened
1/14/2011	12:15:32 PM	Bypass valve opened
1/14/2011	12:15:32 PM	Helium MFC set to  100.000000
1/14/2011	12:15:32 PM	H2 MFC set to  0.000000
1/14/2011	12:15:32 PM	BCl3 MFC set to  0.000000
1/14/2011	12:15:32 PM	PHl3 MFC set to  0.000000
1/14/2011	12:15:32 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:15:32 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:15:32 PM	Tube furnace set to 0
1/14/2011	12:16:32 PM	Helium valve closed
1/14/2011	12:16:32 PM	H2 valve closed
1/14/2011	12:16:32 PM	BCl3 valve closed
1/14/2011	12:16:32 PM	PH3 valve closed
1/14/2011	12:16:32 PM	SiCl4 pre valve closed
1/14/2011	12:16:32 PM	SiCl4 post valve closed
1/14/2011	12:16:32 PM	Bubbler valve closed
1/14/2011	12:16:32 PM	Main Vac valve opened
1/14/2011	12:16:32 PM	Bypass valve opened
1/14/2011	12:16:32 PM	Helium MFC set to  0.000000
1/14/2011	12:16:32 PM	H2 MFC set to  0.000000
1/14/2011	12:16:32 PM	BCl3 MFC set to  0.000000
1/14/2011	12:16:32 PM	PHl3 MFC set to  0.000000
1/14/2011	12:16:32 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:16:32 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:16:32 PM	Tube furnace set to 0
1/14/2011	12:17:32 PM	H2 valve closed
1/14/2011	12:17:32 PM	BCl3 valve closed
1/14/2011	12:17:32 PM	PH3 valve closed
1/14/2011	12:17:32 PM	SiCl4 pre valve closed
1/14/2011	12:17:32 PM	SiCl4 post valve closed
1/14/2011	12:17:32 PM	Bubbler valve closed
1/14/2011	12:17:32 PM	Helium valve opened
1/14/2011	12:17:32 PM	Main Vac valve opened
1/14/2011	12:17:32 PM	Bypass valve opened
1/14/2011	12:17:32 PM	Helium MFC set to  100.000000
1/14/2011	12:17:32 PM	H2 MFC set to  0.000000
1/14/2011	12:17:32 PM	BCl3 MFC set to  0.000000
1/14/2011	12:17:32 PM	PHl3 MFC set to  0.000000
1/14/2011	12:17:32 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:17:32 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:17:32 PM	Tube furnace set to 0
1/14/2011	12:18:32 PM	Helium valve closed
1/14/2011	12:18:32 PM	H2 valve closed
1/14/2011	12:18:32 PM	BCl3 valve closed
1/14/2011	12:18:32 PM	PH3 valve closed
1/14/2011	12:18:33 PM	SiCl4 pre valve closed
1/14/2011	12:18:33 PM	SiCl4 post valve closed
1/14/2011	12:18:33 PM	Bubbler valve closed
1/14/2011	12:18:33 PM	Main Vac valve opened
1/14/2011	12:18:33 PM	Bypass valve opened
1/14/2011	12:18:33 PM	Helium MFC set to  0.000000
1/14/2011	12:18:33 PM	H2 MFC set to  0.000000
1/14/2011	12:18:33 PM	BCl3 MFC set to  0.000000
1/14/2011	12:18:33 PM	PHl3 MFC set to  0.000000
1/14/2011	12:18:33 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:18:33 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:18:33 PM	Tube furnace set to 0
1/14/2011	12:19:33 PM	H2 valve closed
1/14/2011	12:19:33 PM	BCl3 valve closed
1/14/2011	12:19:33 PM	PH3 valve closed
1/14/2011	12:19:33 PM	SiCl4 pre valve closed
1/14/2011	12:19:33 PM	SiCl4 post valve closed
1/14/2011	12:19:33 PM	Bubbler valve closed
1/14/2011	12:19:33 PM	Helium valve opened
1/14/2011	12:19:33 PM	Main Vac valve opened
1/14/2011	12:19:33 PM	Bypass valve opened
1/14/2011	12:19:33 PM	Helium MFC set to  100.000000
1/14/2011	12:19:33 PM	H2 MFC set to  0.000000
1/14/2011	12:19:33 PM	BCl3 MFC set to  0.000000
1/14/2011	12:19:33 PM	PHl3 MFC set to  0.000000
1/14/2011	12:19:33 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:19:33 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:19:33 PM	Tube furnace set to 0
1/14/2011	12:20:33 PM	Helium valve closed
1/14/2011	12:20:33 PM	H2 valve closed
1/14/2011	12:20:33 PM	BCl3 valve closed
1/14/2011	12:20:33 PM	PH3 valve closed
1/14/2011	12:20:33 PM	SiCl4 pre valve closed
1/14/2011	12:20:33 PM	SiCl4 post valve closed
1/14/2011	12:20:33 PM	Bubbler valve closed
1/14/2011	12:20:33 PM	Main Vac valve opened
1/14/2011	12:20:33 PM	Bypass valve opened
1/14/2011	12:20:33 PM	Helium MFC set to  0.000000
1/14/2011	12:20:33 PM	H2 MFC set to  0.000000
1/14/2011	12:20:33 PM	BCl3 MFC set to  0.000000
1/14/2011	12:20:33 PM	PHl3 MFC set to  0.000000
1/14/2011	12:20:33 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:20:33 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:20:33 PM	Tube furnace set to 0
1/14/2011	12:21:33 PM	H2 valve closed
1/14/2011	12:21:33 PM	BCl3 valve closed
1/14/2011	12:21:33 PM	PH3 valve closed
1/14/2011	12:21:33 PM	SiCl4 pre valve closed
1/14/2011	12:21:33 PM	SiCl4 post valve closed
1/14/2011	12:21:33 PM	Bubbler valve closed
1/14/2011	12:21:33 PM	Helium valve opened
1/14/2011	12:21:33 PM	Main Vac valve opened
1/14/2011	12:21:33 PM	Bypass valve opened
1/14/2011	12:21:33 PM	Helium MFC set to  100.000000
1/14/2011	12:21:33 PM	H2 MFC set to  0.000000
1/14/2011	12:21:33 PM	BCl3 MFC set to  0.000000
1/14/2011	12:21:33 PM	PHl3 MFC set to  0.000000
1/14/2011	12:21:33 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:21:33 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:21:33 PM	Tube furnace set to 0
1/14/2011	12:22:33 PM	Helium valve closed
1/14/2011	12:22:33 PM	H2 valve closed
1/14/2011	12:22:33 PM	BCl3 valve closed
1/14/2011	12:22:33 PM	PH3 valve closed
1/14/2011	12:22:33 PM	SiCl4 pre valve closed
1/14/2011	12:22:33 PM	SiCl4 post valve closed
1/14/2011	12:22:33 PM	Bubbler valve closed
1/14/2011	12:22:33 PM	Main Vac valve opened
1/14/2011	12:22:33 PM	Bypass valve opened
1/14/2011	12:22:33 PM	Helium MFC set to  0.000000
1/14/2011	12:22:33 PM	H2 MFC set to  0.000000
1/14/2011	12:22:33 PM	BCl3 MFC set to  0.000000
1/14/2011	12:22:33 PM	PHl3 MFC set to  0.000000
1/14/2011	12:22:33 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:22:33 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:22:33 PM	Tube furnace set to 0
1/14/2011	12:23:33 PM	H2 valve closed
1/14/2011	12:23:34 PM	BCl3 valve closed
1/14/2011	12:23:34 PM	PH3 valve closed
1/14/2011	12:23:34 PM	SiCl4 pre valve closed
1/14/2011	12:23:34 PM	SiCl4 post valve closed
1/14/2011	12:23:34 PM	Bubbler valve closed
1/14/2011	12:23:34 PM	Helium valve opened
1/14/2011	12:23:34 PM	Main Vac valve opened
1/14/2011	12:23:34 PM	Bypass valve opened
1/14/2011	12:23:34 PM	Helium MFC set to  100.000000
1/14/2011	12:23:34 PM	H2 MFC set to  0.000000
1/14/2011	12:23:34 PM	BCl3 MFC set to  0.000000
1/14/2011	12:23:34 PM	PHl3 MFC set to  0.000000
1/14/2011	12:23:34 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:23:34 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:23:34 PM	Tube furnace set to 0
1/14/2011	12:24:34 PM	Helium valve closed
1/14/2011	12:24:34 PM	H2 valve closed
1/14/2011	12:24:34 PM	BCl3 valve closed
1/14/2011	12:24:34 PM	PH3 valve closed
1/14/2011	12:24:34 PM	SiCl4 pre valve closed
1/14/2011	12:24:34 PM	SiCl4 post valve closed
1/14/2011	12:24:34 PM	Bubbler valve closed
1/14/2011	12:24:34 PM	Main Vac valve opened
1/14/2011	12:24:34 PM	Bypass valve opened
1/14/2011	12:24:34 PM	Helium MFC set to  0.000000
1/14/2011	12:24:34 PM	H2 MFC set to  0.000000
1/14/2011	12:24:34 PM	BCl3 MFC set to  0.000000
1/14/2011	12:24:34 PM	PHl3 MFC set to  0.000000
1/14/2011	12:24:34 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:24:34 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:24:34 PM	Tube furnace set to 0
1/14/2011	12:25:34 PM	H2 valve closed
1/14/2011	12:25:34 PM	BCl3 valve closed
1/14/2011	12:25:34 PM	PH3 valve closed
1/14/2011	12:25:34 PM	SiCl4 pre valve closed
1/14/2011	12:25:34 PM	SiCl4 post valve closed
1/14/2011	12:25:34 PM	Bubbler valve closed
1/14/2011	12:25:34 PM	Helium valve opened
1/14/2011	12:25:34 PM	Main Vac valve opened
1/14/2011	12:25:34 PM	Bypass valve opened
1/14/2011	12:25:34 PM	Helium MFC set to  100.000000
1/14/2011	12:25:34 PM	H2 MFC set to  0.000000
1/14/2011	12:25:34 PM	BCl3 MFC set to  0.000000
1/14/2011	12:25:34 PM	PHl3 MFC set to  0.000000
1/14/2011	12:25:34 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:25:34 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:25:34 PM	Tube furnace set to 0
1/14/2011	12:26:34 PM	Helium valve closed
1/14/2011	12:26:34 PM	H2 valve closed
1/14/2011	12:26:34 PM	BCl3 valve closed
1/14/2011	12:26:34 PM	PH3 valve closed
1/14/2011	12:26:34 PM	SiCl4 pre valve closed
1/14/2011	12:26:34 PM	SiCl4 post valve closed
1/14/2011	12:26:34 PM	Bubbler valve closed
1/14/2011	12:26:34 PM	Main Vac valve opened
1/14/2011	12:26:34 PM	Bypass valve opened
1/14/2011	12:26:34 PM	Helium MFC set to  0.000000
1/14/2011	12:26:34 PM	H2 MFC set to  0.000000
1/14/2011	12:26:34 PM	BCl3 MFC set to  0.000000
1/14/2011	12:26:34 PM	PHl3 MFC set to  0.000000
1/14/2011	12:26:34 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:26:34 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:26:34 PM	Tube furnace set to 0
1/14/2011	12:27:34 PM	H2 valve closed
1/14/2011	12:27:34 PM	BCl3 valve closed
1/14/2011	12:27:34 PM	PH3 valve closed
1/14/2011	12:27:34 PM	SiCl4 pre valve closed
1/14/2011	12:27:34 PM	SiCl4 post valve closed
1/14/2011	12:27:34 PM	Bubbler valve closed
1/14/2011	12:27:34 PM	Helium valve opened
1/14/2011	12:27:34 PM	Main Vac valve opened
1/14/2011	12:27:34 PM	Bypass valve opened
1/14/2011	12:27:34 PM	Helium MFC set to  100.000000
1/14/2011	12:27:34 PM	H2 MFC set to  0.000000
1/14/2011	12:27:34 PM	BCl3 MFC set to  0.000000
1/14/2011	12:27:34 PM	PHl3 MFC set to  0.000000
1/14/2011	12:27:34 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:27:34 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:27:34 PM	Tube furnace set to 0
1/14/2011	12:28:35 PM	Helium valve closed
1/14/2011	12:28:35 PM	H2 valve closed
1/14/2011	12:28:35 PM	BCl3 valve closed
1/14/2011	12:28:35 PM	PH3 valve closed
1/14/2011	12:28:35 PM	SiCl4 pre valve closed
1/14/2011	12:28:35 PM	SiCl4 post valve closed
1/14/2011	12:28:35 PM	Bubbler valve closed
1/14/2011	12:28:35 PM	Main Vac valve opened
1/14/2011	12:28:35 PM	Bypass valve opened
1/14/2011	12:28:35 PM	Helium MFC set to  0.000000
1/14/2011	12:28:35 PM	H2 MFC set to  0.000000
1/14/2011	12:28:35 PM	BCl3 MFC set to  0.000000
1/14/2011	12:28:35 PM	PHl3 MFC set to  0.000000
1/14/2011	12:28:35 PM	SiCl4 MFC set to  0.000000
1/14/2011	12:28:35 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	12:28:35 PM	Tube furnace set to 0
1/14/2011	12:28:36 PM	Run finished at 12:28 PM
1/14/2011	12:28:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	1:23:53 PM	Recipe started at 1:23 PM
1/14/2011	1:23:53 PM	Helium valve closed
1/14/2011	1:23:53 PM	BCl3 valve closed
1/14/2011	1:23:53 PM	PH3 valve closed
1/14/2011	1:23:53 PM	SiCl4 pre valve closed
1/14/2011	1:23:53 PM	SiCl4 post valve closed
1/14/2011	1:23:53 PM	Main Vac valve closed
1/14/2011	1:23:53 PM	Bypass valve closed
1/14/2011	1:23:53 PM	Bubbler valve closed
1/14/2011	1:23:53 PM	H2 valve opened
1/14/2011	1:23:53 PM	Helium MFC set to  0.000000
1/14/2011	1:23:53 PM	H2 MFC set to  500.000000
1/14/2011	1:23:53 PM	BCl3 MFC set to  0.000000
1/14/2011	1:23:53 PM	PHl3 MFC set to  0.000000
1/14/2011	1:23:53 PM	SiCl4 MFC set to  0.000000
1/14/2011	1:23:53 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:23:53 PM	Tube furnace set to 0
1/14/2011	1:25:11 PM	Helium valve closed
1/14/2011	1:25:11 PM	BCl3 valve closed
1/14/2011	1:25:11 PM	PH3 valve closed
1/14/2011	1:25:11 PM	SiCl4 pre valve closed
1/14/2011	1:25:11 PM	SiCl4 post valve closed
1/14/2011	1:25:11 PM	Main Vac valve closed
1/14/2011	1:25:11 PM	Bypass valve closed
1/14/2011	1:25:11 PM	H2 valve opened
1/14/2011	1:25:11 PM	Bubbler valve opened
1/14/2011	1:25:11 PM	Helium MFC set to  0.000000
1/14/2011	1:25:11 PM	H2 MFC set to  500.000000
1/14/2011	1:25:11 PM	BCl3 MFC set to  0.000000
1/14/2011	1:25:11 PM	PHl3 MFC set to  0.000000
1/14/2011	1:25:11 PM	SiCl4 MFC set to  0.000000
1/14/2011	1:25:11 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:25:11 PM	Tube furnace set to 1000
1/14/2011	1:45:11 PM	Helium valve closed
1/14/2011	1:45:11 PM	PH3 valve closed
1/14/2011	1:45:11 PM	Main Vac valve closed
1/14/2011	1:45:11 PM	Bypass valve closed
1/14/2011	1:45:11 PM	H2 valve opened
1/14/2011	1:45:11 PM	BCl3 valve opened
1/14/2011	1:45:11 PM	SiCl4 pre valve opened
1/14/2011	1:45:11 PM	SiCl4 post valve opened
1/14/2011	1:45:11 PM	Bubbler valve opened
1/14/2011	1:45:11 PM	Helium MFC set to  0.000000
1/14/2011	1:45:11 PM	H2 MFC set to  500.000000
1/14/2011	1:45:11 PM	BCl3 MFC set to  2.000000
1/14/2011	1:45:11 PM	PHl3 MFC set to  0.000000
1/14/2011	1:45:11 PM	SiCl4 MFC set to  50.000000
1/14/2011	1:45:11 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	1:45:11 PM	Tube furnace set to 1000
1/14/2011	2:05:11 PM	H2 valve closed
1/14/2011	2:05:11 PM	BCl3 valve closed
1/14/2011	2:05:11 PM	PH3 valve closed
1/14/2011	2:05:11 PM	SiCl4 pre valve closed
1/14/2011	2:05:11 PM	SiCl4 post valve closed
1/14/2011	2:05:11 PM	Main Vac valve closed
1/14/2011	2:05:11 PM	Bypass valve closed
1/14/2011	2:05:11 PM	Helium valve opened
1/14/2011	2:05:11 PM	Bubbler valve opened
1/14/2011	2:05:11 PM	Helium MFC set to  500.000000
1/14/2011	2:05:11 PM	H2 MFC set to  0.000000
1/14/2011	2:05:11 PM	BCl3 MFC set to  0.000000
1/14/2011	2:05:11 PM	PHl3 MFC set to  0.000000
1/14/2011	2:05:11 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:05:11 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:05:12 PM	Tube furnace set to 950
1/14/2011	2:10:12 PM	H2 valve closed
1/14/2011	2:10:12 PM	BCl3 valve closed
1/14/2011	2:10:12 PM	PH3 valve closed
1/14/2011	2:10:12 PM	SiCl4 pre valve closed
1/14/2011	2:10:12 PM	SiCl4 post valve closed
1/14/2011	2:10:12 PM	Main Vac valve closed
1/14/2011	2:10:12 PM	Bypass valve closed
1/14/2011	2:10:12 PM	Helium valve opened
1/14/2011	2:10:12 PM	Bubbler valve opened
1/14/2011	2:10:12 PM	Helium MFC set to  500.000000
1/14/2011	2:10:12 PM	H2 MFC set to  0.000000
1/14/2011	2:10:12 PM	BCl3 MFC set to  0.000000
1/14/2011	2:10:12 PM	PHl3 MFC set to  0.000000
1/14/2011	2:10:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:10:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:10:12 PM	Tube furnace set to 900
1/14/2011	2:15:12 PM	H2 valve closed
1/14/2011	2:15:12 PM	BCl3 valve closed
1/14/2011	2:15:12 PM	PH3 valve closed
1/14/2011	2:15:12 PM	SiCl4 pre valve closed
1/14/2011	2:15:12 PM	SiCl4 post valve closed
1/14/2011	2:15:12 PM	Main Vac valve closed
1/14/2011	2:15:12 PM	Bypass valve closed
1/14/2011	2:15:12 PM	Helium valve opened
1/14/2011	2:15:12 PM	Bubbler valve opened
1/14/2011	2:15:12 PM	Helium MFC set to  500.000000
1/14/2011	2:15:12 PM	H2 MFC set to  0.000000
1/14/2011	2:15:12 PM	BCl3 MFC set to  0.000000
1/14/2011	2:15:12 PM	PHl3 MFC set to  0.000000
1/14/2011	2:15:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:15:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:15:12 PM	Tube furnace set to 850
1/14/2011	2:20:12 PM	H2 valve closed
1/14/2011	2:20:12 PM	BCl3 valve closed
1/14/2011	2:20:12 PM	PH3 valve closed
1/14/2011	2:20:12 PM	SiCl4 pre valve closed
1/14/2011	2:20:12 PM	SiCl4 post valve closed
1/14/2011	2:20:12 PM	Main Vac valve closed
1/14/2011	2:20:12 PM	Bypass valve closed
1/14/2011	2:20:12 PM	Helium valve opened
1/14/2011	2:20:12 PM	Bubbler valve opened
1/14/2011	2:20:12 PM	Helium MFC set to  500.000000
1/14/2011	2:20:12 PM	H2 MFC set to  0.000000
1/14/2011	2:20:12 PM	BCl3 MFC set to  0.000000
1/14/2011	2:20:12 PM	PHl3 MFC set to  0.000000
1/14/2011	2:20:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:20:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:20:12 PM	Tube furnace set to 800
1/14/2011	2:25:12 PM	H2 valve closed
1/14/2011	2:25:12 PM	BCl3 valve closed
1/14/2011	2:25:12 PM	PH3 valve closed
1/14/2011	2:25:12 PM	SiCl4 pre valve closed
1/14/2011	2:25:12 PM	SiCl4 post valve closed
1/14/2011	2:25:12 PM	Main Vac valve closed
1/14/2011	2:25:12 PM	Bypass valve closed
1/14/2011	2:25:12 PM	Helium valve opened
1/14/2011	2:25:12 PM	Bubbler valve opened
1/14/2011	2:25:12 PM	Helium MFC set to  500.000000
1/14/2011	2:25:12 PM	H2 MFC set to  0.000000
1/14/2011	2:25:12 PM	BCl3 MFC set to  0.000000
1/14/2011	2:25:12 PM	PHl3 MFC set to  0.000000
1/14/2011	2:25:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:25:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:25:12 PM	Tube furnace set to 750
1/14/2011	2:30:12 PM	H2 valve closed
1/14/2011	2:30:12 PM	BCl3 valve closed
1/14/2011	2:30:12 PM	PH3 valve closed
1/14/2011	2:30:12 PM	SiCl4 pre valve closed
1/14/2011	2:30:12 PM	SiCl4 post valve closed
1/14/2011	2:30:12 PM	Main Vac valve closed
1/14/2011	2:30:12 PM	Bypass valve closed
1/14/2011	2:30:12 PM	Helium valve opened
1/14/2011	2:30:13 PM	Bubbler valve opened
1/14/2011	2:30:13 PM	Helium MFC set to  500.000000
1/14/2011	2:30:13 PM	H2 MFC set to  0.000000
1/14/2011	2:30:13 PM	BCl3 MFC set to  0.000000
1/14/2011	2:30:13 PM	PHl3 MFC set to  0.000000
1/14/2011	2:30:13 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:30:13 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:30:13 PM	Tube furnace set to 700
1/14/2011	2:32:03 PM	Run aborted at 2:32 PM
1/14/2011	2:32:03 PM	Helium valve closed
1/14/2011	2:32:03 PM	H2 valve closed
1/14/2011	2:32:03 PM	BCl3 valve closed
1/14/2011	2:32:03 PM	PH3 valve closed
1/14/2011	2:32:03 PM	SiCl4 pre valve closed
1/14/2011	2:32:03 PM	SiCl4 post valve closed
1/14/2011	2:32:03 PM	Bypass valve closed
1/14/2011	2:32:03 PM	Main Vac valve closed
1/14/2011	2:32:03 PM	Bubbler valve closed
1/14/2011	2:32:03 PM	Helium MFC set to  0.000000
1/14/2011	2:32:03 PM	H2 MFC set to  0.000000
1/14/2011	2:32:03 PM	BCl3 MFC set to  0.000000
1/14/2011	2:32:03 PM	PHl3 MFC set to  0.000000
1/14/2011	2:32:03 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:32:03 PM	Tube furnace set to 0
1/14/2011	2:39:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	2:39:05 PM	Recipe started at 2:39 PM
1/14/2011	2:39:05 PM	Helium valve closed
1/14/2011	2:39:05 PM	H2 valve closed
1/14/2011	2:39:05 PM	BCl3 valve closed
1/14/2011	2:39:05 PM	PH3 valve closed
1/14/2011	2:39:05 PM	SiCl4 pre valve closed
1/14/2011	2:39:05 PM	SiCl4 post valve closed
1/14/2011	2:39:05 PM	Main Vac valve closed
1/14/2011	2:39:05 PM	Bubbler valve closed
1/14/2011	2:39:05 PM	Bypass valve opened
1/14/2011	2:39:05 PM	Helium MFC set to  0.000000
1/14/2011	2:39:05 PM	H2 MFC set to  0.000000
1/14/2011	2:39:05 PM	BCl3 MFC set to  0.000000
1/14/2011	2:39:05 PM	PHl3 MFC set to  0.000000
1/14/2011	2:39:05 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:39:05 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:39:05 PM	Tube furnace set to 0
1/14/2011	2:39:34 PM	Helium valve closed
1/14/2011	2:39:34 PM	H2 valve closed
1/14/2011	2:39:34 PM	BCl3 valve closed
1/14/2011	2:39:34 PM	PH3 valve closed
1/14/2011	2:39:34 PM	SiCl4 pre valve closed
1/14/2011	2:39:34 PM	SiCl4 post valve closed
1/14/2011	2:39:34 PM	Bubbler valve closed
1/14/2011	2:39:34 PM	Main Vac valve opened
1/14/2011	2:39:34 PM	Bypass valve opened
1/14/2011	2:39:34 PM	Helium MFC set to  0.000000
1/14/2011	2:39:34 PM	H2 MFC set to  0.000000
1/14/2011	2:39:34 PM	BCl3 MFC set to  0.000000
1/14/2011	2:39:34 PM	PHl3 MFC set to  0.000000
1/14/2011	2:39:34 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:39:34 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:39:34 PM	Tube furnace set to 0
1/14/2011	2:39:35 PM	Run finished at 2:39 PM
1/14/2011	2:39:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	2:42:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	2:43:04 PM	Recipe started at 2:42 PM
1/14/2011	2:43:04 PM	Helium valve closed
1/14/2011	2:43:04 PM	H2 valve closed
1/14/2011	2:43:04 PM	BCl3 valve closed
1/14/2011	2:43:04 PM	PH3 valve closed
1/14/2011	2:43:04 PM	SiCl4 pre valve closed
1/14/2011	2:43:04 PM	SiCl4 post valve closed
1/14/2011	2:43:04 PM	Main Vac valve closed
1/14/2011	2:43:04 PM	Bubbler valve closed
1/14/2011	2:43:04 PM	Bypass valve opened
1/14/2011	2:43:04 PM	Helium MFC set to  0.000000
1/14/2011	2:43:04 PM	H2 MFC set to  0.000000
1/14/2011	2:43:04 PM	BCl3 MFC set to  0.000000
1/14/2011	2:43:04 PM	PHl3 MFC set to  0.000000
1/14/2011	2:43:04 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:43:04 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:43:05 PM	Tube furnace set to 0
1/14/2011	2:43:05 PM	Helium valve closed
1/14/2011	2:43:05 PM	H2 valve closed
1/14/2011	2:43:05 PM	BCl3 valve closed
1/14/2011	2:43:05 PM	PH3 valve closed
1/14/2011	2:43:05 PM	SiCl4 pre valve closed
1/14/2011	2:43:05 PM	SiCl4 post valve closed
1/14/2011	2:43:05 PM	Bubbler valve closed
1/14/2011	2:43:05 PM	Main Vac valve opened
1/14/2011	2:43:05 PM	Bypass valve opened
1/14/2011	2:43:05 PM	Helium MFC set to  0.000000
1/14/2011	2:43:05 PM	H2 MFC set to  0.000000
1/14/2011	2:43:05 PM	BCl3 MFC set to  0.000000
1/14/2011	2:43:05 PM	PHl3 MFC set to  0.000000
1/14/2011	2:43:05 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:43:05 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:43:05 PM	Tube furnace set to 0
1/14/2011	2:44:05 PM	H2 valve closed
1/14/2011	2:44:05 PM	BCl3 valve closed
1/14/2011	2:44:05 PM	PH3 valve closed
1/14/2011	2:44:05 PM	SiCl4 pre valve closed
1/14/2011	2:44:05 PM	SiCl4 post valve closed
1/14/2011	2:44:05 PM	Bubbler valve closed
1/14/2011	2:44:05 PM	Helium valve opened
1/14/2011	2:44:05 PM	Main Vac valve opened
1/14/2011	2:44:05 PM	Bypass valve opened
1/14/2011	2:44:05 PM	Helium MFC set to  100.000000
1/14/2011	2:44:05 PM	H2 MFC set to  0.000000
1/14/2011	2:44:05 PM	BCl3 MFC set to  0.000000
1/14/2011	2:44:05 PM	PHl3 MFC set to  0.000000
1/14/2011	2:44:05 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:44:05 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:44:05 PM	Tube furnace set to 0
1/14/2011	2:45:05 PM	Helium valve closed
1/14/2011	2:45:05 PM	H2 valve closed
1/14/2011	2:45:05 PM	BCl3 valve closed
1/14/2011	2:45:05 PM	PH3 valve closed
1/14/2011	2:45:05 PM	SiCl4 pre valve closed
1/14/2011	2:45:05 PM	SiCl4 post valve closed
1/14/2011	2:45:05 PM	Bubbler valve closed
1/14/2011	2:45:05 PM	Main Vac valve opened
1/14/2011	2:45:05 PM	Bypass valve opened
1/14/2011	2:45:05 PM	Helium MFC set to  0.000000
1/14/2011	2:45:05 PM	H2 MFC set to  0.000000
1/14/2011	2:45:05 PM	BCl3 MFC set to  0.000000
1/14/2011	2:45:05 PM	PHl3 MFC set to  0.000000
1/14/2011	2:45:05 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:45:05 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:45:05 PM	Tube furnace set to 0
1/14/2011	2:46:05 PM	H2 valve closed
1/14/2011	2:46:05 PM	BCl3 valve closed
1/14/2011	2:46:05 PM	PH3 valve closed
1/14/2011	2:46:05 PM	SiCl4 pre valve closed
1/14/2011	2:46:05 PM	SiCl4 post valve closed
1/14/2011	2:46:05 PM	Bubbler valve closed
1/14/2011	2:46:05 PM	Helium valve opened
1/14/2011	2:46:05 PM	Main Vac valve opened
1/14/2011	2:46:05 PM	Bypass valve opened
1/14/2011	2:46:05 PM	Helium MFC set to  100.000000
1/14/2011	2:46:05 PM	H2 MFC set to  0.000000
1/14/2011	2:46:05 PM	BCl3 MFC set to  0.000000
1/14/2011	2:46:05 PM	PHl3 MFC set to  0.000000
1/14/2011	2:46:05 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:46:05 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:46:06 PM	Tube furnace set to 0
1/14/2011	2:47:06 PM	Helium valve closed
1/14/2011	2:47:06 PM	H2 valve closed
1/14/2011	2:47:06 PM	BCl3 valve closed
1/14/2011	2:47:06 PM	PH3 valve closed
1/14/2011	2:47:06 PM	SiCl4 pre valve closed
1/14/2011	2:47:06 PM	SiCl4 post valve closed
1/14/2011	2:47:06 PM	Bubbler valve closed
1/14/2011	2:47:06 PM	Main Vac valve opened
1/14/2011	2:47:06 PM	Bypass valve opened
1/14/2011	2:47:06 PM	Helium MFC set to  0.000000
1/14/2011	2:47:06 PM	H2 MFC set to  0.000000
1/14/2011	2:47:06 PM	BCl3 MFC set to  0.000000
1/14/2011	2:47:06 PM	PHl3 MFC set to  0.000000
1/14/2011	2:47:06 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:47:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:47:06 PM	Tube furnace set to 0
1/14/2011	2:48:06 PM	H2 valve closed
1/14/2011	2:48:06 PM	BCl3 valve closed
1/14/2011	2:48:06 PM	PH3 valve closed
1/14/2011	2:48:06 PM	SiCl4 pre valve closed
1/14/2011	2:48:06 PM	SiCl4 post valve closed
1/14/2011	2:48:06 PM	Bubbler valve closed
1/14/2011	2:48:06 PM	Helium valve opened
1/14/2011	2:48:06 PM	Main Vac valve opened
1/14/2011	2:48:06 PM	Bypass valve opened
1/14/2011	2:48:06 PM	Helium MFC set to  100.000000
1/14/2011	2:48:06 PM	H2 MFC set to  0.000000
1/14/2011	2:48:06 PM	BCl3 MFC set to  0.000000
1/14/2011	2:48:06 PM	PHl3 MFC set to  0.000000
1/14/2011	2:48:06 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:48:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:48:06 PM	Tube furnace set to 0
1/14/2011	2:49:06 PM	Helium valve closed
1/14/2011	2:49:06 PM	H2 valve closed
1/14/2011	2:49:06 PM	BCl3 valve closed
1/14/2011	2:49:06 PM	PH3 valve closed
1/14/2011	2:49:06 PM	SiCl4 pre valve closed
1/14/2011	2:49:06 PM	SiCl4 post valve closed
1/14/2011	2:49:06 PM	Bubbler valve closed
1/14/2011	2:49:06 PM	Main Vac valve opened
1/14/2011	2:49:06 PM	Bypass valve opened
1/14/2011	2:49:06 PM	Helium MFC set to  0.000000
1/14/2011	2:49:06 PM	H2 MFC set to  0.000000
1/14/2011	2:49:06 PM	BCl3 MFC set to  0.000000
1/14/2011	2:49:06 PM	PHl3 MFC set to  0.000000
1/14/2011	2:49:06 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:49:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:49:06 PM	Tube furnace set to 0
1/14/2011	2:50:06 PM	H2 valve closed
1/14/2011	2:50:06 PM	BCl3 valve closed
1/14/2011	2:50:06 PM	PH3 valve closed
1/14/2011	2:50:06 PM	SiCl4 pre valve closed
1/14/2011	2:50:06 PM	SiCl4 post valve closed
1/14/2011	2:50:06 PM	Bubbler valve closed
1/14/2011	2:50:06 PM	Helium valve opened
1/14/2011	2:50:06 PM	Main Vac valve opened
1/14/2011	2:50:06 PM	Bypass valve opened
1/14/2011	2:50:06 PM	Helium MFC set to  100.000000
1/14/2011	2:50:06 PM	H2 MFC set to  0.000000
1/14/2011	2:50:06 PM	BCl3 MFC set to  0.000000
1/14/2011	2:50:06 PM	PHl3 MFC set to  0.000000
1/14/2011	2:50:06 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:50:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:50:06 PM	Tube furnace set to 0
1/14/2011	2:51:06 PM	Helium valve closed
1/14/2011	2:51:06 PM	H2 valve closed
1/14/2011	2:51:06 PM	BCl3 valve closed
1/14/2011	2:51:06 PM	PH3 valve closed
1/14/2011	2:51:06 PM	SiCl4 pre valve closed
1/14/2011	2:51:06 PM	SiCl4 post valve closed
1/14/2011	2:51:06 PM	Bubbler valve closed
1/14/2011	2:51:06 PM	Main Vac valve opened
1/14/2011	2:51:06 PM	Bypass valve opened
1/14/2011	2:51:06 PM	Helium MFC set to  0.000000
1/14/2011	2:51:06 PM	H2 MFC set to  0.000000
1/14/2011	2:51:06 PM	BCl3 MFC set to  0.000000
1/14/2011	2:51:06 PM	PHl3 MFC set to  0.000000
1/14/2011	2:51:06 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:51:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:51:07 PM	Tube furnace set to 0
1/14/2011	2:52:07 PM	H2 valve closed
1/14/2011	2:52:07 PM	BCl3 valve closed
1/14/2011	2:52:07 PM	PH3 valve closed
1/14/2011	2:52:07 PM	SiCl4 pre valve closed
1/14/2011	2:52:07 PM	SiCl4 post valve closed
1/14/2011	2:52:07 PM	Bubbler valve closed
1/14/2011	2:52:07 PM	Helium valve opened
1/14/2011	2:52:07 PM	Main Vac valve opened
1/14/2011	2:52:07 PM	Bypass valve opened
1/14/2011	2:52:07 PM	Helium MFC set to  100.000000
1/14/2011	2:52:07 PM	H2 MFC set to  0.000000
1/14/2011	2:52:07 PM	BCl3 MFC set to  0.000000
1/14/2011	2:52:07 PM	PHl3 MFC set to  0.000000
1/14/2011	2:52:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:52:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:52:07 PM	Tube furnace set to 0
1/14/2011	2:53:07 PM	Helium valve closed
1/14/2011	2:53:07 PM	H2 valve closed
1/14/2011	2:53:07 PM	BCl3 valve closed
1/14/2011	2:53:07 PM	PH3 valve closed
1/14/2011	2:53:07 PM	SiCl4 pre valve closed
1/14/2011	2:53:07 PM	SiCl4 post valve closed
1/14/2011	2:53:07 PM	Bubbler valve closed
1/14/2011	2:53:07 PM	Main Vac valve opened
1/14/2011	2:53:07 PM	Bypass valve opened
1/14/2011	2:53:07 PM	Helium MFC set to  0.000000
1/14/2011	2:53:07 PM	H2 MFC set to  0.000000
1/14/2011	2:53:07 PM	BCl3 MFC set to  0.000000
1/14/2011	2:53:07 PM	PHl3 MFC set to  0.000000
1/14/2011	2:53:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:53:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:53:07 PM	Tube furnace set to 0
1/14/2011	2:54:07 PM	H2 valve closed
1/14/2011	2:54:07 PM	BCl3 valve closed
1/14/2011	2:54:07 PM	PH3 valve closed
1/14/2011	2:54:07 PM	SiCl4 pre valve closed
1/14/2011	2:54:07 PM	SiCl4 post valve closed
1/14/2011	2:54:07 PM	Bubbler valve closed
1/14/2011	2:54:07 PM	Helium valve opened
1/14/2011	2:54:07 PM	Main Vac valve opened
1/14/2011	2:54:07 PM	Bypass valve opened
1/14/2011	2:54:07 PM	Helium MFC set to  100.000000
1/14/2011	2:54:07 PM	H2 MFC set to  0.000000
1/14/2011	2:54:07 PM	BCl3 MFC set to  0.000000
1/14/2011	2:54:07 PM	PHl3 MFC set to  0.000000
1/14/2011	2:54:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:54:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:54:07 PM	Tube furnace set to 0
1/14/2011	2:55:07 PM	Helium valve closed
1/14/2011	2:55:07 PM	H2 valve closed
1/14/2011	2:55:07 PM	BCl3 valve closed
1/14/2011	2:55:07 PM	PH3 valve closed
1/14/2011	2:55:07 PM	SiCl4 pre valve closed
1/14/2011	2:55:07 PM	SiCl4 post valve closed
1/14/2011	2:55:07 PM	Bubbler valve closed
1/14/2011	2:55:07 PM	Main Vac valve opened
1/14/2011	2:55:07 PM	Bypass valve opened
1/14/2011	2:55:07 PM	Helium MFC set to  0.000000
1/14/2011	2:55:07 PM	H2 MFC set to  0.000000
1/14/2011	2:55:07 PM	BCl3 MFC set to  0.000000
1/14/2011	2:55:07 PM	PHl3 MFC set to  0.000000
1/14/2011	2:55:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:55:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:55:07 PM	Tube furnace set to 0
1/14/2011	2:56:07 PM	H2 valve closed
1/14/2011	2:56:07 PM	BCl3 valve closed
1/14/2011	2:56:07 PM	PH3 valve closed
1/14/2011	2:56:07 PM	SiCl4 pre valve closed
1/14/2011	2:56:07 PM	SiCl4 post valve closed
1/14/2011	2:56:07 PM	Bubbler valve closed
1/14/2011	2:56:07 PM	Helium valve opened
1/14/2011	2:56:07 PM	Main Vac valve opened
1/14/2011	2:56:07 PM	Bypass valve opened
1/14/2011	2:56:07 PM	Helium MFC set to  100.000000
1/14/2011	2:56:07 PM	H2 MFC set to  0.000000
1/14/2011	2:56:07 PM	BCl3 MFC set to  0.000000
1/14/2011	2:56:07 PM	PHl3 MFC set to  0.000000
1/14/2011	2:56:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:56:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:56:08 PM	Tube furnace set to 0
1/14/2011	2:57:08 PM	Helium valve closed
1/14/2011	2:57:08 PM	H2 valve closed
1/14/2011	2:57:08 PM	BCl3 valve closed
1/14/2011	2:57:08 PM	PH3 valve closed
1/14/2011	2:57:08 PM	SiCl4 pre valve closed
1/14/2011	2:57:08 PM	SiCl4 post valve closed
1/14/2011	2:57:08 PM	Bubbler valve closed
1/14/2011	2:57:08 PM	Main Vac valve opened
1/14/2011	2:57:08 PM	Bypass valve opened
1/14/2011	2:57:08 PM	Helium MFC set to  0.000000
1/14/2011	2:57:08 PM	H2 MFC set to  0.000000
1/14/2011	2:57:08 PM	BCl3 MFC set to  0.000000
1/14/2011	2:57:08 PM	PHl3 MFC set to  0.000000
1/14/2011	2:57:08 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:57:08 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:57:08 PM	Tube furnace set to 0
1/14/2011	2:58:08 PM	H2 valve closed
1/14/2011	2:58:08 PM	BCl3 valve closed
1/14/2011	2:58:08 PM	PH3 valve closed
1/14/2011	2:58:08 PM	SiCl4 pre valve closed
1/14/2011	2:58:08 PM	SiCl4 post valve closed
1/14/2011	2:58:08 PM	Bubbler valve closed
1/14/2011	2:58:08 PM	Helium valve opened
1/14/2011	2:58:08 PM	Main Vac valve opened
1/14/2011	2:58:08 PM	Bypass valve opened
1/14/2011	2:58:08 PM	Helium MFC set to  100.000000
1/14/2011	2:58:08 PM	H2 MFC set to  0.000000
1/14/2011	2:58:08 PM	BCl3 MFC set to  0.000000
1/14/2011	2:58:08 PM	PHl3 MFC set to  0.000000
1/14/2011	2:58:08 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:58:08 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:58:08 PM	Tube furnace set to 0
1/14/2011	2:59:08 PM	Helium valve closed
1/14/2011	2:59:08 PM	H2 valve closed
1/14/2011	2:59:08 PM	BCl3 valve closed
1/14/2011	2:59:08 PM	PH3 valve closed
1/14/2011	2:59:08 PM	SiCl4 pre valve closed
1/14/2011	2:59:08 PM	SiCl4 post valve closed
1/14/2011	2:59:08 PM	Bubbler valve closed
1/14/2011	2:59:08 PM	Main Vac valve opened
1/14/2011	2:59:08 PM	Bypass valve opened
1/14/2011	2:59:08 PM	Helium MFC set to  0.000000
1/14/2011	2:59:08 PM	H2 MFC set to  0.000000
1/14/2011	2:59:08 PM	BCl3 MFC set to  0.000000
1/14/2011	2:59:08 PM	PHl3 MFC set to  0.000000
1/14/2011	2:59:08 PM	SiCl4 MFC set to  0.000000
1/14/2011	2:59:08 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	2:59:08 PM	Tube furnace set to 0
1/14/2011	3:00:08 PM	H2 valve closed
1/14/2011	3:00:08 PM	BCl3 valve closed
1/14/2011	3:00:08 PM	PH3 valve closed
1/14/2011	3:00:08 PM	SiCl4 pre valve closed
1/14/2011	3:00:08 PM	SiCl4 post valve closed
1/14/2011	3:00:08 PM	Bubbler valve closed
1/14/2011	3:00:08 PM	Helium valve opened
1/14/2011	3:00:08 PM	Main Vac valve opened
1/14/2011	3:00:08 PM	Bypass valve opened
1/14/2011	3:00:08 PM	Helium MFC set to  100.000000
1/14/2011	3:00:08 PM	H2 MFC set to  0.000000
1/14/2011	3:00:08 PM	BCl3 MFC set to  0.000000
1/14/2011	3:00:08 PM	PHl3 MFC set to  0.000000
1/14/2011	3:00:08 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:00:08 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:00:08 PM	Tube furnace set to 0
1/14/2011	3:01:08 PM	Helium valve closed
1/14/2011	3:01:08 PM	H2 valve closed
1/14/2011	3:01:08 PM	BCl3 valve closed
1/14/2011	3:01:08 PM	PH3 valve closed
1/14/2011	3:01:08 PM	SiCl4 pre valve closed
1/14/2011	3:01:08 PM	SiCl4 post valve closed
1/14/2011	3:01:08 PM	Bubbler valve closed
1/14/2011	3:01:08 PM	Main Vac valve opened
1/14/2011	3:01:08 PM	Bypass valve opened
1/14/2011	3:01:08 PM	Helium MFC set to  0.000000
1/14/2011	3:01:09 PM	H2 MFC set to  0.000000
1/14/2011	3:01:09 PM	BCl3 MFC set to  0.000000
1/14/2011	3:01:09 PM	PHl3 MFC set to  0.000000
1/14/2011	3:01:09 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:01:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:01:09 PM	Tube furnace set to 0
1/14/2011	3:02:09 PM	H2 valve closed
1/14/2011	3:02:09 PM	BCl3 valve closed
1/14/2011	3:02:09 PM	PH3 valve closed
1/14/2011	3:02:09 PM	SiCl4 pre valve closed
1/14/2011	3:02:09 PM	SiCl4 post valve closed
1/14/2011	3:02:09 PM	Bubbler valve closed
1/14/2011	3:02:09 PM	Helium valve opened
1/14/2011	3:02:09 PM	Main Vac valve opened
1/14/2011	3:02:09 PM	Bypass valve opened
1/14/2011	3:02:09 PM	Helium MFC set to  100.000000
1/14/2011	3:02:09 PM	H2 MFC set to  0.000000
1/14/2011	3:02:09 PM	BCl3 MFC set to  0.000000
1/14/2011	3:02:09 PM	PHl3 MFC set to  0.000000
1/14/2011	3:02:09 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:02:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:02:09 PM	Tube furnace set to 0
1/14/2011	3:03:09 PM	Helium valve closed
1/14/2011	3:03:09 PM	H2 valve closed
1/14/2011	3:03:09 PM	BCl3 valve closed
1/14/2011	3:03:09 PM	PH3 valve closed
1/14/2011	3:03:09 PM	SiCl4 pre valve closed
1/14/2011	3:03:09 PM	SiCl4 post valve closed
1/14/2011	3:03:09 PM	Bubbler valve closed
1/14/2011	3:03:09 PM	Main Vac valve opened
1/14/2011	3:03:09 PM	Bypass valve opened
1/14/2011	3:03:09 PM	Helium MFC set to  0.000000
1/14/2011	3:03:09 PM	H2 MFC set to  0.000000
1/14/2011	3:03:09 PM	BCl3 MFC set to  0.000000
1/14/2011	3:03:09 PM	PHl3 MFC set to  0.000000
1/14/2011	3:03:09 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:03:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:03:09 PM	Tube furnace set to 0
1/14/2011	3:03:10 PM	Run finished at 3:03 PM
1/14/2011	3:03:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	3:04:26 PM	Helium MFC set to  100.000000
1/14/2011	3:04:27 PM	Helium valve opened
1/14/2011	3:12:03 PM	Helium valve closed
1/14/2011	3:12:53 PM	Recipe started at 3:12 PM
1/14/2011	3:12:53 PM	Helium valve closed
1/14/2011	3:12:53 PM	BCl3 valve closed
1/14/2011	3:12:53 PM	PH3 valve closed
1/14/2011	3:12:53 PM	SiCl4 pre valve closed
1/14/2011	3:12:53 PM	SiCl4 post valve closed
1/14/2011	3:12:53 PM	Main Vac valve closed
1/14/2011	3:12:53 PM	Bypass valve closed
1/14/2011	3:12:53 PM	Bubbler valve closed
1/14/2011	3:12:53 PM	H2 valve opened
1/14/2011	3:12:53 PM	Helium MFC set to  0.000000
1/14/2011	3:12:53 PM	H2 MFC set to  500.000000
1/14/2011	3:12:53 PM	BCl3 MFC set to  0.000000
1/14/2011	3:12:53 PM	PHl3 MFC set to  0.000000
1/14/2011	3:12:53 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:12:53 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:12:53 PM	Tube furnace set to 0
1/14/2011	3:14:09 PM	Helium valve closed
1/14/2011	3:14:09 PM	BCl3 valve closed
1/14/2011	3:14:09 PM	PH3 valve closed
1/14/2011	3:14:09 PM	SiCl4 pre valve closed
1/14/2011	3:14:09 PM	SiCl4 post valve closed
1/14/2011	3:14:09 PM	Main Vac valve closed
1/14/2011	3:14:09 PM	Bypass valve closed
1/14/2011	3:14:09 PM	H2 valve opened
1/14/2011	3:14:09 PM	Bubbler valve opened
1/14/2011	3:14:09 PM	Helium MFC set to  0.000000
1/14/2011	3:14:09 PM	H2 MFC set to  500.000000
1/14/2011	3:14:09 PM	BCl3 MFC set to  0.000000
1/14/2011	3:14:09 PM	PHl3 MFC set to  0.000000
1/14/2011	3:14:09 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:14:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:14:09 PM	Tube furnace set to 1000
1/14/2011	3:34:09 PM	Helium valve closed
1/14/2011	3:34:09 PM	PH3 valve closed
1/14/2011	3:34:09 PM	Main Vac valve closed
1/14/2011	3:34:09 PM	Bypass valve closed
1/14/2011	3:34:09 PM	H2 valve opened
1/14/2011	3:34:09 PM	BCl3 valve opened
1/14/2011	3:34:09 PM	SiCl4 pre valve opened
1/14/2011	3:34:09 PM	SiCl4 post valve opened
1/14/2011	3:34:09 PM	Bubbler valve opened
1/14/2011	3:34:09 PM	Helium MFC set to  0.000000
1/14/2011	3:34:09 PM	H2 MFC set to  500.000000
1/14/2011	3:34:09 PM	BCl3 MFC set to  2.000000
1/14/2011	3:34:09 PM	PHl3 MFC set to  0.000000
1/14/2011	3:34:09 PM	SiCl4 MFC set to  50.000000
1/14/2011	3:34:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:34:09 PM	Tube furnace set to 1000
1/14/2011	3:54:09 PM	H2 valve closed
1/14/2011	3:54:09 PM	BCl3 valve closed
1/14/2011	3:54:09 PM	PH3 valve closed
1/14/2011	3:54:09 PM	SiCl4 pre valve closed
1/14/2011	3:54:09 PM	SiCl4 post valve closed
1/14/2011	3:54:09 PM	Main Vac valve closed
1/14/2011	3:54:09 PM	Bypass valve closed
1/14/2011	3:54:09 PM	Helium valve opened
1/14/2011	3:54:09 PM	Bubbler valve opened
1/14/2011	3:54:09 PM	Helium MFC set to  500.000000
1/14/2011	3:54:09 PM	H2 MFC set to  0.000000
1/14/2011	3:54:09 PM	BCl3 MFC set to  0.000000
1/14/2011	3:54:09 PM	PHl3 MFC set to  0.000000
1/14/2011	3:54:09 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:54:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:54:09 PM	Tube furnace set to 950
1/14/2011	3:59:09 PM	H2 valve closed
1/14/2011	3:59:09 PM	BCl3 valve closed
1/14/2011	3:59:09 PM	PH3 valve closed
1/14/2011	3:59:09 PM	SiCl4 pre valve closed
1/14/2011	3:59:09 PM	SiCl4 post valve closed
1/14/2011	3:59:09 PM	Main Vac valve closed
1/14/2011	3:59:09 PM	Bypass valve closed
1/14/2011	3:59:09 PM	Helium valve opened
1/14/2011	3:59:09 PM	Bubbler valve opened
1/14/2011	3:59:09 PM	Helium MFC set to  500.000000
1/14/2011	3:59:09 PM	H2 MFC set to  0.000000
1/14/2011	3:59:09 PM	BCl3 MFC set to  0.000000
1/14/2011	3:59:09 PM	PHl3 MFC set to  0.000000
1/14/2011	3:59:09 PM	SiCl4 MFC set to  0.000000
1/14/2011	3:59:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	3:59:09 PM	Tube furnace set to 900
1/14/2011	4:04:09 PM	H2 valve closed
1/14/2011	4:04:09 PM	BCl3 valve closed
1/14/2011	4:04:09 PM	PH3 valve closed
1/14/2011	4:04:09 PM	SiCl4 pre valve closed
1/14/2011	4:04:09 PM	SiCl4 post valve closed
1/14/2011	4:04:09 PM	Main Vac valve closed
1/14/2011	4:04:09 PM	Bypass valve closed
1/14/2011	4:04:09 PM	Helium valve opened
1/14/2011	4:04:09 PM	Bubbler valve opened
1/14/2011	4:04:09 PM	Helium MFC set to  500.000000
1/14/2011	4:04:09 PM	H2 MFC set to  0.000000
1/14/2011	4:04:09 PM	BCl3 MFC set to  0.000000
1/14/2011	4:04:09 PM	PHl3 MFC set to  0.000000
1/14/2011	4:04:09 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:04:09 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:04:09 PM	Tube furnace set to 850
1/14/2011	4:09:10 PM	H2 valve closed
1/14/2011	4:09:10 PM	BCl3 valve closed
1/14/2011	4:09:10 PM	PH3 valve closed
1/14/2011	4:09:10 PM	SiCl4 pre valve closed
1/14/2011	4:09:10 PM	SiCl4 post valve closed
1/14/2011	4:09:10 PM	Main Vac valve closed
1/14/2011	4:09:10 PM	Bypass valve closed
1/14/2011	4:09:10 PM	Helium valve opened
1/14/2011	4:09:10 PM	Bubbler valve opened
1/14/2011	4:09:10 PM	Helium MFC set to  500.000000
1/14/2011	4:09:10 PM	H2 MFC set to  0.000000
1/14/2011	4:09:10 PM	BCl3 MFC set to  0.000000
1/14/2011	4:09:10 PM	PHl3 MFC set to  0.000000
1/14/2011	4:09:10 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:09:10 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:09:10 PM	Tube furnace set to 800
1/14/2011	4:14:10 PM	H2 valve closed
1/14/2011	4:14:10 PM	BCl3 valve closed
1/14/2011	4:14:10 PM	PH3 valve closed
1/14/2011	4:14:10 PM	SiCl4 pre valve closed
1/14/2011	4:14:10 PM	SiCl4 post valve closed
1/14/2011	4:14:10 PM	Main Vac valve closed
1/14/2011	4:14:10 PM	Bypass valve closed
1/14/2011	4:14:10 PM	Helium valve opened
1/14/2011	4:14:10 PM	Bubbler valve opened
1/14/2011	4:14:10 PM	Helium MFC set to  500.000000
1/14/2011	4:14:10 PM	H2 MFC set to  0.000000
1/14/2011	4:14:10 PM	BCl3 MFC set to  0.000000
1/14/2011	4:14:10 PM	PHl3 MFC set to  0.000000
1/14/2011	4:14:10 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:14:10 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:14:10 PM	Tube furnace set to 750
1/14/2011	4:19:10 PM	H2 valve closed
1/14/2011	4:19:10 PM	BCl3 valve closed
1/14/2011	4:19:10 PM	PH3 valve closed
1/14/2011	4:19:10 PM	SiCl4 pre valve closed
1/14/2011	4:19:10 PM	SiCl4 post valve closed
1/14/2011	4:19:10 PM	Main Vac valve closed
1/14/2011	4:19:10 PM	Bypass valve closed
1/14/2011	4:19:10 PM	Helium valve opened
1/14/2011	4:19:10 PM	Bubbler valve opened
1/14/2011	4:19:10 PM	Helium MFC set to  500.000000
1/14/2011	4:19:10 PM	H2 MFC set to  0.000000
1/14/2011	4:19:10 PM	BCl3 MFC set to  0.000000
1/14/2011	4:19:10 PM	PHl3 MFC set to  0.000000
1/14/2011	4:19:10 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:19:10 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:19:10 PM	Tube furnace set to 700
1/14/2011	4:24:10 PM	H2 valve closed
1/14/2011	4:24:10 PM	BCl3 valve closed
1/14/2011	4:24:10 PM	PH3 valve closed
1/14/2011	4:24:10 PM	SiCl4 pre valve closed
1/14/2011	4:24:10 PM	SiCl4 post valve closed
1/14/2011	4:24:10 PM	Main Vac valve closed
1/14/2011	4:24:10 PM	Bypass valve closed
1/14/2011	4:24:10 PM	Helium valve opened
1/14/2011	4:24:10 PM	Bubbler valve opened
1/14/2011	4:24:10 PM	Helium MFC set to  500.000000
1/14/2011	4:24:10 PM	H2 MFC set to  0.000000
1/14/2011	4:24:10 PM	BCl3 MFC set to  0.000000
1/14/2011	4:24:10 PM	PHl3 MFC set to  0.000000
1/14/2011	4:24:10 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:24:10 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:24:10 PM	Tube furnace set to 0
1/14/2011	4:33:21 PM	Helium valve closed
1/14/2011	4:33:21 PM	H2 valve closed
1/14/2011	4:33:21 PM	BCl3 valve closed
1/14/2011	4:33:21 PM	PH3 valve closed
1/14/2011	4:33:21 PM	SiCl4 pre valve closed
1/14/2011	4:33:21 PM	SiCl4 post valve closed
1/14/2011	4:33:21 PM	Main Vac valve closed
1/14/2011	4:33:21 PM	Bubbler valve closed
1/14/2011	4:33:21 PM	Bypass valve closed
1/14/2011	4:33:21 PM	Helium MFC set to  0.000000
1/14/2011	4:33:21 PM	H2 MFC set to  0.000000
1/14/2011	4:33:21 PM	BCl3 MFC set to  0.000000
1/14/2011	4:33:21 PM	PHl3 MFC set to  0.000000
1/14/2011	4:33:21 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:33:21 PM	Bypass solenoid MFC set to  760.000000
1/14/2011	4:33:21 PM	Tube furnace set to 0
1/14/2011	4:33:21 PM	Baratron reads 744.380805 Torr and NaOH valve is open.  Emergency exit.
1/14/2011	4:33:36 PM	Run aborted at 4:33 PM
1/14/2011	4:36:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	4:36:53 PM	Recipe started at 4:36 PM
1/14/2011	4:36:53 PM	Helium valve closed
1/14/2011	4:36:53 PM	H2 valve closed
1/14/2011	4:36:53 PM	BCl3 valve closed
1/14/2011	4:36:53 PM	PH3 valve closed
1/14/2011	4:36:53 PM	SiCl4 pre valve closed
1/14/2011	4:36:53 PM	SiCl4 post valve closed
1/14/2011	4:36:53 PM	Main Vac valve closed
1/14/2011	4:36:53 PM	Bubbler valve closed
1/14/2011	4:36:53 PM	Bypass valve opened
1/14/2011	4:36:53 PM	Helium MFC set to  0.000000
1/14/2011	4:36:53 PM	H2 MFC set to  0.000000
1/14/2011	4:36:53 PM	BCl3 MFC set to  0.000000
1/14/2011	4:36:53 PM	PHl3 MFC set to  0.000000
1/14/2011	4:36:53 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:36:53 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:36:53 PM	Tube furnace set to 0
1/14/2011	4:37:23 PM	Helium valve closed
1/14/2011	4:37:23 PM	H2 valve closed
1/14/2011	4:37:23 PM	BCl3 valve closed
1/14/2011	4:37:23 PM	PH3 valve closed
1/14/2011	4:37:23 PM	SiCl4 pre valve closed
1/14/2011	4:37:23 PM	SiCl4 post valve closed
1/14/2011	4:37:23 PM	Bubbler valve closed
1/14/2011	4:37:23 PM	Main Vac valve opened
1/14/2011	4:37:23 PM	Bypass valve opened
1/14/2011	4:37:23 PM	Helium MFC set to  0.000000
1/14/2011	4:37:23 PM	H2 MFC set to  0.000000
1/14/2011	4:37:23 PM	BCl3 MFC set to  0.000000
1/14/2011	4:37:23 PM	PHl3 MFC set to  0.000000
1/14/2011	4:37:23 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:37:23 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:37:23 PM	Tube furnace set to 0
1/14/2011	4:37:23 PM	Run finished at 4:37 PM
1/14/2011	4:37:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	4:40:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	4:41:10 PM	Recipe started at 4:41 PM
1/14/2011	4:41:10 PM	Helium valve closed
1/14/2011	4:41:10 PM	H2 valve closed
1/14/2011	4:41:10 PM	BCl3 valve closed
1/14/2011	4:41:10 PM	PH3 valve closed
1/14/2011	4:41:10 PM	SiCl4 pre valve closed
1/14/2011	4:41:10 PM	SiCl4 post valve closed
1/14/2011	4:41:10 PM	Main Vac valve closed
1/14/2011	4:41:10 PM	Bubbler valve closed
1/14/2011	4:41:10 PM	Bypass valve opened
1/14/2011	4:41:10 PM	Helium MFC set to  0.000000
1/14/2011	4:41:10 PM	H2 MFC set to  0.000000
1/14/2011	4:41:10 PM	BCl3 MFC set to  0.000000
1/14/2011	4:41:10 PM	PHl3 MFC set to  0.000000
1/14/2011	4:41:10 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:41:10 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:41:10 PM	Tube furnace set to 0
1/14/2011	4:41:11 PM	Helium valve closed
1/14/2011	4:41:11 PM	H2 valve closed
1/14/2011	4:41:11 PM	BCl3 valve closed
1/14/2011	4:41:11 PM	PH3 valve closed
1/14/2011	4:41:11 PM	SiCl4 pre valve closed
1/14/2011	4:41:11 PM	SiCl4 post valve closed
1/14/2011	4:41:11 PM	Bubbler valve closed
1/14/2011	4:41:11 PM	Main Vac valve opened
1/14/2011	4:41:11 PM	Bypass valve opened
1/14/2011	4:41:11 PM	Helium MFC set to  0.000000
1/14/2011	4:41:11 PM	H2 MFC set to  0.000000
1/14/2011	4:41:11 PM	BCl3 MFC set to  0.000000
1/14/2011	4:41:11 PM	PHl3 MFC set to  0.000000
1/14/2011	4:41:11 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:41:11 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:41:11 PM	Tube furnace set to 0
1/14/2011	4:42:11 PM	H2 valve closed
1/14/2011	4:42:11 PM	BCl3 valve closed
1/14/2011	4:42:11 PM	PH3 valve closed
1/14/2011	4:42:11 PM	SiCl4 pre valve closed
1/14/2011	4:42:11 PM	SiCl4 post valve closed
1/14/2011	4:42:11 PM	Bubbler valve closed
1/14/2011	4:42:11 PM	Helium valve opened
1/14/2011	4:42:11 PM	Main Vac valve opened
1/14/2011	4:42:11 PM	Bypass valve opened
1/14/2011	4:42:11 PM	Helium MFC set to  100.000000
1/14/2011	4:42:11 PM	H2 MFC set to  0.000000
1/14/2011	4:42:11 PM	BCl3 MFC set to  0.000000
1/14/2011	4:42:11 PM	PHl3 MFC set to  0.000000
1/14/2011	4:42:11 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:42:11 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:42:11 PM	Tube furnace set to 0
1/14/2011	4:43:11 PM	Helium valve closed
1/14/2011	4:43:11 PM	H2 valve closed
1/14/2011	4:43:11 PM	BCl3 valve closed
1/14/2011	4:43:11 PM	PH3 valve closed
1/14/2011	4:43:11 PM	SiCl4 pre valve closed
1/14/2011	4:43:11 PM	SiCl4 post valve closed
1/14/2011	4:43:11 PM	Bubbler valve closed
1/14/2011	4:43:11 PM	Main Vac valve opened
1/14/2011	4:43:11 PM	Bypass valve opened
1/14/2011	4:43:11 PM	Helium MFC set to  0.000000
1/14/2011	4:43:11 PM	H2 MFC set to  0.000000
1/14/2011	4:43:11 PM	BCl3 MFC set to  0.000000
1/14/2011	4:43:11 PM	PHl3 MFC set to  0.000000
1/14/2011	4:43:11 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:43:11 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:43:11 PM	Tube furnace set to 0
1/14/2011	4:44:12 PM	H2 valve closed
1/14/2011	4:44:12 PM	BCl3 valve closed
1/14/2011	4:44:12 PM	PH3 valve closed
1/14/2011	4:44:12 PM	SiCl4 pre valve closed
1/14/2011	4:44:12 PM	SiCl4 post valve closed
1/14/2011	4:44:12 PM	Bubbler valve closed
1/14/2011	4:44:12 PM	Helium valve opened
1/14/2011	4:44:12 PM	Main Vac valve opened
1/14/2011	4:44:12 PM	Bypass valve opened
1/14/2011	4:44:12 PM	Helium MFC set to  100.000000
1/14/2011	4:44:12 PM	H2 MFC set to  0.000000
1/14/2011	4:44:12 PM	BCl3 MFC set to  0.000000
1/14/2011	4:44:12 PM	PHl3 MFC set to  0.000000
1/14/2011	4:44:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:44:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:44:12 PM	Tube furnace set to 0
1/14/2011	4:45:12 PM	Helium valve closed
1/14/2011	4:45:12 PM	H2 valve closed
1/14/2011	4:45:12 PM	BCl3 valve closed
1/14/2011	4:45:12 PM	PH3 valve closed
1/14/2011	4:45:12 PM	SiCl4 pre valve closed
1/14/2011	4:45:12 PM	SiCl4 post valve closed
1/14/2011	4:45:12 PM	Bubbler valve closed
1/14/2011	4:45:12 PM	Main Vac valve opened
1/14/2011	4:45:12 PM	Bypass valve opened
1/14/2011	4:45:12 PM	Helium MFC set to  0.000000
1/14/2011	4:45:12 PM	H2 MFC set to  0.000000
1/14/2011	4:45:12 PM	BCl3 MFC set to  0.000000
1/14/2011	4:45:12 PM	PHl3 MFC set to  0.000000
1/14/2011	4:45:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:45:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:45:12 PM	Tube furnace set to 0
1/14/2011	4:46:12 PM	H2 valve closed
1/14/2011	4:46:12 PM	BCl3 valve closed
1/14/2011	4:46:12 PM	PH3 valve closed
1/14/2011	4:46:12 PM	SiCl4 pre valve closed
1/14/2011	4:46:12 PM	SiCl4 post valve closed
1/14/2011	4:46:12 PM	Bubbler valve closed
1/14/2011	4:46:12 PM	Helium valve opened
1/14/2011	4:46:12 PM	Main Vac valve opened
1/14/2011	4:46:12 PM	Bypass valve opened
1/14/2011	4:46:12 PM	Helium MFC set to  100.000000
1/14/2011	4:46:12 PM	H2 MFC set to  0.000000
1/14/2011	4:46:12 PM	BCl3 MFC set to  0.000000
1/14/2011	4:46:12 PM	PHl3 MFC set to  0.000000
1/14/2011	4:46:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:46:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:46:12 PM	Tube furnace set to 0
1/14/2011	4:47:12 PM	Helium valve closed
1/14/2011	4:47:12 PM	H2 valve closed
1/14/2011	4:47:12 PM	BCl3 valve closed
1/14/2011	4:47:12 PM	PH3 valve closed
1/14/2011	4:47:12 PM	SiCl4 pre valve closed
1/14/2011	4:47:12 PM	SiCl4 post valve closed
1/14/2011	4:47:12 PM	Bubbler valve closed
1/14/2011	4:47:12 PM	Main Vac valve opened
1/14/2011	4:47:12 PM	Bypass valve opened
1/14/2011	4:47:12 PM	Helium MFC set to  0.000000
1/14/2011	4:47:12 PM	H2 MFC set to  0.000000
1/14/2011	4:47:12 PM	BCl3 MFC set to  0.000000
1/14/2011	4:47:12 PM	PHl3 MFC set to  0.000000
1/14/2011	4:47:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:47:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:47:12 PM	Tube furnace set to 0
1/14/2011	4:48:12 PM	H2 valve closed
1/14/2011	4:48:12 PM	BCl3 valve closed
1/14/2011	4:48:12 PM	PH3 valve closed
1/14/2011	4:48:12 PM	SiCl4 pre valve closed
1/14/2011	4:48:12 PM	SiCl4 post valve closed
1/14/2011	4:48:12 PM	Bubbler valve closed
1/14/2011	4:48:12 PM	Helium valve opened
1/14/2011	4:48:12 PM	Main Vac valve opened
1/14/2011	4:48:12 PM	Bypass valve opened
1/14/2011	4:48:12 PM	Helium MFC set to  100.000000
1/14/2011	4:48:12 PM	H2 MFC set to  0.000000
1/14/2011	4:48:12 PM	BCl3 MFC set to  0.000000
1/14/2011	4:48:12 PM	PHl3 MFC set to  0.000000
1/14/2011	4:48:12 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:48:12 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:48:13 PM	Tube furnace set to 0
1/14/2011	4:49:13 PM	Helium valve closed
1/14/2011	4:49:13 PM	H2 valve closed
1/14/2011	4:49:13 PM	BCl3 valve closed
1/14/2011	4:49:13 PM	PH3 valve closed
1/14/2011	4:49:13 PM	SiCl4 pre valve closed
1/14/2011	4:49:13 PM	SiCl4 post valve closed
1/14/2011	4:49:13 PM	Bubbler valve closed
1/14/2011	4:49:13 PM	Main Vac valve opened
1/14/2011	4:49:13 PM	Bypass valve opened
1/14/2011	4:49:13 PM	Helium MFC set to  0.000000
1/14/2011	4:49:13 PM	H2 MFC set to  0.000000
1/14/2011	4:49:13 PM	BCl3 MFC set to  0.000000
1/14/2011	4:49:13 PM	PHl3 MFC set to  0.000000
1/14/2011	4:49:13 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:49:13 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:49:13 PM	Tube furnace set to 0
1/14/2011	4:50:13 PM	H2 valve closed
1/14/2011	4:50:13 PM	BCl3 valve closed
1/14/2011	4:50:13 PM	PH3 valve closed
1/14/2011	4:50:13 PM	SiCl4 pre valve closed
1/14/2011	4:50:13 PM	SiCl4 post valve closed
1/14/2011	4:50:13 PM	Bubbler valve closed
1/14/2011	4:50:13 PM	Helium valve opened
1/14/2011	4:50:13 PM	Main Vac valve opened
1/14/2011	4:50:13 PM	Bypass valve opened
1/14/2011	4:50:13 PM	Helium MFC set to  100.000000
1/14/2011	4:50:13 PM	H2 MFC set to  0.000000
1/14/2011	4:50:13 PM	BCl3 MFC set to  0.000000
1/14/2011	4:50:13 PM	PHl3 MFC set to  0.000000
1/14/2011	4:50:13 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:50:13 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:50:13 PM	Tube furnace set to 0
1/14/2011	4:51:13 PM	Helium valve closed
1/14/2011	4:51:13 PM	H2 valve closed
1/14/2011	4:51:13 PM	BCl3 valve closed
1/14/2011	4:51:13 PM	PH3 valve closed
1/14/2011	4:51:13 PM	SiCl4 pre valve closed
1/14/2011	4:51:13 PM	SiCl4 post valve closed
1/14/2011	4:51:13 PM	Bubbler valve closed
1/14/2011	4:51:13 PM	Main Vac valve opened
1/14/2011	4:51:13 PM	Bypass valve opened
1/14/2011	4:51:13 PM	Helium MFC set to  0.000000
1/14/2011	4:51:13 PM	H2 MFC set to  0.000000
1/14/2011	4:51:13 PM	BCl3 MFC set to  0.000000
1/14/2011	4:51:13 PM	PHl3 MFC set to  0.000000
1/14/2011	4:51:13 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:51:13 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:51:13 PM	Tube furnace set to 0
1/14/2011	4:52:13 PM	H2 valve closed
1/14/2011	4:52:13 PM	BCl3 valve closed
1/14/2011	4:52:13 PM	PH3 valve closed
1/14/2011	4:52:13 PM	SiCl4 pre valve closed
1/14/2011	4:52:13 PM	SiCl4 post valve closed
1/14/2011	4:52:13 PM	Bubbler valve closed
1/14/2011	4:52:13 PM	Helium valve opened
1/14/2011	4:52:13 PM	Main Vac valve opened
1/14/2011	4:52:13 PM	Bypass valve opened
1/14/2011	4:52:13 PM	Helium MFC set to  100.000000
1/14/2011	4:52:13 PM	H2 MFC set to  0.000000
1/14/2011	4:52:13 PM	BCl3 MFC set to  0.000000
1/14/2011	4:52:13 PM	PHl3 MFC set to  0.000000
1/14/2011	4:52:13 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:52:13 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:52:13 PM	Tube furnace set to 0
1/14/2011	4:53:13 PM	Helium valve closed
1/14/2011	4:53:13 PM	H2 valve closed
1/14/2011	4:53:13 PM	BCl3 valve closed
1/14/2011	4:53:13 PM	PH3 valve closed
1/14/2011	4:53:13 PM	SiCl4 pre valve closed
1/14/2011	4:53:13 PM	SiCl4 post valve closed
1/14/2011	4:53:13 PM	Bubbler valve closed
1/14/2011	4:53:13 PM	Main Vac valve opened
1/14/2011	4:53:13 PM	Bypass valve opened
1/14/2011	4:53:13 PM	Helium MFC set to  0.000000
1/14/2011	4:53:13 PM	H2 MFC set to  0.000000
1/14/2011	4:53:13 PM	BCl3 MFC set to  0.000000
1/14/2011	4:53:13 PM	PHl3 MFC set to  0.000000
1/14/2011	4:53:13 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:53:13 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:53:14 PM	Tube furnace set to 0
1/14/2011	4:54:14 PM	H2 valve closed
1/14/2011	4:54:14 PM	BCl3 valve closed
1/14/2011	4:54:14 PM	PH3 valve closed
1/14/2011	4:54:14 PM	SiCl4 pre valve closed
1/14/2011	4:54:14 PM	SiCl4 post valve closed
1/14/2011	4:54:14 PM	Bubbler valve closed
1/14/2011	4:54:14 PM	Helium valve opened
1/14/2011	4:54:14 PM	Main Vac valve opened
1/14/2011	4:54:14 PM	Bypass valve opened
1/14/2011	4:54:14 PM	Helium MFC set to  100.000000
1/14/2011	4:54:14 PM	H2 MFC set to  0.000000
1/14/2011	4:54:14 PM	BCl3 MFC set to  0.000000
1/14/2011	4:54:14 PM	PHl3 MFC set to  0.000000
1/14/2011	4:54:14 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:54:14 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:54:14 PM	Tube furnace set to 0
1/14/2011	4:55:14 PM	Helium valve closed
1/14/2011	4:55:14 PM	H2 valve closed
1/14/2011	4:55:14 PM	BCl3 valve closed
1/14/2011	4:55:14 PM	PH3 valve closed
1/14/2011	4:55:14 PM	SiCl4 pre valve closed
1/14/2011	4:55:14 PM	SiCl4 post valve closed
1/14/2011	4:55:14 PM	Bubbler valve closed
1/14/2011	4:55:14 PM	Main Vac valve opened
1/14/2011	4:55:14 PM	Bypass valve opened
1/14/2011	4:55:14 PM	Helium MFC set to  0.000000
1/14/2011	4:55:14 PM	H2 MFC set to  0.000000
1/14/2011	4:55:14 PM	BCl3 MFC set to  0.000000
1/14/2011	4:55:14 PM	PHl3 MFC set to  0.000000
1/14/2011	4:55:14 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:55:14 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:55:14 PM	Tube furnace set to 0
1/14/2011	4:56:14 PM	H2 valve closed
1/14/2011	4:56:14 PM	BCl3 valve closed
1/14/2011	4:56:14 PM	PH3 valve closed
1/14/2011	4:56:14 PM	SiCl4 pre valve closed
1/14/2011	4:56:14 PM	SiCl4 post valve closed
1/14/2011	4:56:14 PM	Bubbler valve closed
1/14/2011	4:56:14 PM	Helium valve opened
1/14/2011	4:56:14 PM	Main Vac valve opened
1/14/2011	4:56:14 PM	Bypass valve opened
1/14/2011	4:56:14 PM	Helium MFC set to  100.000000
1/14/2011	4:56:14 PM	H2 MFC set to  0.000000
1/14/2011	4:56:14 PM	BCl3 MFC set to  0.000000
1/14/2011	4:56:14 PM	PHl3 MFC set to  0.000000
1/14/2011	4:56:14 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:56:14 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:56:14 PM	Tube furnace set to 0
1/14/2011	4:57:14 PM	Helium valve closed
1/14/2011	4:57:14 PM	H2 valve closed
1/14/2011	4:57:14 PM	BCl3 valve closed
1/14/2011	4:57:14 PM	PH3 valve closed
1/14/2011	4:57:14 PM	SiCl4 pre valve closed
1/14/2011	4:57:14 PM	SiCl4 post valve closed
1/14/2011	4:57:14 PM	Bubbler valve closed
1/14/2011	4:57:14 PM	Main Vac valve opened
1/14/2011	4:57:14 PM	Bypass valve opened
1/14/2011	4:57:14 PM	Helium MFC set to  0.000000
1/14/2011	4:57:14 PM	H2 MFC set to  0.000000
1/14/2011	4:57:14 PM	BCl3 MFC set to  0.000000
1/14/2011	4:57:14 PM	PHl3 MFC set to  0.000000
1/14/2011	4:57:14 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:57:14 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:57:14 PM	Tube furnace set to 0
1/14/2011	4:58:14 PM	H2 valve closed
1/14/2011	4:58:14 PM	BCl3 valve closed
1/14/2011	4:58:14 PM	PH3 valve closed
1/14/2011	4:58:14 PM	SiCl4 pre valve closed
1/14/2011	4:58:14 PM	SiCl4 post valve closed
1/14/2011	4:58:14 PM	Bubbler valve closed
1/14/2011	4:58:14 PM	Helium valve opened
1/14/2011	4:58:14 PM	Main Vac valve opened
1/14/2011	4:58:14 PM	Bypass valve opened
1/14/2011	4:58:14 PM	Helium MFC set to  100.000000
1/14/2011	4:58:14 PM	H2 MFC set to  0.000000
1/14/2011	4:58:14 PM	BCl3 MFC set to  0.000000
1/14/2011	4:58:14 PM	PHl3 MFC set to  0.000000
1/14/2011	4:58:14 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:58:14 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:58:15 PM	Tube furnace set to 0
1/14/2011	4:59:15 PM	Helium valve closed
1/14/2011	4:59:15 PM	H2 valve closed
1/14/2011	4:59:15 PM	BCl3 valve closed
1/14/2011	4:59:15 PM	PH3 valve closed
1/14/2011	4:59:15 PM	SiCl4 pre valve closed
1/14/2011	4:59:15 PM	SiCl4 post valve closed
1/14/2011	4:59:15 PM	Bubbler valve closed
1/14/2011	4:59:15 PM	Main Vac valve opened
1/14/2011	4:59:15 PM	Bypass valve opened
1/14/2011	4:59:15 PM	Helium MFC set to  0.000000
1/14/2011	4:59:15 PM	H2 MFC set to  0.000000
1/14/2011	4:59:15 PM	BCl3 MFC set to  0.000000
1/14/2011	4:59:15 PM	PHl3 MFC set to  0.000000
1/14/2011	4:59:15 PM	SiCl4 MFC set to  0.000000
1/14/2011	4:59:15 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	4:59:15 PM	Tube furnace set to 0
1/14/2011	5:00:15 PM	H2 valve closed
1/14/2011	5:00:15 PM	BCl3 valve closed
1/14/2011	5:00:15 PM	PH3 valve closed
1/14/2011	5:00:15 PM	SiCl4 pre valve closed
1/14/2011	5:00:15 PM	SiCl4 post valve closed
1/14/2011	5:00:15 PM	Bubbler valve closed
1/14/2011	5:00:15 PM	Helium valve opened
1/14/2011	5:00:15 PM	Main Vac valve opened
1/14/2011	5:00:15 PM	Bypass valve opened
1/14/2011	5:00:15 PM	Helium MFC set to  100.000000
1/14/2011	5:00:15 PM	H2 MFC set to  0.000000
1/14/2011	5:00:15 PM	BCl3 MFC set to  0.000000
1/14/2011	5:00:15 PM	PHl3 MFC set to  0.000000
1/14/2011	5:00:15 PM	SiCl4 MFC set to  0.000000
1/14/2011	5:00:15 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:00:15 PM	Tube furnace set to 0
1/14/2011	5:01:15 PM	Helium valve closed
1/14/2011	5:01:15 PM	H2 valve closed
1/14/2011	5:01:15 PM	BCl3 valve closed
1/14/2011	5:01:15 PM	PH3 valve closed
1/14/2011	5:01:15 PM	SiCl4 pre valve closed
1/14/2011	5:01:15 PM	SiCl4 post valve closed
1/14/2011	5:01:15 PM	Bubbler valve closed
1/14/2011	5:01:15 PM	Main Vac valve opened
1/14/2011	5:01:15 PM	Bypass valve opened
1/14/2011	5:01:15 PM	Helium MFC set to  0.000000
1/14/2011	5:01:15 PM	H2 MFC set to  0.000000
1/14/2011	5:01:15 PM	BCl3 MFC set to  0.000000
1/14/2011	5:01:15 PM	PHl3 MFC set to  0.000000
1/14/2011	5:01:15 PM	SiCl4 MFC set to  0.000000
1/14/2011	5:01:15 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:01:15 PM	Tube furnace set to 0
1/14/2011	5:01:16 PM	Run finished at 5:01 PM
1/14/2011	5:01:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	5:02:03 PM	Bypass valve closed
1/14/2011	5:02:04 PM	Main Vac valve closed
1/14/2011	5:02:14 PM	Bypass valve opened
1/14/2011	5:02:15 PM	Main Vac valve opened
1/14/2011	5:02:16 PM	Helium valve opened
1/14/2011	5:02:19 PM	Helium MFC set to  100.000000
1/14/2011	5:02:49 PM	Helium valve closed
1/14/2011	5:03:50 PM	Recipe started at 5:03 PM
1/14/2011	5:03:50 PM	Helium valve closed
1/14/2011	5:03:50 PM	BCl3 valve closed
1/14/2011	5:03:50 PM	PH3 valve closed
1/14/2011	5:03:50 PM	SiCl4 pre valve closed
1/14/2011	5:03:50 PM	SiCl4 post valve closed
1/14/2011	5:03:50 PM	Main Vac valve closed
1/14/2011	5:03:50 PM	Bypass valve closed
1/14/2011	5:03:50 PM	Bubbler valve closed
1/14/2011	5:03:50 PM	H2 valve opened
1/14/2011	5:03:50 PM	Helium MFC set to  0.000000
1/14/2011	5:03:50 PM	H2 MFC set to  500.000000
1/14/2011	5:03:50 PM	BCl3 MFC set to  0.000000
1/14/2011	5:03:50 PM	PHl3 MFC set to  0.000000
1/14/2011	5:03:50 PM	SiCl4 MFC set to  0.000000
1/14/2011	5:03:50 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:03:50 PM	Tube furnace set to 0
1/14/2011	5:05:06 PM	Helium valve closed
1/14/2011	5:05:06 PM	BCl3 valve closed
1/14/2011	5:05:06 PM	PH3 valve closed
1/14/2011	5:05:06 PM	SiCl4 pre valve closed
1/14/2011	5:05:06 PM	SiCl4 post valve closed
1/14/2011	5:05:06 PM	Main Vac valve closed
1/14/2011	5:05:06 PM	Bypass valve closed
1/14/2011	5:05:06 PM	H2 valve opened
1/14/2011	5:05:06 PM	Bubbler valve opened
1/14/2011	5:05:06 PM	Helium MFC set to  0.000000
1/14/2011	5:05:06 PM	H2 MFC set to  500.000000
1/14/2011	5:05:06 PM	BCl3 MFC set to  0.000000
1/14/2011	5:05:06 PM	PHl3 MFC set to  0.000000
1/14/2011	5:05:06 PM	SiCl4 MFC set to  0.000000
1/14/2011	5:05:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:05:06 PM	Tube furnace set to 1000
1/14/2011	5:25:06 PM	Helium valve closed
1/14/2011	5:25:06 PM	PH3 valve closed
1/14/2011	5:25:06 PM	Main Vac valve closed
1/14/2011	5:25:06 PM	Bypass valve closed
1/14/2011	5:25:06 PM	H2 valve opened
1/14/2011	5:25:06 PM	BCl3 valve opened
1/14/2011	5:25:06 PM	SiCl4 pre valve opened
1/14/2011	5:25:06 PM	SiCl4 post valve opened
1/14/2011	5:25:06 PM	Bubbler valve opened
1/14/2011	5:25:06 PM	Helium MFC set to  0.000000
1/14/2011	5:25:06 PM	H2 MFC set to  500.000000
1/14/2011	5:25:06 PM	BCl3 MFC set to  2.000000
1/14/2011	5:25:06 PM	PHl3 MFC set to  0.000000
1/14/2011	5:25:06 PM	SiCl4 MFC set to  50.000000
1/14/2011	5:25:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:25:06 PM	Tube furnace set to 1000
1/14/2011	5:45:06 PM	H2 valve closed
1/14/2011	5:45:06 PM	BCl3 valve closed
1/14/2011	5:45:06 PM	PH3 valve closed
1/14/2011	5:45:06 PM	SiCl4 pre valve closed
1/14/2011	5:45:06 PM	SiCl4 post valve closed
1/14/2011	5:45:06 PM	Main Vac valve closed
1/14/2011	5:45:06 PM	Bypass valve closed
1/14/2011	5:45:06 PM	Helium valve opened
1/14/2011	5:45:06 PM	Bubbler valve opened
1/14/2011	5:45:06 PM	Helium MFC set to  500.000000
1/14/2011	5:45:06 PM	H2 MFC set to  0.000000
1/14/2011	5:45:06 PM	BCl3 MFC set to  0.000000
1/14/2011	5:45:06 PM	PHl3 MFC set to  0.000000
1/14/2011	5:45:06 PM	SiCl4 MFC set to  0.000000
1/14/2011	5:45:06 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:45:07 PM	Tube furnace set to 950
1/14/2011	5:50:07 PM	H2 valve closed
1/14/2011	5:50:07 PM	BCl3 valve closed
1/14/2011	5:50:07 PM	PH3 valve closed
1/14/2011	5:50:07 PM	SiCl4 pre valve closed
1/14/2011	5:50:07 PM	SiCl4 post valve closed
1/14/2011	5:50:07 PM	Main Vac valve closed
1/14/2011	5:50:07 PM	Bypass valve closed
1/14/2011	5:50:07 PM	Helium valve opened
1/14/2011	5:50:07 PM	Bubbler valve opened
1/14/2011	5:50:07 PM	Helium MFC set to  500.000000
1/14/2011	5:50:07 PM	H2 MFC set to  0.000000
1/14/2011	5:50:07 PM	BCl3 MFC set to  0.000000
1/14/2011	5:50:07 PM	PHl3 MFC set to  0.000000
1/14/2011	5:50:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	5:50:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:50:07 PM	Tube furnace set to 900
1/14/2011	5:55:07 PM	H2 valve closed
1/14/2011	5:55:07 PM	BCl3 valve closed
1/14/2011	5:55:07 PM	PH3 valve closed
1/14/2011	5:55:07 PM	SiCl4 pre valve closed
1/14/2011	5:55:07 PM	SiCl4 post valve closed
1/14/2011	5:55:07 PM	Main Vac valve closed
1/14/2011	5:55:07 PM	Bypass valve closed
1/14/2011	5:55:07 PM	Helium valve opened
1/14/2011	5:55:07 PM	Bubbler valve opened
1/14/2011	5:55:07 PM	Helium MFC set to  500.000000
1/14/2011	5:55:07 PM	H2 MFC set to  0.000000
1/14/2011	5:55:07 PM	BCl3 MFC set to  0.000000
1/14/2011	5:55:07 PM	PHl3 MFC set to  0.000000
1/14/2011	5:55:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	5:55:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	5:55:07 PM	Tube furnace set to 850
1/14/2011	6:00:07 PM	H2 valve closed
1/14/2011	6:00:07 PM	BCl3 valve closed
1/14/2011	6:00:07 PM	PH3 valve closed
1/14/2011	6:00:07 PM	SiCl4 pre valve closed
1/14/2011	6:00:07 PM	SiCl4 post valve closed
1/14/2011	6:00:07 PM	Main Vac valve closed
1/14/2011	6:00:07 PM	Bypass valve closed
1/14/2011	6:00:07 PM	Helium valve opened
1/14/2011	6:00:07 PM	Bubbler valve opened
1/14/2011	6:00:07 PM	Helium MFC set to  500.000000
1/14/2011	6:00:07 PM	H2 MFC set to  0.000000
1/14/2011	6:00:07 PM	BCl3 MFC set to  0.000000
1/14/2011	6:00:07 PM	PHl3 MFC set to  0.000000
1/14/2011	6:00:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:00:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:00:07 PM	Tube furnace set to 800
1/14/2011	6:05:07 PM	H2 valve closed
1/14/2011	6:05:07 PM	BCl3 valve closed
1/14/2011	6:05:07 PM	PH3 valve closed
1/14/2011	6:05:07 PM	SiCl4 pre valve closed
1/14/2011	6:05:07 PM	SiCl4 post valve closed
1/14/2011	6:05:07 PM	Main Vac valve closed
1/14/2011	6:05:07 PM	Bypass valve closed
1/14/2011	6:05:07 PM	Helium valve opened
1/14/2011	6:05:07 PM	Bubbler valve opened
1/14/2011	6:05:07 PM	Helium MFC set to  500.000000
1/14/2011	6:05:07 PM	H2 MFC set to  0.000000
1/14/2011	6:05:07 PM	BCl3 MFC set to  0.000000
1/14/2011	6:05:07 PM	PHl3 MFC set to  0.000000
1/14/2011	6:05:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:05:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:05:07 PM	Tube furnace set to 750
1/14/2011	6:10:07 PM	H2 valve closed
1/14/2011	6:10:07 PM	BCl3 valve closed
1/14/2011	6:10:07 PM	PH3 valve closed
1/14/2011	6:10:07 PM	SiCl4 pre valve closed
1/14/2011	6:10:07 PM	SiCl4 post valve closed
1/14/2011	6:10:07 PM	Main Vac valve closed
1/14/2011	6:10:07 PM	Bypass valve closed
1/14/2011	6:10:07 PM	Helium valve opened
1/14/2011	6:10:07 PM	Bubbler valve opened
1/14/2011	6:10:07 PM	Helium MFC set to  500.000000
1/14/2011	6:10:07 PM	H2 MFC set to  0.000000
1/14/2011	6:10:07 PM	BCl3 MFC set to  0.000000
1/14/2011	6:10:07 PM	PHl3 MFC set to  0.000000
1/14/2011	6:10:07 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:10:07 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:10:08 PM	Tube furnace set to 700
1/14/2011	6:10:56 PM	H2 valve closed
1/14/2011	6:10:56 PM	BCl3 valve closed
1/14/2011	6:10:56 PM	PH3 valve closed
1/14/2011	6:10:56 PM	SiCl4 pre valve closed
1/14/2011	6:10:56 PM	SiCl4 post valve closed
1/14/2011	6:10:56 PM	Main Vac valve closed
1/14/2011	6:10:56 PM	Bypass valve closed
1/14/2011	6:10:56 PM	Helium valve opened
1/14/2011	6:10:56 PM	Bubbler valve opened
1/14/2011	6:10:56 PM	Helium MFC set to  500.000000
1/14/2011	6:10:56 PM	H2 MFC set to  0.000000
1/14/2011	6:10:56 PM	BCl3 MFC set to  0.000000
1/14/2011	6:10:56 PM	PHl3 MFC set to  0.000000
1/14/2011	6:10:56 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:10:56 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:10:56 PM	Tube furnace set to 0
1/14/2011	6:14:05 PM	Helium valve closed
1/14/2011	6:14:05 PM	H2 valve closed
1/14/2011	6:14:05 PM	BCl3 valve closed
1/14/2011	6:14:05 PM	PH3 valve closed
1/14/2011	6:14:05 PM	SiCl4 pre valve closed
1/14/2011	6:14:05 PM	SiCl4 post valve closed
1/14/2011	6:14:05 PM	Main Vac valve closed
1/14/2011	6:14:05 PM	Bubbler valve closed
1/14/2011	6:14:05 PM	Bypass valve closed
1/14/2011	6:14:05 PM	Helium MFC set to  0.000000
1/14/2011	6:14:05 PM	H2 MFC set to  0.000000
1/14/2011	6:14:05 PM	BCl3 MFC set to  0.000000
1/14/2011	6:14:05 PM	PHl3 MFC set to  0.000000
1/14/2011	6:14:05 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:14:05 PM	Bypass solenoid MFC set to  760.000000
1/14/2011	6:14:06 PM	Tube furnace set to 0
1/14/2011	6:14:06 PM	Baratron reads 744.380805 Torr and NaOH valve is open.  Emergency exit.
1/14/2011	6:16:11 PM	Run aborted at 6:16 PM
1/14/2011	6:16:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	6:16:13 PM	Recipe started at 6:16 PM
1/14/2011	6:16:13 PM	Helium valve closed
1/14/2011	6:16:13 PM	H2 valve closed
1/14/2011	6:16:13 PM	BCl3 valve closed
1/14/2011	6:16:13 PM	PH3 valve closed
1/14/2011	6:16:13 PM	SiCl4 pre valve closed
1/14/2011	6:16:13 PM	SiCl4 post valve closed
1/14/2011	6:16:13 PM	Main Vac valve closed
1/14/2011	6:16:13 PM	Bubbler valve closed
1/14/2011	6:16:13 PM	Bypass valve opened
1/14/2011	6:16:13 PM	Helium MFC set to  0.000000
1/14/2011	6:16:13 PM	H2 MFC set to  0.000000
1/14/2011	6:16:13 PM	BCl3 MFC set to  0.000000
1/14/2011	6:16:13 PM	PHl3 MFC set to  0.000000
1/14/2011	6:16:13 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:16:13 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:16:13 PM	Tube furnace set to 0
1/14/2011	6:16:42 PM	Helium valve closed
1/14/2011	6:16:42 PM	H2 valve closed
1/14/2011	6:16:42 PM	BCl3 valve closed
1/14/2011	6:16:42 PM	PH3 valve closed
1/14/2011	6:16:42 PM	SiCl4 pre valve closed
1/14/2011	6:16:42 PM	SiCl4 post valve closed
1/14/2011	6:16:42 PM	Bubbler valve closed
1/14/2011	6:16:42 PM	Main Vac valve opened
1/14/2011	6:16:42 PM	Bypass valve opened
1/14/2011	6:16:42 PM	Helium MFC set to  0.000000
1/14/2011	6:16:42 PM	H2 MFC set to  0.000000
1/14/2011	6:16:42 PM	BCl3 MFC set to  0.000000
1/14/2011	6:16:42 PM	PHl3 MFC set to  0.000000
1/14/2011	6:16:42 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:16:42 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:16:42 PM	Tube furnace set to 0
1/14/2011	6:16:43 PM	Run finished at 6:16 PM
1/14/2011	6:16:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	6:19:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	6:19:37 PM	Recipe started at 6:19 PM
1/14/2011	6:19:37 PM	Helium valve closed
1/14/2011	6:19:37 PM	H2 valve closed
1/14/2011	6:19:37 PM	BCl3 valve closed
1/14/2011	6:19:37 PM	PH3 valve closed
1/14/2011	6:19:37 PM	SiCl4 pre valve closed
1/14/2011	6:19:37 PM	SiCl4 post valve closed
1/14/2011	6:19:37 PM	Main Vac valve closed
1/14/2011	6:19:37 PM	Bubbler valve closed
1/14/2011	6:19:37 PM	Bypass valve opened
1/14/2011	6:19:37 PM	Helium MFC set to  0.000000
1/14/2011	6:19:37 PM	H2 MFC set to  0.000000
1/14/2011	6:19:37 PM	BCl3 MFC set to  0.000000
1/14/2011	6:19:37 PM	PHl3 MFC set to  0.000000
1/14/2011	6:19:37 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:19:37 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:19:38 PM	Tube furnace set to 0
1/14/2011	6:19:38 PM	Helium valve closed
1/14/2011	6:19:38 PM	H2 valve closed
1/14/2011	6:19:38 PM	BCl3 valve closed
1/14/2011	6:19:38 PM	PH3 valve closed
1/14/2011	6:19:38 PM	SiCl4 pre valve closed
1/14/2011	6:19:38 PM	SiCl4 post valve closed
1/14/2011	6:19:38 PM	Bubbler valve closed
1/14/2011	6:19:38 PM	Main Vac valve opened
1/14/2011	6:19:38 PM	Bypass valve opened
1/14/2011	6:19:38 PM	Helium MFC set to  0.000000
1/14/2011	6:19:38 PM	H2 MFC set to  0.000000
1/14/2011	6:19:38 PM	BCl3 MFC set to  0.000000
1/14/2011	6:19:38 PM	PHl3 MFC set to  0.000000
1/14/2011	6:19:38 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:19:38 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:19:38 PM	Tube furnace set to 0
1/14/2011	6:20:38 PM	H2 valve closed
1/14/2011	6:20:38 PM	BCl3 valve closed
1/14/2011	6:20:38 PM	PH3 valve closed
1/14/2011	6:20:38 PM	SiCl4 pre valve closed
1/14/2011	6:20:38 PM	SiCl4 post valve closed
1/14/2011	6:20:38 PM	Bubbler valve closed
1/14/2011	6:20:38 PM	Helium valve opened
1/14/2011	6:20:38 PM	Main Vac valve opened
1/14/2011	6:20:38 PM	Bypass valve opened
1/14/2011	6:20:38 PM	Helium MFC set to  100.000000
1/14/2011	6:20:38 PM	H2 MFC set to  0.000000
1/14/2011	6:20:38 PM	BCl3 MFC set to  0.000000
1/14/2011	6:20:38 PM	PHl3 MFC set to  0.000000
1/14/2011	6:20:38 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:20:38 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:20:38 PM	Tube furnace set to 0
1/14/2011	6:21:38 PM	Helium valve closed
1/14/2011	6:21:38 PM	H2 valve closed
1/14/2011	6:21:38 PM	BCl3 valve closed
1/14/2011	6:21:38 PM	PH3 valve closed
1/14/2011	6:21:38 PM	SiCl4 pre valve closed
1/14/2011	6:21:38 PM	SiCl4 post valve closed
1/14/2011	6:21:38 PM	Bubbler valve closed
1/14/2011	6:21:38 PM	Main Vac valve opened
1/14/2011	6:21:38 PM	Bypass valve opened
1/14/2011	6:21:38 PM	Helium MFC set to  0.000000
1/14/2011	6:21:38 PM	H2 MFC set to  0.000000
1/14/2011	6:21:38 PM	BCl3 MFC set to  0.000000
1/14/2011	6:21:38 PM	PHl3 MFC set to  0.000000
1/14/2011	6:21:38 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:21:38 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:21:38 PM	Tube furnace set to 0
1/14/2011	6:22:39 PM	H2 valve closed
1/14/2011	6:22:39 PM	BCl3 valve closed
1/14/2011	6:22:39 PM	PH3 valve closed
1/14/2011	6:22:39 PM	SiCl4 pre valve closed
1/14/2011	6:22:39 PM	SiCl4 post valve closed
1/14/2011	6:22:39 PM	Bubbler valve closed
1/14/2011	6:22:39 PM	Helium valve opened
1/14/2011	6:22:39 PM	Main Vac valve opened
1/14/2011	6:22:39 PM	Bypass valve opened
1/14/2011	6:22:39 PM	Helium MFC set to  100.000000
1/14/2011	6:22:39 PM	H2 MFC set to  0.000000
1/14/2011	6:22:39 PM	BCl3 MFC set to  0.000000
1/14/2011	6:22:39 PM	PHl3 MFC set to  0.000000
1/14/2011	6:22:39 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:22:39 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:22:39 PM	Tube furnace set to 0
1/14/2011	6:23:39 PM	Helium valve closed
1/14/2011	6:23:39 PM	H2 valve closed
1/14/2011	6:23:39 PM	BCl3 valve closed
1/14/2011	6:23:39 PM	PH3 valve closed
1/14/2011	6:23:39 PM	SiCl4 pre valve closed
1/14/2011	6:23:39 PM	SiCl4 post valve closed
1/14/2011	6:23:39 PM	Bubbler valve closed
1/14/2011	6:23:39 PM	Main Vac valve opened
1/14/2011	6:23:39 PM	Bypass valve opened
1/14/2011	6:23:39 PM	Helium MFC set to  0.000000
1/14/2011	6:23:39 PM	H2 MFC set to  0.000000
1/14/2011	6:23:39 PM	BCl3 MFC set to  0.000000
1/14/2011	6:23:39 PM	PHl3 MFC set to  0.000000
1/14/2011	6:23:39 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:23:39 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:23:39 PM	Tube furnace set to 0
1/14/2011	6:24:39 PM	H2 valve closed
1/14/2011	6:24:39 PM	BCl3 valve closed
1/14/2011	6:24:39 PM	PH3 valve closed
1/14/2011	6:24:39 PM	SiCl4 pre valve closed
1/14/2011	6:24:39 PM	SiCl4 post valve closed
1/14/2011	6:24:39 PM	Bubbler valve closed
1/14/2011	6:24:39 PM	Helium valve opened
1/14/2011	6:24:39 PM	Main Vac valve opened
1/14/2011	6:24:39 PM	Bypass valve opened
1/14/2011	6:24:39 PM	Helium MFC set to  100.000000
1/14/2011	6:24:39 PM	H2 MFC set to  0.000000
1/14/2011	6:24:39 PM	BCl3 MFC set to  0.000000
1/14/2011	6:24:39 PM	PHl3 MFC set to  0.000000
1/14/2011	6:24:39 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:24:39 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:24:39 PM	Tube furnace set to 0
1/14/2011	6:25:39 PM	Helium valve closed
1/14/2011	6:25:39 PM	H2 valve closed
1/14/2011	6:25:39 PM	BCl3 valve closed
1/14/2011	6:25:39 PM	PH3 valve closed
1/14/2011	6:25:39 PM	SiCl4 pre valve closed
1/14/2011	6:25:39 PM	SiCl4 post valve closed
1/14/2011	6:25:39 PM	Bubbler valve closed
1/14/2011	6:25:39 PM	Main Vac valve opened
1/14/2011	6:25:39 PM	Bypass valve opened
1/14/2011	6:25:39 PM	Helium MFC set to  0.000000
1/14/2011	6:25:39 PM	H2 MFC set to  0.000000
1/14/2011	6:25:39 PM	BCl3 MFC set to  0.000000
1/14/2011	6:25:39 PM	PHl3 MFC set to  0.000000
1/14/2011	6:25:39 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:25:39 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:25:39 PM	Tube furnace set to 0
1/14/2011	6:26:39 PM	H2 valve closed
1/14/2011	6:26:39 PM	BCl3 valve closed
1/14/2011	6:26:39 PM	PH3 valve closed
1/14/2011	6:26:39 PM	SiCl4 pre valve closed
1/14/2011	6:26:39 PM	SiCl4 post valve closed
1/14/2011	6:26:39 PM	Bubbler valve closed
1/14/2011	6:26:39 PM	Helium valve opened
1/14/2011	6:26:39 PM	Main Vac valve opened
1/14/2011	6:26:39 PM	Bypass valve opened
1/14/2011	6:26:39 PM	Helium MFC set to  100.000000
1/14/2011	6:26:39 PM	H2 MFC set to  0.000000
1/14/2011	6:26:39 PM	BCl3 MFC set to  0.000000
1/14/2011	6:26:39 PM	PHl3 MFC set to  0.000000
1/14/2011	6:26:39 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:26:39 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:26:40 PM	Tube furnace set to 0
1/14/2011	6:27:40 PM	Helium valve closed
1/14/2011	6:27:40 PM	H2 valve closed
1/14/2011	6:27:40 PM	BCl3 valve closed
1/14/2011	6:27:40 PM	PH3 valve closed
1/14/2011	6:27:40 PM	SiCl4 pre valve closed
1/14/2011	6:27:40 PM	SiCl4 post valve closed
1/14/2011	6:27:40 PM	Bubbler valve closed
1/14/2011	6:27:40 PM	Main Vac valve opened
1/14/2011	6:27:40 PM	Bypass valve opened
1/14/2011	6:27:40 PM	Helium MFC set to  0.000000
1/14/2011	6:27:40 PM	H2 MFC set to  0.000000
1/14/2011	6:27:40 PM	BCl3 MFC set to  0.000000
1/14/2011	6:27:40 PM	PHl3 MFC set to  0.000000
1/14/2011	6:27:40 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:27:40 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:27:40 PM	Tube furnace set to 0
1/14/2011	6:28:40 PM	H2 valve closed
1/14/2011	6:28:40 PM	BCl3 valve closed
1/14/2011	6:28:40 PM	PH3 valve closed
1/14/2011	6:28:40 PM	SiCl4 pre valve closed
1/14/2011	6:28:40 PM	SiCl4 post valve closed
1/14/2011	6:28:40 PM	Bubbler valve closed
1/14/2011	6:28:40 PM	Helium valve opened
1/14/2011	6:28:40 PM	Main Vac valve opened
1/14/2011	6:28:40 PM	Bypass valve opened
1/14/2011	6:28:40 PM	Helium MFC set to  100.000000
1/14/2011	6:28:40 PM	H2 MFC set to  0.000000
1/14/2011	6:28:40 PM	BCl3 MFC set to  0.000000
1/14/2011	6:28:40 PM	PHl3 MFC set to  0.000000
1/14/2011	6:28:40 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:28:40 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:28:40 PM	Tube furnace set to 0
1/14/2011	6:29:40 PM	Helium valve closed
1/14/2011	6:29:40 PM	H2 valve closed
1/14/2011	6:29:40 PM	BCl3 valve closed
1/14/2011	6:29:40 PM	PH3 valve closed
1/14/2011	6:29:40 PM	SiCl4 pre valve closed
1/14/2011	6:29:40 PM	SiCl4 post valve closed
1/14/2011	6:29:40 PM	Bubbler valve closed
1/14/2011	6:29:40 PM	Main Vac valve opened
1/14/2011	6:29:40 PM	Bypass valve opened
1/14/2011	6:29:40 PM	Helium MFC set to  0.000000
1/14/2011	6:29:40 PM	H2 MFC set to  0.000000
1/14/2011	6:29:40 PM	BCl3 MFC set to  0.000000
1/14/2011	6:29:40 PM	PHl3 MFC set to  0.000000
1/14/2011	6:29:40 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:29:40 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:29:40 PM	Tube furnace set to 0
1/14/2011	6:30:40 PM	H2 valve closed
1/14/2011	6:30:40 PM	BCl3 valve closed
1/14/2011	6:30:40 PM	PH3 valve closed
1/14/2011	6:30:40 PM	SiCl4 pre valve closed
1/14/2011	6:30:40 PM	SiCl4 post valve closed
1/14/2011	6:30:40 PM	Bubbler valve closed
1/14/2011	6:30:40 PM	Helium valve opened
1/14/2011	6:30:40 PM	Main Vac valve opened
1/14/2011	6:30:40 PM	Bypass valve opened
1/14/2011	6:30:40 PM	Helium MFC set to  100.000000
1/14/2011	6:30:40 PM	H2 MFC set to  0.000000
1/14/2011	6:30:40 PM	BCl3 MFC set to  0.000000
1/14/2011	6:30:40 PM	PHl3 MFC set to  0.000000
1/14/2011	6:30:40 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:30:40 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:30:40 PM	Tube furnace set to 0
1/14/2011	6:31:40 PM	Helium valve closed
1/14/2011	6:31:40 PM	H2 valve closed
1/14/2011	6:31:40 PM	BCl3 valve closed
1/14/2011	6:31:40 PM	PH3 valve closed
1/14/2011	6:31:40 PM	SiCl4 pre valve closed
1/14/2011	6:31:40 PM	SiCl4 post valve closed
1/14/2011	6:31:40 PM	Bubbler valve closed
1/14/2011	6:31:40 PM	Main Vac valve opened
1/14/2011	6:31:40 PM	Bypass valve opened
1/14/2011	6:31:40 PM	Helium MFC set to  0.000000
1/14/2011	6:31:40 PM	H2 MFC set to  0.000000
1/14/2011	6:31:40 PM	BCl3 MFC set to  0.000000
1/14/2011	6:31:40 PM	PHl3 MFC set to  0.000000
1/14/2011	6:31:40 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:31:40 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:31:41 PM	Tube furnace set to 0
1/14/2011	6:32:41 PM	H2 valve closed
1/14/2011	6:32:41 PM	BCl3 valve closed
1/14/2011	6:32:41 PM	PH3 valve closed
1/14/2011	6:32:41 PM	SiCl4 pre valve closed
1/14/2011	6:32:41 PM	SiCl4 post valve closed
1/14/2011	6:32:41 PM	Bubbler valve closed
1/14/2011	6:32:41 PM	Helium valve opened
1/14/2011	6:32:41 PM	Main Vac valve opened
1/14/2011	6:32:41 PM	Bypass valve opened
1/14/2011	6:32:41 PM	Helium MFC set to  100.000000
1/14/2011	6:32:41 PM	H2 MFC set to  0.000000
1/14/2011	6:32:41 PM	BCl3 MFC set to  0.000000
1/14/2011	6:32:41 PM	PHl3 MFC set to  0.000000
1/14/2011	6:32:41 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:32:41 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:32:41 PM	Tube furnace set to 0
1/14/2011	6:33:41 PM	Helium valve closed
1/14/2011	6:33:41 PM	H2 valve closed
1/14/2011	6:33:41 PM	BCl3 valve closed
1/14/2011	6:33:41 PM	PH3 valve closed
1/14/2011	6:33:41 PM	SiCl4 pre valve closed
1/14/2011	6:33:41 PM	SiCl4 post valve closed
1/14/2011	6:33:41 PM	Bubbler valve closed
1/14/2011	6:33:41 PM	Main Vac valve opened
1/14/2011	6:33:41 PM	Bypass valve opened
1/14/2011	6:33:41 PM	Helium MFC set to  0.000000
1/14/2011	6:33:41 PM	H2 MFC set to  0.000000
1/14/2011	6:33:41 PM	BCl3 MFC set to  0.000000
1/14/2011	6:33:41 PM	PHl3 MFC set to  0.000000
1/14/2011	6:33:41 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:33:41 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:33:41 PM	Tube furnace set to 0
1/14/2011	6:34:41 PM	H2 valve closed
1/14/2011	6:34:41 PM	BCl3 valve closed
1/14/2011	6:34:41 PM	PH3 valve closed
1/14/2011	6:34:41 PM	SiCl4 pre valve closed
1/14/2011	6:34:41 PM	SiCl4 post valve closed
1/14/2011	6:34:41 PM	Bubbler valve closed
1/14/2011	6:34:41 PM	Helium valve opened
1/14/2011	6:34:41 PM	Main Vac valve opened
1/14/2011	6:34:41 PM	Bypass valve opened
1/14/2011	6:34:41 PM	Helium MFC set to  100.000000
1/14/2011	6:34:41 PM	H2 MFC set to  0.000000
1/14/2011	6:34:41 PM	BCl3 MFC set to  0.000000
1/14/2011	6:34:41 PM	PHl3 MFC set to  0.000000
1/14/2011	6:34:41 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:34:41 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:34:41 PM	Tube furnace set to 0
1/14/2011	6:35:41 PM	Helium valve closed
1/14/2011	6:35:41 PM	H2 valve closed
1/14/2011	6:35:41 PM	BCl3 valve closed
1/14/2011	6:35:41 PM	PH3 valve closed
1/14/2011	6:35:41 PM	SiCl4 pre valve closed
1/14/2011	6:35:41 PM	SiCl4 post valve closed
1/14/2011	6:35:41 PM	Bubbler valve closed
1/14/2011	6:35:41 PM	Main Vac valve opened
1/14/2011	6:35:41 PM	Bypass valve opened
1/14/2011	6:35:41 PM	Helium MFC set to  0.000000
1/14/2011	6:35:41 PM	H2 MFC set to  0.000000
1/14/2011	6:35:41 PM	BCl3 MFC set to  0.000000
1/14/2011	6:35:41 PM	PHl3 MFC set to  0.000000
1/14/2011	6:35:41 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:35:41 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:35:41 PM	Tube furnace set to 0
1/14/2011	6:36:30 PM	H2 valve closed
1/14/2011	6:36:30 PM	BCl3 valve closed
1/14/2011	6:36:30 PM	PH3 valve closed
1/14/2011	6:36:30 PM	SiCl4 pre valve closed
1/14/2011	6:36:30 PM	SiCl4 post valve closed
1/14/2011	6:36:30 PM	Bubbler valve closed
1/14/2011	6:36:30 PM	Helium valve opened
1/14/2011	6:36:30 PM	Main Vac valve opened
1/14/2011	6:36:30 PM	Bypass valve opened
1/14/2011	6:36:30 PM	Helium MFC set to  100.000000
1/14/2011	6:36:30 PM	H2 MFC set to  0.000000
1/14/2011	6:36:30 PM	BCl3 MFC set to  0.000000
1/14/2011	6:36:30 PM	PHl3 MFC set to  0.000000
1/14/2011	6:36:30 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:36:30 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:36:30 PM	Tube furnace set to 0
1/14/2011	6:37:30 PM	Helium valve closed
1/14/2011	6:37:30 PM	H2 valve closed
1/14/2011	6:37:30 PM	BCl3 valve closed
1/14/2011	6:37:30 PM	PH3 valve closed
1/14/2011	6:37:30 PM	SiCl4 pre valve closed
1/14/2011	6:37:30 PM	SiCl4 post valve closed
1/14/2011	6:37:30 PM	Bubbler valve closed
1/14/2011	6:37:30 PM	Main Vac valve opened
1/14/2011	6:37:30 PM	Bypass valve opened
1/14/2011	6:37:30 PM	Helium MFC set to  0.000000
1/14/2011	6:37:30 PM	H2 MFC set to  0.000000
1/14/2011	6:37:30 PM	BCl3 MFC set to  0.000000
1/14/2011	6:37:30 PM	PHl3 MFC set to  0.000000
1/14/2011	6:37:30 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:37:30 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:37:30 PM	Tube furnace set to 0
1/14/2011	6:38:17 PM	Run aborted at 6:38 PM
1/14/2011	6:38:17 PM	Helium valve closed
1/14/2011	6:38:17 PM	H2 valve closed
1/14/2011	6:38:17 PM	BCl3 valve closed
1/14/2011	6:38:17 PM	PH3 valve closed
1/14/2011	6:38:17 PM	SiCl4 pre valve closed
1/14/2011	6:38:17 PM	SiCl4 post valve closed
1/14/2011	6:38:17 PM	Bypass valve closed
1/14/2011	6:38:17 PM	Main Vac valve closed
1/14/2011	6:38:17 PM	Bubbler valve closed
1/14/2011	6:38:17 PM	Helium MFC set to  0.000000
1/14/2011	6:38:17 PM	H2 MFC set to  0.000000
1/14/2011	6:38:17 PM	BCl3 MFC set to  0.000000
1/14/2011	6:38:17 PM	PHl3 MFC set to  0.000000
1/14/2011	6:38:17 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:38:17 PM	Tube furnace set to 0
1/14/2011	6:38:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/14/2011	6:38:25 PM	Bypass valve opened
1/14/2011	6:38:26 PM	Main Vac valve opened
1/14/2011	6:38:29 PM	Helium MFC set to  100.000000
1/14/2011	6:38:31 PM	Helium valve opened
1/14/2011	6:38:34 PM	Helium valve closed
1/14/2011	6:39:37 PM	Recipe started at 6:39 PM
1/14/2011	6:39:37 PM	Helium valve closed
1/14/2011	6:39:37 PM	BCl3 valve closed
1/14/2011	6:39:37 PM	PH3 valve closed
1/14/2011	6:39:37 PM	SiCl4 pre valve closed
1/14/2011	6:39:37 PM	SiCl4 post valve closed
1/14/2011	6:39:37 PM	Main Vac valve closed
1/14/2011	6:39:37 PM	Bypass valve closed
1/14/2011	6:39:37 PM	Bubbler valve closed
1/14/2011	6:39:37 PM	H2 valve opened
1/14/2011	6:39:37 PM	Helium MFC set to  0.000000
1/14/2011	6:39:37 PM	H2 MFC set to  500.000000
1/14/2011	6:39:37 PM	BCl3 MFC set to  0.000000
1/14/2011	6:39:37 PM	PHl3 MFC set to  0.000000
1/14/2011	6:39:37 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:39:37 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:39:37 PM	Tube furnace set to 0
1/14/2011	6:40:52 PM	Helium valve closed
1/14/2011	6:40:52 PM	BCl3 valve closed
1/14/2011	6:40:52 PM	PH3 valve closed
1/14/2011	6:40:52 PM	SiCl4 pre valve closed
1/14/2011	6:40:52 PM	SiCl4 post valve closed
1/14/2011	6:40:52 PM	Main Vac valve closed
1/14/2011	6:40:52 PM	Bypass valve closed
1/14/2011	6:40:52 PM	H2 valve opened
1/14/2011	6:40:52 PM	Bubbler valve opened
1/14/2011	6:40:52 PM	Helium MFC set to  0.000000
1/14/2011	6:40:52 PM	H2 MFC set to  500.000000
1/14/2011	6:40:52 PM	BCl3 MFC set to  0.000000
1/14/2011	6:40:52 PM	PHl3 MFC set to  0.000000
1/14/2011	6:40:52 PM	SiCl4 MFC set to  0.000000
1/14/2011	6:40:52 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	6:40:52 PM	Tube furnace set to 1000
1/14/2011	7:00:52 PM	Helium valve closed
1/14/2011	7:00:52 PM	PH3 valve closed
1/14/2011	7:00:52 PM	Main Vac valve closed
1/14/2011	7:00:52 PM	Bypass valve closed
1/14/2011	7:00:52 PM	H2 valve opened
1/14/2011	7:00:52 PM	BCl3 valve opened
1/14/2011	7:00:52 PM	SiCl4 pre valve opened
1/14/2011	7:00:52 PM	SiCl4 post valve opened
1/14/2011	7:00:52 PM	Bubbler valve opened
1/14/2011	7:00:52 PM	Helium MFC set to  0.000000
1/14/2011	7:00:52 PM	H2 MFC set to  500.000000
1/14/2011	7:00:52 PM	BCl3 MFC set to  2.000000
1/14/2011	7:00:52 PM	PHl3 MFC set to  0.000000
1/14/2011	7:00:52 PM	SiCl4 MFC set to  50.000000
1/14/2011	7:00:52 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:00:52 PM	Tube furnace set to 1000
1/14/2011	7:20:52 PM	H2 valve closed
1/14/2011	7:20:52 PM	BCl3 valve closed
1/14/2011	7:20:52 PM	PH3 valve closed
1/14/2011	7:20:52 PM	SiCl4 pre valve closed
1/14/2011	7:20:52 PM	SiCl4 post valve closed
1/14/2011	7:20:52 PM	Main Vac valve closed
1/14/2011	7:20:52 PM	Bypass valve closed
1/14/2011	7:20:52 PM	Helium valve opened
1/14/2011	7:20:52 PM	Bubbler valve opened
1/14/2011	7:20:52 PM	Helium MFC set to  500.000000
1/14/2011	7:20:52 PM	H2 MFC set to  0.000000
1/14/2011	7:20:52 PM	BCl3 MFC set to  0.000000
1/14/2011	7:20:52 PM	PHl3 MFC set to  0.000000
1/14/2011	7:20:52 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:20:52 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:20:52 PM	Tube furnace set to 950
1/14/2011	7:25:52 PM	H2 valve closed
1/14/2011	7:25:52 PM	BCl3 valve closed
1/14/2011	7:25:52 PM	PH3 valve closed
1/14/2011	7:25:52 PM	SiCl4 pre valve closed
1/14/2011	7:25:52 PM	SiCl4 post valve closed
1/14/2011	7:25:52 PM	Main Vac valve closed
1/14/2011	7:25:52 PM	Bypass valve closed
1/14/2011	7:25:52 PM	Helium valve opened
1/14/2011	7:25:52 PM	Bubbler valve opened
1/14/2011	7:25:52 PM	Helium MFC set to  500.000000
1/14/2011	7:25:52 PM	H2 MFC set to  0.000000
1/14/2011	7:25:52 PM	BCl3 MFC set to  0.000000
1/14/2011	7:25:52 PM	PHl3 MFC set to  0.000000
1/14/2011	7:25:52 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:25:52 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:25:53 PM	Tube furnace set to 900
1/14/2011	7:30:53 PM	H2 valve closed
1/14/2011	7:30:53 PM	BCl3 valve closed
1/14/2011	7:30:53 PM	PH3 valve closed
1/14/2011	7:30:53 PM	SiCl4 pre valve closed
1/14/2011	7:30:53 PM	SiCl4 post valve closed
1/14/2011	7:30:53 PM	Main Vac valve closed
1/14/2011	7:30:53 PM	Bypass valve closed
1/14/2011	7:30:53 PM	Helium valve opened
1/14/2011	7:30:53 PM	Bubbler valve opened
1/14/2011	7:30:53 PM	Helium MFC set to  500.000000
1/14/2011	7:30:53 PM	H2 MFC set to  0.000000
1/14/2011	7:30:53 PM	BCl3 MFC set to  0.000000
1/14/2011	7:30:53 PM	PHl3 MFC set to  0.000000
1/14/2011	7:30:53 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:30:53 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:30:53 PM	Tube furnace set to 850
1/14/2011	7:35:53 PM	H2 valve closed
1/14/2011	7:35:53 PM	BCl3 valve closed
1/14/2011	7:35:53 PM	PH3 valve closed
1/14/2011	7:35:53 PM	SiCl4 pre valve closed
1/14/2011	7:35:53 PM	SiCl4 post valve closed
1/14/2011	7:35:53 PM	Main Vac valve closed
1/14/2011	7:35:53 PM	Bypass valve closed
1/14/2011	7:35:53 PM	Helium valve opened
1/14/2011	7:35:53 PM	Bubbler valve opened
1/14/2011	7:35:53 PM	Helium MFC set to  500.000000
1/14/2011	7:35:53 PM	H2 MFC set to  0.000000
1/14/2011	7:35:53 PM	BCl3 MFC set to  0.000000
1/14/2011	7:35:53 PM	PHl3 MFC set to  0.000000
1/14/2011	7:35:53 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:35:53 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:35:53 PM	Tube furnace set to 800
1/14/2011	7:40:53 PM	H2 valve closed
1/14/2011	7:40:53 PM	BCl3 valve closed
1/14/2011	7:40:53 PM	PH3 valve closed
1/14/2011	7:40:53 PM	SiCl4 pre valve closed
1/14/2011	7:40:53 PM	SiCl4 post valve closed
1/14/2011	7:40:53 PM	Main Vac valve closed
1/14/2011	7:40:53 PM	Bypass valve closed
1/14/2011	7:40:53 PM	Helium valve opened
1/14/2011	7:40:53 PM	Bubbler valve opened
1/14/2011	7:40:53 PM	Helium MFC set to  500.000000
1/14/2011	7:40:53 PM	H2 MFC set to  0.000000
1/14/2011	7:40:53 PM	BCl3 MFC set to  0.000000
1/14/2011	7:40:53 PM	PHl3 MFC set to  0.000000
1/14/2011	7:40:53 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:40:53 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:40:53 PM	Tube furnace set to 750
1/14/2011	7:45:48 PM	Run aborted at 7:45 PM
1/14/2011	7:45:48 PM	Helium valve closed
1/14/2011	7:45:48 PM	H2 valve closed
1/14/2011	7:45:48 PM	BCl3 valve closed
1/14/2011	7:45:48 PM	PH3 valve closed
1/14/2011	7:45:48 PM	SiCl4 pre valve closed
1/14/2011	7:45:48 PM	SiCl4 post valve closed
1/14/2011	7:45:48 PM	Bypass valve closed
1/14/2011	7:45:48 PM	Main Vac valve closed
1/14/2011	7:45:48 PM	Bubbler valve closed
1/14/2011	7:45:48 PM	Helium MFC set to  0.000000
1/14/2011	7:45:48 PM	H2 MFC set to  0.000000
1/14/2011	7:45:48 PM	BCl3 MFC set to  0.000000
1/14/2011	7:45:48 PM	PHl3 MFC set to  0.000000
1/14/2011	7:45:48 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:45:48 PM	Tube furnace set to 0
1/14/2011	7:47:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/14/2011	7:47:17 PM	Recipe started at 7:47 PM
1/14/2011	7:47:17 PM	Helium valve closed
1/14/2011	7:47:17 PM	H2 valve closed
1/14/2011	7:47:17 PM	BCl3 valve closed
1/14/2011	7:47:17 PM	PH3 valve closed
1/14/2011	7:47:17 PM	SiCl4 pre valve closed
1/14/2011	7:47:17 PM	SiCl4 post valve closed
1/14/2011	7:47:17 PM	Main Vac valve closed
1/14/2011	7:47:17 PM	Bubbler valve closed
1/14/2011	7:47:17 PM	Bypass valve opened
1/14/2011	7:47:17 PM	Helium MFC set to  0.000000
1/14/2011	7:47:17 PM	H2 MFC set to  0.000000
1/14/2011	7:47:17 PM	BCl3 MFC set to  0.000000
1/14/2011	7:47:17 PM	PHl3 MFC set to  0.000000
1/14/2011	7:47:17 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:47:17 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:47:17 PM	Tube furnace set to 0
1/14/2011	7:47:44 PM	Helium valve closed
1/14/2011	7:47:44 PM	H2 valve closed
1/14/2011	7:47:44 PM	BCl3 valve closed
1/14/2011	7:47:44 PM	PH3 valve closed
1/14/2011	7:47:44 PM	SiCl4 pre valve closed
1/14/2011	7:47:44 PM	SiCl4 post valve closed
1/14/2011	7:47:44 PM	Bubbler valve closed
1/14/2011	7:47:44 PM	Main Vac valve opened
1/14/2011	7:47:44 PM	Bypass valve opened
1/14/2011	7:47:45 PM	Helium MFC set to  0.000000
1/14/2011	7:47:45 PM	H2 MFC set to  0.000000
1/14/2011	7:47:45 PM	BCl3 MFC set to  0.000000
1/14/2011	7:47:45 PM	PHl3 MFC set to  0.000000
1/14/2011	7:47:45 PM	SiCl4 MFC set to  0.000000
1/14/2011	7:47:45 PM	Bypass solenoid MFC set to  0.000000
1/14/2011	7:47:45 PM	Tube furnace set to 0
1/14/2011	7:47:45 PM	Run finished at 7:47 PM
1/14/2011	7:47:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
